For Sale - Frontend








Asher



- Anatech MP 600 Quartz Barrel Etcher








- Axcelis Fusion 200 PCU System, 8"



- Axcelis Fusion ES3 Stripper/Asher, 12"



- Axcelis Fusion M200 MCU Metal Asher, 8"



- Axcelis Fusion M200 PCU System, up to 8"



- Axcelis Integra Dry Stripper, 12"



- Axcelis RadiantStrip 320 Stripper/Asher, 12"








- AXIC HF-8 Plasma System








- Branson 10" Quartz Barrel Asher



- Branson IPC 2000T Barrel Asher



- Branson IPC P 2000 Barrel Asher



- Branson IPC L3100 Asher



- Branson IPC 4155/2 Plasma Etcher



- Branson IPC 7102 Plasma Etcher








- Canon MAS-8000 Plasma Asher, up to 8"



- Canon MAS-8220 Plasma Asher, up to 8"








- GaSonics Aura 1000 Photoresist Asher, 6"



- GaSonics Aura 2000 LL spares - please ask for list !



- GaSonics Aura 3010 Asher, 5" to 8"



- GaSonics L3510 Asher, 4" to 8"








-GLOW Plasma Cleaning System








- Mattson Aspen II Triode Asher, 8"



- Mattson Aspen III CVD, 8"



- Mattson Aspen III CVD, 12"



- Mattson Aspen III Dual Chamber Strip, 8"



- Mattson Aspen III Lite Etcher, 12"








- PSK Supra Vm Photoresist Stripper, 2 chambers, 12"



- PSK TERA21 Photoresist Stripper, 12"








- Ramco RAM-8500 II Dry Asher, 8"








- Technics 500-II Plasma Asher, 6"



- Technics PE II Plasma Etcher








- Tegal 415 Plasma Asher, up to 4"



- Tegal 515 Plasma Asher, up to 5"



- Tegal 901E Plasma Asher, up to 6"



- Tegal 903E Plasma Asher, up to 6"



- Tegal 903E Plasma Asher, 6", TTW version



- Tegal 915 Barrel Resist Stripper



- Tegal 965 Plasma Asher, up to 6"








- Tepla Auto 300 Asher, 4" to 6", 2.45 GHz, 1000 Watts



- Tepla 300 AL PC Plasma Asher, 6"



- Tepla 300E Plasma Asher



- TePla 400 Plasma Asher



- Tepla 600 AL RF Barrel Asher, up to 8"








- ULVAC Phoenix Asher, 6"








- Unaxis-Nextral NE860 High Density Plasma Etcher, 8"








Chiller



- Accretech SHI-500S Chiller








- Affinity PBA-40k Air-Cooled Chiller








- DISCO DTU-151 Chiller



- DISCO DTU-152 Chiller








- Edwards TCU 40/80 Chiller



- Edwards TCU 40/80 plus Chiller








- Lauda Proline Integral XT 150 Process Thermostat



- Lauda RE204 Ecoline Star Edition Thermostatic Bath / Circulator








- Neslab CFT-75 Recirculating Chiller



- Neslab HX-75 Recirculating Chiller



- Neslab HX-75A Recirculating Chiller



- Neslab HX-150 Chiller



- Neslab HCX-300 Air-cooled Chiller



- Neslab HX-750 Air-cooled Chiller



- Neslab Merlin M25 Recirculating Chiller



- Neslab Merlin M33 Recirculating Chiller



- Neslab RTE-7 Recirculating Chiller








- SMC HRG-015-A Chiller








- TEL D204 Chiller



- TEL D214 Chiller



- TEL D250 Chiller








- Temptronic TPO3000A Chiller



- Temptronic TPO3200A Chiller








- Thermo Neslab HX-300 Chiller



- Thermo Neslab M25 Recirculating Chiller



- Thermo Neslab RTE 7 Refrigerated Bath / Circulator








- VWR 1173PD Refrigerated Recirculating Chiller








CVD / PVD Systems



- Aixtron 2400 G2 MOCVD System



- Aixtron 2400 G3 MOCVD System



- Aixtron 2400 G4 MOCVD System



- Aixtron 2600 G3 MOCVD System



- Aixtron 2600 G3 HT MOCVD System



- Aixtron 2800 G4 MOCVD System



- Aixtron AIX 200 / 4 G2 MOCVD System, 4" / 5"



- Aixtron AIX 200 / 4 HT MOCVD System



- Aixtron AIX 2800 G3 MOCVD System



- Aixtron AIX 2800 G4 HT MOCVD System, 2" x 42



- Aixtron Crius 30X2 MOVD System



- Aixtron Crius 31X2 MOVD System



- Aixtron VP2400HW MOCVD System, 6 x 4" wafers








- AMAT 7700 EPI Reactor, 6"



- AMAT 7810 EPI Reactor



- AMAT AKT 1600 PECVD system, wafer size 370 x 470 mm



- AMAT Centura 4.0, 4 chambers, Poly / Wsix, 12"



- AMAT Centura ACL, 4 chambers APF, 8"



- AMAT Centura DCVD, 4 chambers, ACL, 8"



- AMAT Centura ACP RP EPI, 12"



- AMAT Centura AP Etch, 12", 4 chambers



- AMAT Centura AP Enabler, 4 chambers, 12"



- AMAT Centura AP Enabler FEOL E5



- AMAT Centura AP Chambers, 12"



- AMAT Centura DPS Metal, 4 chambers, 8"



- AMAT Centura DPS Metal Super-E, 8"



- AMAT Centura DPS Metal E-Max, 8"



- AMAT Centura DPS Metal E-Max CT+, 12"



- AMAT Centura DPS+ Metal, 8"



- AMAT Centura eMax CT+ Oxide Etcher, 12"



- AMAT Centura eMax DPS, DPS2 System, 8"



- AMAT Centura EPI System w/ Siconi, 12"



- AMAT Centura EPI System, 2 chambers, RP-EPI, 12"



- AMAT Centura GigaFill SACVD, 3 chambers



- AMAT Centura HDP CVD, 8"



- AMAT Centura RTP XE, 8"



- AMAT Centura Radiance RTP System, 2 chambers, 12"



- AMAT Centura Super-E System, 8"



- AMAT Centura 5200 DxZ, 3 Chambers, TEOS, 8"



- AMAT Centura 5200 Enabler, 3 ea. E2 chambers, 12"



- AMAT Centura 5200 MxP Dielectric Etch, 8"



- AMAT Centura 5200 Oxide PECVD, 3 chambers, 8"



- AMAT Centura 5200 Tungsten PECVD, 4 chambers, 8"



- AMAT Centura 5300 HDP Oxide Etch, 8"



- AMAT Centura II Al CVD chamber, 12"



- AMAT Centura II, 4 HART chambers, 8"



- AMAT Centura II DPS Metal R1, 8"



- AMAT Centura II DPS+ Metal, 8"



- AMAT Centura II IMP Ti chamber, 12", 2 ea.



- AMAT Centura Ultima HDP CVD, 8", 3 chambers



- AMAT Centura Ultima Plus CVD, 6", 2 chambers



- AMAT Centura Ultima TE HDP CVD. 8"



- AMAT Centura Ultima X, HDP CVD. 3 chambers, 12"



- AMAT Centura WXZ CVD System, 3 chambers, 8"



- AMAT Endura 300 Aluminum PVD, 12"



- AMAT Endura CVD, 3 chambers, 8"



- AMAT Endura CVD, 4 chambers, 6"



- AMAT Endura CVD, 4 chambers, AlCU, 8"



- AMAT Endura Dura Ti Chamber, 12"



- AMAT Endura RF Sputter Chamber, 8"



- AMAT Endura TXZ Chamber, 8"



- AMAT Endura II PVD System, 12"



- AMAT Endura II CVD Al Chamber, 12"



- AMAT Endura II ALPS Chamber, 12"



- AMAT Endura II SiCoNi Chamber, 12"



- AMAT Endura II RF Ti Chamber, 12"



- AMAT Endura II eSIPChamber, 12"



- AMAT Endura II Pre Clean Chamber, 12"



- AMAT Endura P5000 Mxp+ Oxide Etcher, 2 chambers, 8"



- AMAT Endura P5000 CVD, 4 chambers, 6"



- AMAT Endura P5000 Mxp Etcher, 3 chambers, 8" ESC



- AMAT Endura P5000 CVD Chamber, 6"



- AMAT Endura P5000 Loadlock Chamber, 6"



- AMAT Endura P5000 Mk II Chamber, 8"



- AMAT Endura P5000 Mk II Metal MXP, 6"



- AMAT Endura P5000 Mk II Etch, 6" clamp



- AMAT Endura P5000 Mk II CVD, 4 chambers, 8"



- AMAT Endura P5000 Mk II Nitride PECVD, 2 chambers, 8"



- AMAT Endura P5000 Mk II TEOS Dep. Etch Back, 8"



- AMAT Endura P5000 Mk II Tungsten Sputter, 2 chambers, 8"



- AMAT Endura P5000 Spares - please ask for list !



- AMAT Endura 5500, 6"



- AMAT Endura 5500 HP PVD, 3 chambers, 8"



- AMAT Endura Re-Flow Chamber, 12"



- AMAT IPS chamber set (Oxide Etch)



- AMAT OPUS Metal Etcher, 2 chambers, 12"



- AMAT Precision 5000 Mk II Metal Etch, 6"



- AMAT P5000 Metal Etcher, 6"



- AMAT P5000 Metal Etcher, 8"



- AMAT P5000 MxP+, Metal, 2 chambers, 6"



- AMAT P5000 MxP+, Poly, 3 chambers, 8"



- AMAT P5000 PE Oxide, 2 DxZ chambers, 6"



- AMAT P5000 PECVD, 8"



- AMAT P5000 CVD, 3 Chambers, 8"



- AMAT P5000, 2 Chambers, TEOS Oxide CVD



- AMAT P5000 RIE / PECVD, 2 Chambers, 6"



- AMAT P5000 Mk II, 3 Chambers TEOS CVD, 8"



- AMAT Producer Standard, 8"



- AMAT Producer GT, 12"



- AMAT Producer SE, 12"



- AMAT Producer SE APF, 12"



- AMAT Producer SE Oxide HT, 12"



- AMAT Producer SE Low K CVD, 12"



- AMAT Tectra, 4 chambers, 8"



- AMAT TxZ Chamber



- AMAT Super-E Chamber



- AMAT WC MCA Chamber



- AMAT 3-Channel Heater / Susceptor Leveling System



- ASM A400 Atmosperic Oxidation, 8"



- ASM A400 High Temp Oxidation, 8"



- ASM A400 LPCVD, 8"



- ASM A412 Vertical Atmospheric Furnace, 12"



- ASM A412 Vertical LPCVD Furnace, 12"



- ASM A412 Vertical LPCVD Furnace, 12", SiN & TEOS



- ASM E3200 EPI Deposition System, 12"



- ASM Eagle 10 Trident Plasma PECVD System








- Canon Anelva C-5100GT PVD Gate Metal Deposition System, 12"



- Canon Anelva C-7100GT PVD Gate Metal Deposition System, 12"








- Centrotherm DO 7.500-650-CANtrol High Temperature, Continuous-Flow-Furnace








- CVC 2800 Cluster Tool








- DNS Aquaspin CVD System, 12"








- Emcore D180 MOCVD System



- Emcore E300 MOCVD System



- Emcore E400 MOCVD System








- Jusung Engineering Cyclone+ LPCVD Furnace, 2 chambers, 12"








- Kokusai DJ-825V-8V Poly Furnace, 8"



- Kokusai DJ-823V-8BL3 LPCVD, 8"



- Kokusai DJ-833V LP-CVD, 8"



- Kokusai DJ-833V H2 Anneal, 8"



- Kokusai DJ-853V LPCVD Furnace, 8"



- Kokusai DJ-853V Furnace, 8" - parts machine








- MRC Eclipse Mark II PVD System, 6"



- MRC Eclipse Mark II PVD System, 8"



- MRC Eclipse pre-Redux PVD System, 6"



- MRC Eclipse Star PVD System, 6"








- Novellus Concept-1 TEOS System, 8"



- Novellus Flat Aligner for Concept-2, 6"



- Novellus Concept-2 Sequel Single Chamber System, 8"



- Novellus Concept-2 Sequel Express, 8"



- Novellus Concept-2 Dual Speed Sequel, 8"



- Novellus Concept-2 Altus DirectFill, 8"



- Novellus Concept-2 Dual Altus Standard CVD, 8"



- Novellus Concept-2 Speed CVD, 8"



- Novellus Concept-2 Sequel Chamber



- Novellus Concept-3 PDL PECVD, 12"



- Novellus Concept-3 Speed MAX, 2 chambers, 12"



- Novellus Concept-3 Speed NExT, 12"



- Novellus Concept-3 Speed Chamber



- Novellus Concept-3 Speed MAX HDP CVD, 2 chambers, 12"



- Novellus Inova PVD Sputter, 6 chambers, 12"



- Novellus PEP Irida Asher, 6"



- Novellus Sabre xT Copper Deposition System, 8”








- Oxford Plasmalab 80 Plus PECVD System, up to 8"



- Oxford Plasmalab 100 PECVD System, 6" to 8"



- Oxford Plasmalab 100 PECVD TEOS System, up to 8"








- Picosun Sunale R-200 Advanced ALD Reactor, 200mm








- Plasmatherm 700 VLR (Versalock) RIE System



- Plasmatherm 700 VLR (Versalock) PECVD System



- Plasmatherm SL-7300 PECVD System



- Plasmatherm SLR-730 PECVD System



- Plasmatherm SLR 770 ICP Etcher, Dual Chamber



- Plasmatherm 740 Etcher, 4"



- Plasmatherm 790 ICP System, up to 8"



- Plasmatherm 790 PECVD System, up to 8"



- Plasmatherm 790 RIE System








- Riber Epineat III-V MBE System








- Semitool Scepter Spray Acid System, 8"



- Semitool 2-Chamber Spray Acid System, 8"








- Sigma Solutions WJ-1000 CVD System








- SINGULUS SINGULAR High Volume PECVD System








- SPTS CPX Deep Silicon Etch (DSIE) and XeF2 Etcher



- SPTS ICP AOE Oxide Etcher, 8"



- SPTS Multiplex ASE-HRM ICP PRO Etcher, 8"



- SPTS Omega FXP Rapier Plasma Etch System



- SPTS VpX PECVD System, 8"



- SPTS VpX Pegasus ICP Etcher, 8"








- TEL Indy A HTOX, 12"



- TEL MB2-730 CVD System, 8", 2 chambers



- TEL Tactras Plasma Etch System, 4 chambers,12"



- TEL Trias Metal MOCVD System, single chamber, 12"



- TEL Trias TI / TiN PECVD System, 4 chambers, 12"



- TEL Unity M Trench Etch System, 8"



- TEL Unity EP PECVD System, 8"



- TEL Unity II 85DD Oxide Etcher, 8"



- TEL Unity IIe 85 PPA Nitride Etch System, 8"



- TEL Unity IIe 85 IA Nitride Etch System, 8", SMIF








- Thomas Swan MOCVD Reactor, 19 x 2"



- Thomas Swan MOCVD Reactor, 31 x 2"



- Thomas Swan MOCVD GaN Reactor, 3 x 2"



- Thomas Swan MOCVD GaN Reactor, 6 x 2"








- Tystar Mini Tytan 8300 Horizontal Furnace, 6" to 8"








- Ulvac Ceraus ZX-1000 PVD System, 8"



- Ulvac Entron PVD System, 12"








- Veeco E300 GaNZilla MOCVD System



- Veeco Gen II MBE System



- Veeco Gen 930 MBE System



- Veeco K465 GaN MOCVD System



- Veeco K465i TurboDisc GaN MOCVD System








- Watkins-Johnson WJ999 R3.5 CVD System, 8"



- Watkins-Johnson WJ-999 TEOS System, 8"



- Watkins-Johnson T1000 APCVD System



- Watkins-Johnson WJ-1500 APCVD TEOS System, 8"








Etcher



- Akrion UP V2 HL.2000 Hybrid-Linear Automatic Acid Wet Station w/ Robotic Transfer



- Akrion UP V2 MP.2000 CU Clean Sink, 8"



- Akrion UP V2 SA.2300 Semi-Automatic Solvent Wet Station - parts system








- Alcatel AMS 200IP DRIE System








- Apprecia Technologies Cenote Metal Wet Etching System, 8"








- DNS FC-3000 Wet Station, 12"



- DNS FC-3100 Wet Station, 12"



- DNS WS-820C Wet Etching System, 8"



- DNS WS-820L Wet Etching System, 8"








- Drytek Etcher Spares - please ask for list !








- FSI ISR-200 Wet Process Bench, 8"



- FSI Mercury MP Spray Processor, 8"



- FSI Mercury OC Spray Processor, 8"



- FSI Scorpio Resist Develop System, 8"



- FSI Zeta 300 Spray Cleaning System, 12"



- FSI Zeta G3 Batch Spray System, 12"








- Innomax ESE 2013 Wet Process Spray System, single wafer








- LAM Alliance 9400 DFM Etch System w/ 2 chambers, 8"



- LAM Alliance Poly Etch Chamber, 6"



- LAM Autoetch 590 Etcher, 6"



- LAM 490 Polyimide Plasma Etcher



- LAM 2300 Kiyo EX Chamber, 12"



- LAM 2300 ELD, WCoP, Electroless Deposition, 12"



- LAM 2300 Exelan Etch Oxide, 4 chambers , 12"



- LAM 2300 Exelan Etch Oxide, 4 chambers , process CU, 12"



- LAM 2300 Stretch ATM + VTM, 12"



- LAM 4420 Poly Etcher, 8"



- LAM 4420 Rainbow Envision



- LAM 4420 Rainbow Poly Etcher, 6"



- LAM 4420 Rainbow Poly Etcher, 8"



- LAM 4420XL Rainbow Poly Etcher, 8"



- LAM 4428 Poly Etcher, 8"



- LAM 4520 Rainbow Classic


10.11.17
- LAM 4520 Rainbow Oxide Etcher, 8"



- LAM 4520i Rainbow Oxide Etcher, 6"



- LAM 4520i Rainbow Oxide Etcher, 8"



- LAM 4520XL Etcher, 6"



- LAM 4520XLE Poly Etcher, 8"



- LAM 4528 Oxide Etcher, 8"



- LAM 4600 Tungsten Etcher, 8" - parts machine



- LAM 4628 Etcher, 6" to 8"



- LAM DV-38DS Single Wet Etch, 12"



- LAM SOSU EXT3100 Bevel Etch , 12"



- LAM TCP 9400 PTX Etch System, 8"



- LAM TCP 9400 SE Etcher, 6"



- LAM TCP 9400 SE Etcher, 8"



- LAM TCP 9400 SE/ENV Etcher, 8"



- LAM TCP 9408 SE Etcher, 8"



- LAM TCP 9600 Etcher, 8"



- LAM TCP 9600 PTX Metal Etch System, 8"



- LAM TCP 9600 SE Etcher, 6"



- LAM TCP 9600 SE Metal Etcher, 8"



- LAM TCP 9608 SE Etcher, 8"



- LAM TCP 9608 SE Metal Etcher, 8"








- March Instruments AP-1000 Plasma Cleaner



- March Instruments Plasmod Barrel Asher



- March Instruments PX-500 Plasma Etcher



- March Instruments PX-1000 Plasma Etcher








- Matrix 403 Plasma Etcher








- Oxford Plasmalab 80 Plus RIE System, up to 8"



- Oxford Plasmalab 100 ICP Etcher, up to 6"



- Oxford Plasmalab 100 ICP Etcher, 8"



- Oxford Plasmalab 130 ICP System



- Oxford Plasmalab 133 ICP 380 System



- Oxford Plasmalab uEtch 300 RIE System








- Plasmatherm SLR-730 PECVD System, Dual Chamber, 8"



- Plasmatherm 790 RIE Etcher, up to 8"








- Samco RIE-10NR Reactive Ion Etching System, 8"



- Samco RIE-200L Dry Etching System, 8"








- Sankyo SWH80 Wet Oxide Etch Bench, 8"








- SCP Evolution 200 Oxyde Strip Wet Station, up to 8"








- Semitool SAT 4060 Spray Processor, 6"



- Semitool SAT 4061 T1A3 PCDU Spray Processor, 6"



- Semitool Scepter Spray Acid System, 8"



- Semitool SSTC-321-280 Spray Solvent Tool, 8"



- Semitool SSTC-421-280 Spray Solvent Tool, 8"



- Semitool SSTC-441-280 Spray Solvent Tool, 8"



- Semitool SSTF-281-280MBT Spray Solvent Tool, 8"








- SEZ 4300 Spin Etcher, 12"



- SEZ DV-34BF Wafer Processor, 12"



- SEZ 101 Spin Etcher, up to 6"



- SEZ 201 Spin Etcher, 6" to 8"



- SEZ 203 Spin Etcher, 6" to 8"



- SEZ 223 Spin Etcher, 4" to 8"



- SEZ 304 Spin Etcher, 8" to 12"



- SEZ 305 Spin Etcher, 8" to 12"



- SEZ 323 Spin Etcher, 12"



- SEZ spares - please ask !








- Shibaura CDE-8 Dry Etcher, 8"



- Shibaura µ ASH 1800W Asher, 8"








- STS Multiplex ICP Etcher, 6"



- STS Multiplex ICP High Rate Inductively-Couple Plasma Etcher, up to 8"



- STS Multiplex Reactive Ion Etcher (RIE), 6"



- STS Multiplex ICP AOE System, up to 8"








- Technics Micro 800 RIE Benchtop Etcher








- Tegal 6520 HRe Alu Etcher, 6"








- TEL Telius SP Cluster Plasma Etcher, 2 chambers, 12"








- Trikon Omega 201 Metal Etcher








- ULVAC TDE-300M Plasma Etcher, 8"








- Veeco Microetch 1201 Ion-Beam Milling System, up to 8"



- Veeco RF-350 Ion Beam Milling System, up to 8"



- Veeco RF-350S Ion-Beam Milling System, 6"








Evaporation and Sputtering Systems



- Alcatel SCM 560 Sputtering System



- Alcatel SCR 650 Sputtering System








- Alliance Concept EVA-450 Evaporation / Sputtering System








- Balzers BAK-550 Evaporator System



- Balzers BAK-600 Evaporator System



- Balzers BAK-600 CE Evaporator System



- Balzers BAK-640 Evaporator System



- Balzers BAK-750 E-Beam Evaporator System



- Balzers BAK-760 E-Beam Evaporator System



- Balzers LLS-802 Metal Sputter System



- Balzers LLS EVO Sputter System



- Balzers UMS 500 Ultra High Vacuum Evaporator








- Canon Anelva I-1060 SV II Plus-1 Sputtering System, 5 chambers, 8"








- CHA Mark 50 E-Beam Evaporator, 6"



- CHA Mark 50C E-Beam Evaporator, 4"



- CHA SE-600 Evaporator w/ 4 pocket electron beam gun and cryopump



- CHA SE-1000 E-Beam Evaporator








- Cressington 208HR High Resolution Sputter Coater








- Denton Desk IV High Vacuum Evaporation Deposition System



- Denton Integrity 14 Vacuum System








- Edwards E306 Filament Evaporator








- Electrotech MS 6210 Sputtering System, 4"








- Emitech K675X Table-top Sputtering System








- EVG EV101 Manual Spin Coater



- EVG 150 Automated Coater / Developer, up to 8"








- ITO Roll to Roll Sputtering System, max. 1,400 mm film width








- Karl Suss ACS 200 Spin Coater, 8"



- Karl Suss Alpha R.12 Liquid Transfer Coating Tool



- Karl Suss Delta 12AQ Spin Coater / Developer, 8" / 12"



- Karl Suss Delta 12L Spin Coater / Developer, 8" / 12"



- Karl Suss Gamma 60 Coater, 6"



- Karl Suss RC16 Spin Coater, 6"








- Kurt Lesker Aluminum Evaporator, 8"








- Leybold A-1100 E-beam Evaporation System



- Leybold APS 904 Optical Coating System



- Leybold APS 1104 Evaporation System



- Leybold APS 1504 Optical Coating System



- Leybold L-560 E-beam Evaporation System



- Leybold LH-900 Evaporation System



- Leybold Pegasus Sputtering System



- Leybold Z-550 MS Sputtering System



- Leybold ZV-6000 Sputtering System








- MRC 643 Sputtering System



- MRC 8867 Sputtering System



- MRC 903M Sputtering System, 3 targets



- MRC 942 Sputtering System








- Optorun OTFC-1100 Optical Coater








- Perkin-Elmer 2400 Sputtering System, up to 6" - refurbished



- Perkin Elmer 2400 Sputtering System



- Perkin Elmer 4410 RF / DC Sputtering System








- Plasma Sciences HRC-200 Table-Top RIE System








- Satisloh S-900 E-beam Evaporation System



- Satisloh 1200 E-beam Evaporation System








- Semicore SC250-450 Benchtop Sputtering System



- Semicore SC3500 Electron Beam Evaporation System



- Semicore SC4000 Electron Beam Evaporation System








- Temescal BJD-1800 Sputtering System



- Temescal BJD-2000 Electron Beam Evaporator



- Temescal FC1800 Electron Beam Evaporator



- Temescal VES-2550 Evaporation System








- Thermionics VE Series R&D E-Beam System








- Torr CRC 150 Sputtering System



- Torr EB-4P3kWS Thin Film Deposition System








- UHV Magnetron Sputtering System








- ULVAC Ei - 5k e-Beam Evaporation System



- Ulvac Satella Thin Film Deposition System for OLED, 200 x 200 mm substrate size



- Ulvac SMD-450C Sputter



- Ulvac STD-1200 In-Line Sputter



- Ulvac ZX-1000 Sputter








- Unaxis LLS EVO Sputtering System, 8"








- Varian 3290 ST Sputtering System



- Varian M2i Sputtering System, 8"








- Veeco Spector Optical Coater








Furnaces



- ASM A412 Furnace, 12"



- ASM COE 139 Curing System








- Aviza AVP 8000 AP Vertical Furnace, 8"



- Aviza AVP 8000 LP LPCVD Furnace, 8"



- Aviza Celsior LPCVD Furnace, 12"



- Aviza Pantheon LPCVD Furnace, 12"



- Aviza Pantheon LPCVD Furnace, 3 ALD chambers,12"



- Aviza VTR 7000 High Temperature Furnace, 8"








- BTI BDF-4 Horizontal Oxidation Furnace, up to 6"








- BTU Bruce 7355 Horizontal Furnace, 8"



- BTU TCA 52-3-36N24 Belt Furnace



- BTU TCA 93-4-36E36 Belt Furnace



- BTU TL63-3-54E48 Belt Furnace



- Bruce BTU BDF-41 Spares - please ask for list !








- Despatch CF-2710 Furnace



- Despatch DF-14414 / 10-NS Inline Diffusion Furnace








- First Nano ET3000 Horizontal Furnace, 2" to 5"



- First Nano ET6000 Horizontal Furnace








- Futek PF-3103 Magnetic Annealing Furnace








- GT Advanced Sapphire Furnace








- Kokusai DJ-803V Oxidation Furnace, 8"



- Kokusai DD-823V Furnace, 8"



- Kokusai DJ-825V Poly LPCVD, 6"



- Kokusai DJ-853 Furnace, 8"



- Kokusai DJ-853V-BL D-Poly, 8"



- Kokusai DJ-853V-BL Nitride, 8"



- Kokusai DJ-853V-BL SOG Curing, 8"



- Kokusai DJ-853V-BL TEOS, 8"



- Kokusai Quixace Vertical Furnace, ALD TiN, 12"



- Kokusai Quixace DD-1206V-DF Vertical Furnace, 12"



- Kokusai Quixace DD-1206VN-DF Vertical Furnace, 12"



- Kokusai Quixace DJ-1206VN-DM Vertical Furnace, 12"



- Kokusai Quixace Ultimate Vertical Furnace, 12"



- Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12"



- Kokusai Zestone III (DJ-1223V) Vertical Furnace, Poly, 12"








- Koyo Thermo System VF-5300B Polyimide Bake








- MRL Diffusion Furnace, 12", single stack



- MRL Cyclone C430 Four-Tube Horizontal Furnace, 6"








- RTC S910 Furnace, up to 1000 deg C



- RTC S915 Furnace, up to 1000 deg C








- SST DAP 1100 Vacuum Furnace, 1000 deg C



- SST DAP 2200 Vacuum Furnace, 1000 deg C



- SST HVWB 2200 Vacuum Furnace, 1000 deg C



- SST MV 2200 Vacuum Furnace, 1000 deg C








- SVG 7000 Furnace, 6"



- SVG VTR-7000 Oxide Vertical Furnace, 8"



- SVG AVP 8000 AP Vertical Furnace, 8"



- SVG AVP 8000 LP Vertical Furnace, 8"








- TEL Alpha 303 Furnace, TEOS, 12"



- TEL Alpha 303i DCS-HTO Furnace, 12"



- TEL Alpha 303i Furnace, LT SOD cure, 12"



- TEL Alpha 303i Furnace, P-Doped Poly, 12"



- TEL Alpha 8S Furnace, 8" 



- TEL Alpha 8SE Furnace, 8"



- TEL Alpha 8SE-E Furnace 8", High Temp Oxide



- TEL Alpha 8SE Furnace, 8"



- TEL Formula Vertical Nitride Furnace, 12"



- TEL Indy Vertical Furnace



- TEL Indy+ Vertical Furnace, 12", ALD HfO2



- TEL UL2604-08H Furnace



- TEL UL2604-10H Furnace








- Thermal Technology Meltmaster High-Purity Vacuum Arc Melt Furnace








- Thermco Diffusion Furnace, 3 tubes, up to 4"



- Thermco MiniBrute MB71 Furnace, 5"



- Thermco MiniBrute MB80 Furnace, 5"



- Thermco HTR 5200 Horizontal Diffusion Furnace, 6"








- Thermolyne 46230CM-75 Furnace, up to 1,700 deg C








- VacLong VSG-B200 Vacuum Furnace








Implanter



- AMAT 9500 XR Ion Implanter, 8"



- AMAT Quantum X Plus High Current Ion Implanter, 12"



- AMAT XR120 Ion Implanter



- AMAT xR-LEAP Low Energy Ion Implanter, 8"








- Axcelis HC3 High Current Ion Implanter, 12"



- Axcelis/Eaton NV GSD HE High Energy Ion Implanter, 8"



- Axcelis/Eaton NV GSD 200E2 80 keV High Current Implanter, 8"



- Axcelis Optima HD High Dose Ion Implanter, 12"



- Axcelis Purion H High Current Ion Implanter, 12"








- Eaton Nova NV 10-160 Ion Implanter, 5"








- Nissin Exceed 2300 Ion Implanter, 12"








- SEN Eaton GSD-HE Ion Implanter, 8"



- SEN Eaton GSDIII-LE Ion Implanter, 8"



- SEN LEX3 Low Energy High Current Ion Implanter



- SEN Eaton NV-GSD-A160 Ion Implanter, 5"



- SEN Eaton NV-GSDIII-LE High Current Implanter, 8"








- Varian 160XP High Current Ion Implanter, 6"



- Varian E220 HP Ion Implanter, 8"



- Varian E220 HP Ion Implanter, 6"



- Varian E500 EHP Medium Current Ion Implanter, 8"



- Varian E500 EHPi Medium Current Ion Implanter, 8"



- Varian E500 HP Ion Implanter, 6"



- Varian E500 HP Ion Implanter, 8"



- Varian E1000 Implanter, 8"



- Varian VIISion 80 Ion Implanter, 6"



- Varian VIISion 80 Ion Implanter, 8"



- Varian VIISta 80 Classic High Current Ion Implanter, 8"



- Varian VIISta 810 Medium Current Ion Implanter, 8"



- Varian VIISta 810 XEr Medium Current Ion Implanter, 12"



- Varian xR120 Ion Implanter, 8"








Laser



- Advanced Laser Separation DCM802 Laser Scribe








- Chicago Laser CLS37 Laser Trimming System, refurbished



- Chicago Laser LS960 Laser Trimming System, refurbished








- Cymer ELS 4000 Laser



- Cymer ELS 5600 Laser



- Cymer ELS 6300 Laser








- ESI 44 Laser Trimming System



- ESI 2050 LP Laser Trimming System



- ESI 4410 Laser Trimming System w/o parts handler



- ESI 4990 Laser Trimming System



- ESI 5970 Laser Repair System



- ESI 9275 Laser Repair System - parts machine



- ESI 9300 Laser Repair System



- ESI 9350 Laser Repair System



- ESI 9820 Laser Processing System, 12"



- ESI 9830 Laser Processing System, 12"



- ESI 9835 Laser Processing System, 12"



- ESI 9850 Laser Processing System, 12"








- GSI JK201H Laser



- GSI M310 Laser Trimming System



- GSI M320 Laser Repair System



- GSI M430 Laser Repair System



- GSI M435 Laser Repair System








- Hitachi ABC-2C-C CO2 Laser System








- Innolas ILSTT-DS Laser System








- New Wave Research 2150 Laser Scriber



- New Wave Research Titan Laser Scriber








- Rofin Baasel Starcut 100 SC-100 ICQ-DK Laser



- Rofin DQ 010 q-switched Solid State Laser








LED Production



- ASM AD830 Die Bonder for LED's



- ASM DS830 Dispensing / Jetting Machine



- ASM IBE139H Buffer



- ASM iHawk Xtreme Wire Bonder



- ASM MC906H Curing Oven



- ASM MP-TAB Singulation Machine



- ASM SLS230T Automatic LED Sorting Machine



- ASM SLT400 Taping Machine








Metrology



- Accent RPM 2000 PL Mapper








- ADE Episcan 1000 FT-IR Spectrometer



- ADE Microsense 6033T Thickness Gauge, up to 6"








- Advantest / Leica E3610 CD SEM








- AMAT AERA2+ Reticle Inspection



- AMAT NanoSEM 3D Critical Dimension SEM, 12"



- AMAT Opal 7830i CD SEM, 8"








- AMS IR-3000 FT-IR Spectrometer, 12"



- AMS IR-3100 FT-IR Spectrometer, 8"








- Beta Squared OS2000 Micralign Mask Scanner, 4" to 6"








- Biorad QS 300 FTIR Spectrometer



- Biorad QS 300 FTIR Spectrometer, up to 12"



- Biorad QS 408M Manual FTIR Spectrometer, up to 8"



- Biorad QS 1200 FTIR Spectrometer, 12"



- Biorad Quaestor Q7 Profilometer, 8"








- Bomem MB-160 PH FTIR Spectrometer








- Bruker Tensor 27 FTIR Spectrometer w/ MCT and DTGS Detector








- Cary 50 Bio Spectrophotometer








- CDE ResMap 168 Four Point Probe System








- Commonwealth Scientific / Veeco 8C Ion Milling System








- Cyberscan Vantage Noncontact Profiler with Keyence LT9010M








- Dynamic Micro Systems 2090 Automatic Reticle Changer








- Filmetrics F20-EXR Film Thickness Measurement








- Four Dimensions 280C Four Point Probe System








- FSM 128 Film Stress Measurement System, 8"








- Gaertner L116S Ellipsometer








- HSEB Axiospect 300, 12"








- Hypervision Visionary 2000 Wafer Inspection System, 8"








- ICOS WI-2000 Wafer Inspection System, 8"



- ICOS WI-2200 Wafer Inspection System, 8", w/ HM-200 Handler








- Jordan Valley JVX5200 XRR X-Ray Reflectometer, 12"








- KLA Tencor 2401 Viper Macro Defect Inspection, 8"



- KLA Tencor 5200 XP Overlay and CD Measurement, 8"



- KLA Tencor 5300 Overlay and CD Measurement, 8"



- KLA Tencor Aleris Spectra DX Interferometer, 12"



- KLA Tencor Archer XT Plus, 12"



- KLA-Tencor Archer AIM, 300mm



- KLA-Tencor ASET F5x Thin Film Measurement System, 8"



- KLA-Tencor ASET F5x Thin Film Measurement System, 8" / 12"



- KLA Tencor eCD 1 SEM, 8" / 12"



- KLA-Tencor eDR-5210 Wafer Defect Review System



- KLA Tencor eS32 Defect Review System, 12"



- KLA Tencor Flexus FLX-2300 Stress Measurement, 8"



- KLA Tencor Flexus FLX-2320 Stress Measurement, 6"



- KLA Tencor Flexus FLX-2320 Stress Measurement, 8"



- KLA Tencor Flexus FLX-2360 Stress Measurement, 12"



- KLA Tencor Flexus FLX-2908 Stress Measurement, 8"



- KLA Tencor Flexus FLX-5500 Stress Measurement, 8"



- KLA-Tencor LMS IPRO5 Photomask Registration and CD Metrology System



- KLA Tencor M-Gage 300 Wafer Monitor w/ DDC



- KLA Tencor / Prometrix RS35C Four Point Probe System



- KLA Tencor / Prometrix RS50/e Four Point Probe System, 8"



- KLA Tencor / Prometrix RS55/tc Four Point Probe System, 8"



- KLA Tencor / Prometrix RS55/tca Four Point Probe System, 8"



- KLA Tencor / Prometrix RS75 Four Point Probe System



- KLA Tencor / Prometrix RS75/a Four Point Probe System



- KLA Tencor P-2 Long Scan Profilometer, 8"



- KLA Tencor P-15 Long Scan Profilometer



- KLA Tencor P-20H Long Scan Profilometer, 8"



- KLA Tencor Puma 9000 Dark Field Defect Inspection, 12"



- KLA Tencor Quantox 64100 Silicon and Oxide Monitoring System, 8"



- KLA Tencor SCD Interferometer, 12"



- KLA Tencor TeraScan SL526 Reticle Inspection



- KLA Tencor TeraScan 586 Reticle Inspection



- KLA Tencor Ultrapointe CRS 1010S Interferometer, 8"



- KLA Tencor UV1050 Film Thickness Measurement, 8"



- KLA Tencor UV1080SE Film Thickness Measurement, 8"



- KLA Tencor UV1250SE Film Thickness Measurement, 8"



- KLA Tencor UV1280SE Film Thickness Measurement, 8"



- KLA Tencor / Prometrix VP-10 Four Point Probe System



- KLA Tencor Parts - please ask !








- Lasertec M2351 Reticle Inspection








- Leica IPRO2 Reticle Inspection SEM








- Micrion 9500 FIB System








- MTS Nano Indenter SA2








- Nanometrics NanoSpec AFT 180 Thin Film Measurement System



- Nanometrics Nanospec AFT 210UV Thin Film Measurement System, up to 6"



- Nanometrics Nanospec AFT 2100 Thin Film Measurement System, 3" to 8"



- Nanometrics NanoSpec 3000 Thin Film Measurement System, 8"



- Nanometrics NanoSpec 4000 Thin Film Measurement System



- Nanometrics NanoSpec 4150 Thin Film Measurement System, up to 8"



- Nanometrics NanoSpec 6100 Thin Film Measurement System, up to 8"



- Nanometrics 8000 Thin Film Measurement System, 6"



- Nanometrics 8300 Thin Film Measurement System, 8" + 12"



- Nanometrics Q200i Biorad Overlay System, 8"



- Nanometrics QS-1200 FT-IR Spectrometer, up to 8"



- Nanometrics Vertex PL Mapper








- Newport SP92250A-1000-U Class A Solar Simulator








- Nicolet Magna 550 FT-IR Spectrometer, 8"



- Nicolet Protégé 460 FTIR Spectrometer, up to 12"








- Perkin Elmer Spectrum One FTIR Spectrophotometer



- Perkin Elmer 1000 PE GX FTIR Spectrophotometer








- Philips PQ Ruby X-Ray Ellipsometer



- Philips SPW-2800 X-Ray Surface Analyser, 8"








- Plasmos SD2000 Ellipsometer



- Plasmos SD2003 3 Wavelength Ellipsometer



- Plasmos SD2302 Ellipsometer



- Plasmos SD4000 Ellipsometer








- Raytex EdgeScan Wafer Edge Inspection System, 8"








- ReVera VeraFlex, 12"








- Rigaku MFM65 Small Spot Energy Dispersive X-Ray Fluorescence Spectrometer



- Rigaku TXRF 300S X-Ray Fluorescence Spectrometer



- Rigaku XRF 3620 X-Ray Fluorescence Spectrometer, 8"



- Rigaku XRF 3630 X-Ray Fluorescence Spectrometer, 8"



- Rigaku XRF 3640 X-Ray Fluorescence Spectrometer, 8"



- Rigaku TXRF 3700H X-Ray Spectrometer



- Rigaku Ultima IV X-Ray Diffraction System (XRD)



- Rigaku Wafer X 300 XRF Spectrometer








- Rudolph / August NSX-90 Wafer Inspection System, 8"



- Rudolph / August NSX-95 Wafer Inspection System, 8", w/ FFH handler



- Rudolph / August NSX-105B Wafer Inspection System, 8"



- Rudolph / August NSX-105C Wafer Inspection System, 8", w/ Wafer Handler








- Rudolph Auto EL-III Ellipsometer, 6"



- Rudolph AXI-930 B20 Macro Defect Inspection, 12"



- Rudolph FE-III Ellipsometer, 6"



- Rudolph FE-VII Ellipsometer, 8"



- Rudolph MetaPulse 200X Cu System, 8"



- Rudolph SE200XL Spectral Ellipsometer, 8"



- Rudolph STI WAV1000 Wafer Inspection Station, 12", w/ Accretech UF300A



- Rudolph Waferview 320 Wafer Inspection System, 12"








- RVSI WS-2800 Wafer Inspection System








- Semilab IR3100S Small spot IR-Near IR FT-IR Spectrometer, 12"



- Semilab / SDI WT-2000 Measurement System, 8"








- Seminet SAFEGUARD-RHIS Reticle Handling and Inspection System








- Sopra GES-5 Ellipsometer








- ThermaWave Optiprobe 2600B Film Thickness Measurement System



- ThermaWave Optiprobe 2690 Film Thickness Measurement System



- ThermaWave Optiprobe 3260 DUV Film Thickness Measurement System



- ThermaWave Optiprobe 3260 DUVi Film Thickness Measurement System



- ThermaWave Optiprobe 3290 DUV Film Thickness Measurement System



- ThermaWave Optiprobe 5220 Film Thickness Measurement System



- ThermaWave Optiprobe 5240 Film Thickness Measurement System



- Thermawave OptiProbe 5340C Thin Film Thickness Measurement, up to 12"








- Thermo Nicolet Avatar 360 FTIR Spectrometer



- Thermo Nicolet Avatar 370 FTIR Spectrometer



- Thermo Nicolet Avatar 870 Spectrum FTIR Spectrometer



- Thermo Nicolet ECO 1000 FTIR Spectrometer








- Thermo Scientific MicroXR VXR Benchtop X-ray Fluorescence Spectrometer








- Veeco Dektak IID Profilometer



- Veeco Dektak 3 Profilometer



- Veeco Dektak 3030 Profilometer



- Veeco Dimension 3000 Atomic Force Microscope (AFM)



- Veeco Dimension 5000 Atomic Force Microscope (AFM)



- Veeco Dimension X1D Atomic Force Microscope (AFM), 12"



- Veeco Dimension X3D Atomic Force Microscope (AFM)



- Veeco RF-350 S Ion Mill, 8"



- Veeco Sloan Dektak 8000 Profiler, 8"



- Veeco V200 Si Profilometer, 8"



- Veeco Vx330 Atomic Force Profiler, 12"



- Veeco NT3300 Surface Profilometer, 8"








- WYKO NT-2000 Surface Profilometer








Photolithography



- Fairchild FALCON Photolithographic Line, up to 8"








- Fusion Gemini GPS Photostabilizer, 8"








- MIVA 20128 Mask Wrighter








- Raith 150 E-Beam Writer, 6"








- Tamarack 152P/162 Projection Mask Aligner



- Tamarack 152R Projection Mask Aligner



- Tamarack 161 Optical Comparator



- Tamarack 163 Rotary Projection Printer



- Tamarack 303 Projection Mask Aligner








Pumps



- Adixen ATH 500M Turbo Pump








- Alcatel 2021 I Pre-Pump



- Alcatel 2063 CP+ Pump



- Alcatel A100L Dry Pump



- Alcatel ADS501 Dry Pump



- Alcatel ADS602 Dry Pump



- Alcatel ADS602P Dry Pump



- Alcatel ADS801 Dry Pump



- Alcatel ADS1202H Dry Pump



- Alcatel ATH 1300M Turbo Pump








- Balzers DIF 160 Diffusion Pump



- Balzers DIF 250 Diffusion Pump








- Ebara AA10 Dry Pump



- Ebara AA70WN Dry Pump



- Ebara A25S Dry Pump



- Ebara A30W Dry Pump



- Ebara A70W Dry Pump



- Ebara ADP122P Dry Pump



- Ebara ADP602P Dry Pump



- Ebara ESR20N Dry Pump



- Ebara ESR80WN Dry Pump








- Edwards E2M-80 Dual Stage Vacuum Pump, Fomblin prepped



- Edwards EH250 Vacuum Pump



- Edwards iF30K Dry pump



- Edwards iH80 Dry Vacuum Pump



- Edwards iH600 Dry Vacuum Pump



- Edwards iH600 Mk5 Dry Vacuum Pump



- Edwards iH1000 Dry Vacuum Pump



- Edwards iH1000 Mk5 Dry Vacuum Pump



- Edwards iF1800 Dry Vacuum Pump



- Edwards iH1800 Dry Vacuum Pump



- Edwards iQDP40 Dry Vacuum Pump



- Edwards iQDP80/500 Dry Vacuum Pump



- Edwards iQDP80/1200 Dry Vacuum Pump



- Edwards QDP80 Dry Vacuum Pump



- Edwards 8 RV8 Vacuum Pump



- Edwards STP-603-U Turbomolecular Pump



- Edwards STP-301 Turbomolecular Pump



- Edwards STP-1003U Turbomolecular Pump



- Edwards STP-H600C Turbomolecular Pump



- Edwards XDS5 Dry Scroll Vacuum Pump








- Kashiyama SD60V Dry Pump



- Kashiyama SDE1203B Dry Pump








- Leybold D65BCS Vacuum Pump



- Leybold TW250S Turbo Pump



- Leybold TURBOVAC T 1600 Turbo Pump








- Osaka TG1813BW Compound Molecular Pump








- Pfeiffer TMH521 Turbo Pump








- Seiko Seiki STP-H301C Turbomolecular Pump








- Shimadzu TMP Turbo Pump








- Trebor Magnum 610 Acid Pump








- Unozawa TS300A Dry Vacuum Pump








- Varian Turbo-V 300HT Macro Torr Turbomolecular Vacuum Turbo Pump








- White Knight AP-100 Acid Pump



- White Knight AT-300 Acid Pump w/ filter



- Kashiyama SD60V Dry Pump



- Kashiyama SDE1203B Dry Pump








Rapid Thermal Processing



- AG Associates 210M Heatpulse RTP System, 4"



- AG Associates 410 Heatpulse RTP System, 4"



- AG Associates 601 Heatpulse RTP System, up to 6"



- AG Associates 610 RTP System, up to 6"



- AG Associates 4100S Heatpulse RTP System, 6"



- AG Associates 8108 Heatpulse RTP System, 8"



- AG Associates 8800 Heatpulse RTP System, 8"








- AST SHS 200 RTP System








- Mattson AST 2800 RTP System, 6"



- Mattson AST 2800 RTP System, 8"



- Mattson AST-2800 Spares - please ask for list !



- Mattson AST SHS-2900 RTP System, 8"



- Mattson AST SHS-3000 RTP System, 8"



- Mattson AST SHS-3000 RTP System, 12"



- Mattson Helios RTP System, 12"








- MTP RTP-600XP Rapid Thermal Process System, Benchtop








Resist Processing



- CFM Technologies CFM8050 Full Flow Photo Resist Processing








Wafer Bonder



- EVG EV501 Wafer Bonder, up to 6"



- EVG 520 Wafer Bonder, up to 6"



- EVG 520IS UV-NIL Bonder, 8"



- EVG 520IS Wafer Bonder, up to 8"



- EVG 850DB Wafer Debonding System, 8"



- EVG 850DB/200 Wafer Debonding System, 6"



- EVG 850TB Wafer Bonding System, 8"



- EVG 850DB/200 Wafer Bonding System, 6"



- EVG Gemini Automated Wafer Bonder, 8"



- EVG Smartview Bond Aligner, 6" to 12"








- Karl Suss ABC200 Wafer to Wafer Bonder



- Karl Suss CBC200 Automated Wafer Bonding Cluster System



- Karl Suss SB8e Substrate Bonder, up to 8"








- Logitech 3000 Wafer Bonder, up to 6"



- Logitech 1WBT2 Wafer Substrate Bonder - parts machine








Wafer Cleaning



- Disco DCS-140 Wafer Washer



- Disco DCS-141 Wafer Washer








- DNS AS-2000 CMP Scrubber



- DNS SC-W60A spares - please ask !



- DNS SS-W60A-AR Scrubber, 6"



- DNS SS-60A-AR Double Side Scrubber, 6"



- DNS SSW-80B-AR Scrubber, 8"



- DNS SSW-80A Scrubber, 8"



- DNS SS-W80A-AR Scrubber, 8"



- DNS SS-W80B-AR Scrubber, 8"



- DNS SS-3000-A Wafer Scrubber, 12"



- DNS SS-3000-AR Wafer Scrubber, 12"



- DNS SU-3000 Single Wafer Cleaner, 12"



- DNS Aquaspin SU-3100 Single Wafer Cleaner, 12"



- DNS WS-820L Wafer Cleaning Track








- Ebara EPO-113 CMP System, 8"



- Ebara EPO-222 ILD CMP System, 8"



- Ebara FREX300-S CMP System, 12"








- MEG 8BC Spin Cup Cleaning System, up to 12"



- MEG SS Spin Scrubber Cleaning System, 4" to 8"








- OnTrack DSS-200 Series I Wafer Brush Cleaning System, 8"



- OnTrack DSS-200 Series II Wafer Brush Cleaning System, 8"



- OnTrack DSS-2200 Synergy Wafer Brush Cleaning System, 8"








- Peter Wolters PM300 CMP System, 12"








- Rena SC1 / SC2 Wafer Cleaning System, 6" to 12"








- Semitool Magnum HF Cleaner, 8"



- Semitool WST308 Solvent Spray Processor, 8"



- Semitool 270 Spin Rinse Dryer (SRD), 4" to 6"



- Semitool 270D Dual Stack Spin Rinse Dryer (SRD), 6"



- Semitool 270S Spin Rinse Dryer (SRD), up to 6"



- Semitool 280S Spin Rinse Dryer (SRD), up to 8"



- Semitool 840 Dual Stack SRD, 4"



- Semitool 860 Dual Stack Spin Rinse Dryer (SRD), up to 5"



- Semitool 870S Spin Rinse Dryer (SRD), dual stack, up to 6"



- Semitool 880S Dual Spin Rinse Dryer (SRD), up to 8"



- Semitool ST-870 Spin Rinse Dryer (SRD), up to 6"



- Semitool 2700 Dual Stack SRD, 4" to 6"



- Semitool 4300S Single Stack SRD, up to 8"



- Semitool ST-8300 Dual Spin Rinse Dryer (SRD), up to 8"



- Semitool 8300S Dual Spin Rinse Dryer (SRD), up to 8"



- Semitool Rotors - please ask !








- SEZ DaVinci DV-38 Wafer Cleaner, 12"








- SSEC 3302 Trilennium Double Sided Cleaner, 8" / 12"








- SVG 8600 Wafer Scrubber, 6"








- TEL Mk 11 Clean Track, 6"








- Ultra-t Equipment SCS 112 Wafer Cleaner, up to 8"



- Ultra-t Equipment SCS 124 Wafer Cleaner, up to 8"








- Verteq 1800-6AL Dual Stack Spin Rinse Dryer, 8"



- Verteq 1800-6AR Spin Rinse Dryer, 8"



- Verteq RD 4500 Classic Spin Rinse Dryer, 4"



- Verteq ST800-41L Megasonic Wafer Cleaner, up to 8"



- Verteq Rotors - please ask !








- Yieldup Omega 6200 Wafer Cleaning System, 8"








Wafer Coater / Developer



- Brewer Science CEE 100CB Coat Bake Track



- Brewer Science CEE 200 FX Resist Developer, 12"



- Brewer Science 300XD Resist Developer, 12"



- Brewer Science CEE 4000 Photoresist Coater (bench top unit)








- C & D Semi Dual Coater Track



- C & D Semi Dual Developer Track








- DNS SC-W60A-AVFG SOG Coater, 6"



- DNS SC-W60A 2C Coater, 6"



- DNS SDW-60-AVP Developer, 6"



- DNS SDW-60A-AV Developer, 6"



- DNS 80A Developer, 6"



- DNS 80A Scrubber



- DNS RF3 Coat / Develop Track



- DNS SK-W80A-BVPE Track, 1C / 2D, 8"



- DNS SK-W80B-AVPE Track, 1C / 2D, 8"



- DNS SK-200W Coater / Developer, 8"



- DNS SK-2000 Coater / Developer








- EVG 101 Spray Coater








- LAURELL WS-650Sz Manual Spin Coater








- Sokudo RF-300A Coater / Developer Track, 12"








- Solitec Coat Bake Track, 2" / 3"








- STEAG Microtech Coater/Developer Cluster 421








- SVG 88 Coater / Developer Track System, 6"



- SVG 88 Dual Track Coater, 6"



- SVG 8800 Dual Track Coater / Developer System



- SVG 8826 Dual Track Coater / Developer System, up to 6"








- SVS MSX 1000 Coater / Developer, 2"








- TEL Mk 7 2C / 2D Track, 8"



- TEL Mk 8 1C / 1D Track, 8"



- TEL Mk 8 2C / 2D Track, 8"



- TEL Act 8 2C / 3D Track, 6"



- TEL Act 8 2C / 2D Track, 8"



- TEL Act 8 2C / 2D Track, 8"



- TEL Act 8 Track, 2 Coat / 2 Develop, dual block, 8"



- TEL Act 8 Track, 3 Coat / 3 Develop, dual block, 8"



- TEL Act 8 Track, 3 Coat / 4 Develop, dual block, 8"



- TEL Act 8 Track, 4 Coat / 3 Develop, dual block, 8"



- TEL Act 8 Track, 4 Coat / 4 Develop, dual block, 8"



- TEL Act 8 Single Block Track, 8"



- TEL Act 12 2C / 4D Track, setup for 8"



- TEL Lithius Coater Developer, 8"



- TEL Lithius ArF Photoresist Coater / Developer, 12"



- TEL Lithius KrF Photoresist Coater, 12"



- TEL Lithius i-Line Coater Developer Track, 12"








Wafer Grinder / Polisher



- Accretech PG200RM Backside Grinder



- Accretech PG300RM Backside Grinder, 8" / 12"








- Buehler Ecomet-3 Automatic Grinder



- Buehler MPC-3000 Precision Parallel Grinder








- Daitron WBM-2100 Wafer Edge Grinder, 8"








- DISCO DAG-810 Automatic Surface Grinder, 8"



- DISCO DFG 82IF/8 Grinder



- DISCO DFG-840 Backside Grinder, 8"



- DISCO DFG-840HS Backside Grinder, 8"



- DISCO DFG-841 Backside Grinder, 8"



- DISCO DFG-850 Backside Grinder, 8"



- DISCO DFP-8140 Polisher, 8"



- DISCO DFP-8160 Polisher, 12"



- DISCO DFG-8540 Backside Grinder, 8"



- DISCO DFG-8560 Backside Grinder, 8" and 12"



- DISCO DFG-8560 Backside Grinder, 12"



- DISCO DGP-8761 Grinder/Polisher for 6" LED wafers



- DISCO DGP-8761 Polish Grinder, 12"








- KOYO DXSG 320 Double Side Grinder, 8" and 12"








- Okamoto GDM300 Wafer Grinder / Polisher, 12"



- Okamoto GNX200 Backside Wafer Grinder, 8"



- Okamoto GNX300 Backside Wafer Grinder, 12"



- Okamoto GNX300P Backside Wafer Grinder, 8" and 12"



- Okamoto VG502 Mk II Backside Wafer Grinder, 8"








- Shibayama VG502 Mk II Backside Wafer Grinder, 8"








- Strasbaugh 7AA Grinder








Wafer Handling



- Brooks Automation Ergospeed II Wafer Handling, 8"



- Brooks Automation Ergospeed 3800 SMIF Wafer Handling, 8"



- Brooks Automation Fixload 6 Loadport, 12"



- Brooks Automation Fixload 25 Loadport, 12"








- Mactronix AWi-600 Automatic Wafer Sorter



- Mactronix Eureka UKA-650 Wafer Transfer System, 6"



- Mactronix Eureka UKA-825 Wafer Transfer System, 8"








- Recif Technologies ESR300F53 Wafer Sorter, 12"



- Recif Technologies SIS300F53 Wafer Sorter, 12"








Wafer Inspection / Measurement



- 4 Dimensions Automated 4-Point Probe, up to 8"








- Accretech Win-Win 50 A5000 Brightfield Inspection System, 12"



- Accretech Win-Win 50-1600 Brightfield Inspection System, 8" + 12"








- ADE AFS-3220 Wafer Characterization, 12"








- AMAT Compass Pro Wafer Inspection, 8"



- AMAT Compass Pro Wafer Inspection, 12"



- AMAT ComPLUS Wafer Inspection, 12"



- AMAT ComPLUS EV Wafer Inspection, 8"



- AMAT ComPLUS MP Wafer Inspection, 8"



- AMAT ComPLUS MP Wafer Inspection, 12"



- AMAT ComPLUS 2T Darkfield Wafer Inspection, 8"



- AMAT ComPLUS 3T Darkfield Wafer Inspection, 8"



- AMAT Excite IPM 832 Particle Detection, 8" to 12"



- AMAT Orbot WF-736 Wafer Inspection System, 8"



- AMAT UVision 4 Wafer Inspection System, 12"







- Hermes Inspection HMI eScan 320 eBeam Inspection System, 12"








- Hitachi LS-6700 Dark Field Inspection, 12"








- Irvine Optical UL208 Wafer Mapper, 8"



- Irvine Optical Ultrastation 3.E Wafer Inspection System, 8"








- KLA Tencor 2122 Wafer Inspection System incl. SAT, 6"



- KLA Tencor 2122 Spares - please ask for list !



- KLA Tencor 2131 Wafer Inspection System, 8"



- KLA Tencor 2138 Wafer Defect Inspection, 8"



- KLA Tencor 2139 Wafer Defect Inspection, 8"



- KLA-Tencor 2360 Wafer Inspection System, 8"



- KLA-Tencor 2370 Wafer Inspection System, 8"



- KLA-Tencor 2371 Wafer Inspection System, 8"



- KLA-Tencor 2552 Wafer Inspection System, 8"



- KLA-Tencor 2608 Wafer Inspection System, 8"



- KLA-Tencor 2915 Brightfield Wafer Inspection System, 12"



- KLA Tencor 4500 Surfscan Wafer Inspection System



- KLA Tencor 5100 XP Surfscan Wafer Inspection, 8"



- KLA Tencor 5500 Surfscan Wafer Inspection, 8"



- KLA Tencor 6200 Surfscan Wafer Inspection, 8"



- KLA Tencor 6220 Surfscan Unpatterned Wafer Inspection, 8"



- KLA Tencor 6420 Surfscan Spares - please ask for list !



- KLA Tencor 8100 CD-SEM Measurement System, 8"



- KLA Tencor 8100 XP CD-SEM Measurement System, 8"



- KLA Tencor AIT I Surfscan Wafer Inspection, 8"



- KLA Tencor AIT II Surfscan Wafer Inspection, 8"



- KLA Tencor AIT II Surfscan Wafer Inspection, 8" / 12"



- KLA-Tencor AIT II XP Darkfield Defect Inspection System, 12", SMIF



- KLA Tencor AIT XUV Darkfield Inspection, 12"



- KLA Tencor AlphaStep 200 Profilometer, 5"



- KLA Tencor AlphaStep IQ Profilometer, 6" to 8"



- KLA Tencor Candela CS20R Dual Wafer Inspection System, 6"



- KLA Tencor HRP-220 Profiler, 8"



- KLA Tencor HRP-320 Profiler, up to 12"



- KLA Tencor HRP-420S Profiler, 8"



- KLA Tencor INS-3300 Defect Review System, 12"



- KLA Tencor OmniMap RS75 Resistivity Measurement, 8"



- KLA Tencor P-2 Long Scan Profiler



- KLA Tencor P-11 Profiler, 8"



- KLA-Tencor RS-35C Resistivity Measurement



- KLA Tencor SFS 6200 Wafer Inspection System, 6"



- KLA Tencor SFS 6400 Wafer Inspection System, 6"



- KLA Tencor SFS 7200 Wafer Inspection System, 8"



- KLA Tencor SFS 7600 Wafer Inspection System, 8"



- KLA Tencor SFS 7700 Wafer Inspection System, 4" to 8"



- KLA Tencor SFX 1000 HT Thin Film Metrology System, 12"



- KLA Tencor SP1 Classic Wafer Inspection System, 8"



- KLA Tencor SP1 DLS Wafer Inspection System, 12"



- KLA Tencor SP1 TBI Wafer Inspection System, 8"



- KLA Tencor SP1 TBI Wafer Inspection System, 12"



- KLA Tencor SP2 Wafer Inspection System, 12"



- KLA-Tencor SMIF Wafer Handler Module for Surfscan SP1 with PRI ATM-407 Robot & ESC-200 Controller



- KLA Tencor UV-1050 Thin Film Measurement System, 8"



- KLA Tencor UV-1280SE Thin Film Measurement System, 8"



- KLA-Tencor Viper 2401 Macro Defect Inspection, 8"








- N&K Analyser 3000 for Thick Resist Measurement, 6"








- Nanometrics 8000X Auto Film Thickness Mapping, 8"



- Nanometrics 8000XSE Thin Film Measurement, 8", cassette to cassette








- Negevtech 302 High Resolution Wafer Inspection System, 12"








- Nikon Optistation 2A Automated Inspection, 4” to 6"



- Nikon Optistation VII Automated Inspection, 12"








- OSI 2100 Overlay and CD Measurement System, up to 6"








- Prometrix FT-650 Film Thickness Mapping System, up to 8"



- Prometrix OmniMap NC-110 Non-Contact Resistivity Measurement, 2" to 8"



- Prometrix RS-55 Resistivity Measurement, 2" to 8"



- Prometrix Spectramap SM300 Film Thickness Mapping System, 8"








- Rudolph / August 3Di-8500 Inspection Station, 12"








- SDi FAaST-230m Wafer Characterization System, 8"








- SemiTest Epimet 2 Thin Film Epi Measurement, 8"








- Veeco FPP-1000 4-Point Probe, up to 4"



- Veeco FPP-5000 4-Point Probe, up to 6"








- Vistec LDS 3000 M Wafer Inspection System, 4", 8", 12"



- Vistec LDS 3300 M Wafer Inspection System, 4", 8", 12"








- Zeiss Axiosprint Wafer Inspection System, 8"








- Zygo 15" Phase Measuring Interferometer (PMI)



- Zygo GPI-XP 6" Interferometer



- Zygo GPI-LC 6" Interferometer



- Zygo Mark-II Interferometer



- Zygo Mark-series Interferometer upgraded to phase with Zygo Phase Upgrade








Wafer Mask Alignment



- Canon MPA 600 FA Mask Aligner, 6"



- Canon MPA 600 Super Mask Aligner, 6"



- Canon PLA 501 F Mask Aligner



- Canon PLA 600 F Mask Aligner, 3" to 6"








- EVG 620 Mask Aligner, 6"








- Karl Suss MJB21 Mask Aligner, double sided



- Karl Suss MJB3 Mask Aligner, 3"



- Karl Suss MJB3 Mask Aligner w/ backside alignment, 3"








- Karl Suss MA25 Mask Aligner



- Karl Suss MA25 Mask Aligner, double sided, 5"



- Karl Suss MA4 Mask Aligner, 4"



- Karl Suss MA45 Mask Aligner, 4"



- Karl Suss MA56 Mask Aligner, 4"



- Karl Suss MA56 Mask Aligner, 5"



- Karl Suss MA6 Mask Aligner, 6"



- Karl Suss MA6 Mask Aligner, 6", top and backside alignment



- Karl Suss MA150 Mask Aligner, 6"



- Karl Suss MA8 Mask Aligner, 8"



- Karl Suss MA8 / BA8 Mask Aligner, 8"



- Karl Suss MA200 Mask Aligner, up to 8"



- Karl Suss MA200cc Mask Aligner, up to 8"



- Karl Suss MA200e Mask Aligner, 8"








- Midas MDA 400LJ Mask Aligner, 4"








- Neutronix Quintel 7000 Mask Aligner, up to 8"








- OAI Hybralign 200 Mask Aligner, 8"








- Oriel / Newport Mask Aligner, up to 8"








- Quintel Q4000 Mask Aligner



- Quintel 7000 Mask Aligner, 12"








Wafer Mask Cleaning



- Accord 400 Substrate Cleaner








- K&S 971 MicroWash Mask Cleaner, up to 10" diagonal substrates



- K&S 973 MicroWash Mask Cleaner, up to 10" diagonal substrates








- SSEC Model 3300 ML Trillenium Photomask Cleaner








- Ultratech / Semi Sys 2066 Mask Cleaner, up to 8" wafer



- Ultratech 602 Mask Cleaner, up to 6" wafer size



- Ultratech 608 Mask Cleaner, up to 12" wafer size








- Ultra t Equipment PSC122M Mask Cleaner, up to 10" x 10" substrates



- Ultra t Equipment SCS-124 Substrate Cleaner w/o high pressure pump option



- Ultra t Equipment SWC111 Mask Cleaner, up to 9 x 9" masks








Wafer Mask Inspection



- Carl Zeiss AIMS 193 Mask Inspection System








- KLA Tencor StarLight SL3 URSA Mask Inspection System








Wafer Polisher



- AMAT Mirra 3400 CMP System, 8"



- AMAT Mirra Mesa CMP System, 8"



- AMAT Mirra Ontrak CMP System, 8"



- AMAT Reflexion CMP System, 12"



- AMAT Reflexion LK Prime Oxide CMP System, 12"



- AMAT Reflexion LK-Cu CMP System, 12"








- Disco DFP-8140 Wafer Polisher, 8"



- Disco DFP-8160 Wafer Polisher, 12"








- IPEC Avanti 472 CMP System, 8"








- Strasbaugh 6DS-SP/6 CMP Wafer Polisher



- Strasbaugh 6EG CMP Wafer Polisher, 12"








Wafer Stepper



- ASML /300 Wafer Stepper, 6"



- ASML AT1100 DUV Scanner, 193 nm, 12"



- ASML PAS-5500/60 Stepper, 6"



- ASML PAS-5500/100C Stepper, 8"



- ASML PAS-5500/100D Stepper, 8"



- ASML PAS-5500/200C Scanner, 8"



- ASML PAS-5500/250C Scanner, 8"



- ASML PAS-5500/275C Stepper, 8"



- ASML PAS-5500/300C Scanner, 8"



- ASML PAS-5500/350C Scanner, 8"



- ASML PAS-5500/400C, 8"



- ASML PAS-5500/750E Lithography System, 8"



- ASML PAS-5500/1100B 193nm ArF Scanner, 8"



- ASML TwinScan AT1200C Scanner, 12"



- ASML TwinScan XT850F KrF Scanner, 12"



- ASML TwinScan XT1250B Scanner, 12"



- ASML TwinScan XT 1400F ArF Scanner, 12" -



- ASML TwinScan XT:1700i Scanner








- Canon FPA-1500 Mk4-W Stepper, 6", reticle 5"



- Canon FPA-1550 Mk4-W g-line Stepper, 6", reticle 5"



- Canon FPA-2500 i2 Stepper, 8", reticle 6"



- Canon Prealigner Unit for FPA-2500 i3 Stepper, 6"



- Canon FPA-2500 i3 Stepper, 6", reticle 5"



- Canon FPA-2500 i3 Wafer Stepper, 8", reticle 6"



- Canon FPA-3000 EX4 Wafer Stepper, 8"



- Canon FPA-3000 EX4 Wafer Stepper, 8" - parts machine



- Canon FPA-3000 EX5 Wafer Stepper, 8"



- Canon FPA-3000 EX6 Wafer Stepper, 8"



- Canon FPA-3000 i4 Wafer Stepper, 8", reticle 6"



- Canon FPA-3000 i5+ Wafer Stepper, 8", reticle 6"



- Canon FPA-3000 iW Wafer Stepper, 8", reticle 6"



- Canon FPA-3000 iW Wafer Stepper, 8" - parts machine



- Canon FPA-5000 ES3 Wafer Stepper, 8", reticle 6"



- Canon FPA-5500 iZa Wafer Stepper, 12"








- Nikon FX601 Stepper



- Nikon NSR-1505G6E Stepper, 5"



- Nikon NSR-1505G7E Stepper, 5"



- Nikon NSR-1755G7A Stepper, 6"



- Nikon NSR-1755i7A Stepper



- Nikon NSR-1755i7B Stepper



- Nikon NSR-2005 i8A i-Line Wafer Stepper, 6"



- Nikon NSR-2005 i9C i-Line Wafer Stepper, 8", reticle 6"



- Nikon NSR-2005 i10C i-Line Wafer Stepper, 8", reticle 6"



- Nikon NSR-2005i10D Stepper



- Nikon NSR-2005 i11C i-Line Wafer Stepper, 6", reticle 5"



- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"



- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"



- Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6"



- Nikon NSR-2205 EX12B Wafer Stepper, 8", reticle 6"



- Nikon NSR-2205 EX14C Wafer Stepper, 8"



- Nikon NSR-2205 i14E Wafer Stepper, 8"



- Nikon NSR-2205 i14E2 Wafer Stepper, 8"



- Nikon NSR-4425i i-Line Wide-Field Stepper, 8"



- Nikon NSR-SF100 Wafer Stepper, 8"



- Nikon NSR-S202A Wafer Stepper, 8"



- Nikon NSR-S203B Wafer Stepper, 8"



- Nikon NSR-S204B Wafer Stepper, 8"



- Nikon NSR-S204D Wafer Stepper, 8"



- Nikon NSR-S205C Wafer Stepper, 8" to 12"



- Nikon NSR-S206D Scanner, 12"



- Nikon NSR-S306C 193 nm DUV Scanner



- Nikon NSR-S307E ArF Scanner, 8", reticle 6"



- Nikon NSR-S609B Scanner, 12"



- Nikon NSR-S610C Scanner, 12"








- Ultratech 1500 Wafer Stepper, 6"



- Ultratech 1500 MVS Wafer Stepper, 3" to 6"



- Ultratech 2244i Wafer Stepper, 2" to 8"



- Ultratech 6700 Saturn Stepper, 5" to 8"



- Ultratech Saturn 3 Spectrum Stepper, 8"








Wet Process



- Amerimade Decap 5ft Wet Bench








- Entegris / Fluoroware HTC 8010 Cassette/Box Washer



- Entegris / Fluoroware HTC 8020 Cassette/Box Washer








- IVY Semiconductor Automated Wet Bench








- JST Ultrasonic Solvent Wet Bench KOH



- JST Ultrasonic Solvent Wet Bench KOH








- Karl Suss M6000L Lift Off System, 4"








- Leatherwood Plastic 6ft HF Polypro Wet Bench



- Schmid Model 59 Silver Plating System








- Semitool Alpha CP04MNSPD0801 Wet Processing System



- Semitool 1-Chamber Spray Acid Tool (SAT), 8"



- Semitool LT-210C Cu Plating System, 6"



- Semitool Mini Raider RM02MNSPD0802 Wet Processing System



- Semitool Raider ECD10 Plating System, 12"



- Semitool Raider-M Lift-Off System, 8"



- Semitool Scepter Spray Acid Tool (SAT), 8"



- Semitool Storm II Box & Cassette Washing System, 8"



- Semitool Storm III Box & Cassette Washing System, 6" to 8"



- Semitool Storm 300 Wafer Cassette Washing System, 12"








- Steag AWP 200 Wet Bench








- TEL NS300 Surface Preparation System, 12"








- Verteq ST600 Megasonic System