For Sale - Frontend

 

Asher

- Alcan Tech / Canon MAS-8000 Microwave Asher

 

- Axcelis Fusion 200 ACU System, 8"

- Axcelis Fusion 200 PCU System, 8"

- Axcelis Fusion M200 MCU Metal Asher, 8"

- Axcelis Fusion M200 PCU System, up to 8"

- Axcelis Fusion M200 PCU Polo System - parts machine

- Axcelis Fusion PS3 UV Photo Stabilizer, 8" / 12"

- Axcelis Integra Dry Stripper, 12"

- Axcelis RadiantStrip 320 Stripper/Asher, 12"

 

- Branson IPC 2000T Barrel Asher

- Branson IPC P 2000 Barrel Asher

- Branson IPC L3100 Asher

- Branson IPC 4155/2 Plasma Etcher

- Branson IPC 7102 Plasma Etcher

- Branson 91391 Quartz Barrel Plasma Etcher

 

- Canon MAS-8000 Plasma Asher, up to 8"

- Canon MAS-8220 Plasma Asher, up to 8"

 

- GaSonics Aura 2000 LL spares - please ask for list !

- GaSonics L3510 Asher, 4" to 8"

 

-GLOW Plasma Cleaning System

 

- Mattson Aspen III Lite Etcher, 12"

 

- PSK Supra Vm Photoresist Stripper, 2 chambers, 12"

- PSK TERA21 Photoresist Stripper, 12"

 

- Tegal 901E Plasma Asher, up to 6"

- Tegal 903E Plasma Asher, up to 6"

- Tegal 903E Plasma Asher, 6", TTW version

- Tegal 915 Barrel Resist Stripper

- Tegal 965 Plasma Asher, up to 6"

 

- ULVAC Phoenix Asher, 6"

 

- Unaxis-Nextral NE860 High Density Plasma Etcher, 8"

 

Chiller

- Lauda Proline Integral XT 150 Process Thermostat

 

- Neslab HX-75 Recirculating Chiller

- Neslab HX-150 Chiller

- Neslab HCX-300 Air-cooled Chiller

 

CVD / PVD Systems

- Aixtron G4 MOCVD for Epi growth for SiC

- Aixtron VP2400HW MOCVD System, 6 x 4" wafers

 

- AMAT AKT 1600 PECVD system, wafer size 370 x 470 mm

- AMAT Centura AP Etch, 12", 4 chambers

- AMAT Centura AP Enabler, 4 chambers, 12"

- AMAT Centura AP Chambers, 12"

- AMAT Centura DPS Metal E-Max CT+, 12"

- AMAT Centura eMax CT+ Oxide Etcher, 12"

- AMAT Centura HDP CVD, 8"

- AMAT Centura RTP XE, 8"

- AMAT Centura 5200 CxZ, SACVD, 8"

- AMAT Centura 5200 Enabler, 3 ea. E2 chambers, 12"

- AMAT Centura 5300 HDP Oxide Etch, 8"

- AMAT Centura II Al CVD chamber, 12"

- AMAT CenturaI AP HART Etch, 12"

- AMAT Centura II DPS+ Metal, 8"

- AMAT Centura II IMP Ti chamber, 12", 2 ea.

- AMAT Centura Ultima HDP CVD, 8", 3 chambers

- AMAT Centura Ultima Plus CVD, 6", 2 chambers

- AMAT Centura Ultima TE HDP CVD. 8"

- AMAT Centura Ultima X, HDP CVD. 3 chambers, 12"

- AMAT Centura WXZ CVD System, 3 chambers, 8"

- AMAT Endura RF Sputter Chamber, 8"

- AMAT Endura TXZ Chamber, 8"

- AMAT Endura II PVD System, 12"

- AMAT Endura II CVD Al Chamber, 12"

- AMAT Endura II ALPS Chamber, 12"

- AMAT Endura II SiCoNi Chamber, 12"

- AMAT Endura II RF Ti Chamber, 12"

- AMAT Endura II eSIPChamber, 12"

- AMAT Endura II Pre Clean Chamber, 12"

- AMAT Endura P5000 Mxp+ Oxide Etcher, 2 chambers, 8"

- AMAT Endura P5000 CVD, 4 chambers, 6"

- AMAT Endura P5000 Mxp Etcher, 3 chambers, 8" ESC

- AMAT Endura P5000 CVD Chamber, 6"

- AMAT Endura P5000 Loadlock Chamber, 6"

- AMAT Endura P5000 Mk II Chamber, 8"

- AMAT Endura P5000 Mk II Metal MXP, 6"

- AMAT Endura P5000 Mk II Etch, 6" clamp

- AMAT Endura P5000 Mk II TEOS Dep. Etch Back, 8"

- AMAT Endura 5500, 6"

- AMAT IPS chamber set (Oxide Etch)

- AMAT OPUS Metal Etcher, 2 chambers, 12"

- AMAT P5000 MxP+, Metal, 2 chambers, 6"

- AMAT P5000 MxP+, Poly, 3 chambers, 8"

- AMAT P5000 PE Oxide, 2 DxZ chambers, 6"

- AMAT P5000 PECVD, 8"

- AMAT Producer, Shrink, 8"

- AMAT Producer SE, 12"

- ASM A412 Vertical Diffusion Furnace, 8"

- ASM A412 Vertical Diffusion Furnace, 12"

- ASM A412 Vertical LPCVD Furnace, 12", SiN & TEOS

- ASM E3200 EPI Deposition System, 12"

 

- Canon Anelva C-5100GT PVD Gate Metal Deposition System, 12"

- Canon Anelva C-7100GT PVD Gate Metal Deposition System, 12"

 

- Centrotherm DO 7.500-650-CANtrol High Temperature, Continuous-Flow-Furnace

 

- Kokusai DD-812 Vertical Furnace, 8"

- Kokusai DD-853 V Vertical Furnace, 6" and 8"

- Kokusai DJ-813 LPCVD Furnace, 8"

- Kokusai DJ-825V-8V Poly Furnace, 8"

- Kokusai DJ-833V Furnace, 8"

- Kokusai DJ-833V H2 Anneal, 8"

- Kokusai DJ-853V LPCVD Furnace, 8"

- Kokusai DJ-853V Furnace, 6" and 8"

 

- MRC Eclipse Mark II PVD System, 6"

- MRC Eclipse Mark II PVD System, 8"

- MRC Eclipse Star PVD System, 6"

 

- Novellus Concept-1 System, 8"

- Novellus Concept-2 Sequel Express, 8"

- Novellus Concept-2 Dual Speed Sequel, 8"

- Novellus Concept-2 Dual Altus Standard CVD, 8"

- Novellus Concept-2 Dual Sequel Express ILDS, 8"

- Novellus Concept-2 Sequel Chamber

- Novellus Concept-3 Speed MAX, 2 chambers, 12"

- Novellus Concept-3 Speed NExT, 12"

- Novellus Concept-3 Speed Chamber

- Novellus Concept-3 Speed MAX HDP CVD, 2 chambers, 12"

- Novellus Inova PVD Sputter, 6 chambers, 12"

- Novellus PEP Irida Asher, 6"

- Novellus Sabre xT Copper Deposition System, 8”

 

- Oxford Plasmalab 100 PECVD System, 6" to 8"

- Oxford Plasmalab 100 PECVD TEOS System, up to 8"

 

- Picosun Sunale R-200 Advanced ALD Reactor, 200mm

 

- Plasmatherm 790 PECVD System, up to 8"

 

- SINGULUS SINGULAR High Volume PECVD System

 

- SPTS CPX Deep Silicon Etch (DSIE) and XeF2 Etcher

- SPTS Sigma FXP Cluster PVD System

 

- TEL Tactras Plasma Etch System, 4 chambers,12"

- TEL Unity M Trench Etch System, 8"

 

- Thomas Swan MOCVD Reactor, 19 x 2"

- Thomas Swan MOCVD Reactor, 31 x 2"

 

- Tystar Mini Tytan 8300 Horizontal Furnace, 6" to 8"

 

- Ulvac Ceraus ZX-1000 PVD System, 8"

 

- Veeco E300 GaNZilla MOCVD System

- Veeco Gen 930 MBE System

- Veeco K475 GaN MOCVD System

- Veeco Spector Ion Beam Sputtering System

 

- Watkins-Johnson WJ999 CVD System, 8"

- Watkins-Johnson WJ-999 TEOS System, 8"

- Watkins-Johnson WJ-1500 APCVD TEOS System, 8"

 

Etcher

- Akrion UP V2 MP.2000 CU Clean Sink, 8"

 

- Alcatel AMS 200IP DRIE System

 

- Apprecia Technologies Cenote Metal Wet Etching System, 8"

 

- DNS FC-3100 Wet Station, 12"

- DNS WS-820L Wet Etching System, 8"

 

- FSI Mercury MP Spray Processor, 8"

- FSI Scorpio Resist Develop System, 8"

- FSI Zeta 300 Spray Cleaning System, 12"

 

- LAM Alliance Poly Etch Chamber, 6"

- LAM Autoetch 590 Etcher, 6"

- LAM 2300 Kiyo Metal Etch, 12"

- LAM 2300 ELD, WCoP, Electroless Deposition, 12"

- LAM 2300 Exelan Etch Oxide, 4 chambers , 12"

- LAM 2300 Exelan Etch Oxide, 4 chambers , process CU, 12"

- LAM 2300 Stretch ATM + VTM, 12"

- LAM 4420 Rainbow Envision

- LAM 4420 Rainbow Poly Etcher, 8"

- LAM 4420XL Rainbow Poly Etcher, 8"

- LAM 4428 Poly Etcher, 8"

- LAM 4520 Rainbow Classic

- LAM 4520 Rainbow Oxide Etcher, 8"

- LAM 4520i Rainbow Oxide Etcher, 6"

- LAM 4520i Rainbow Oxide Etcher, 8"

- LAM 4520XL Etcher, 6"

- LAM 4520XLE Poly Etcher, 8"

- LAM SOSU EXT3100 Bevel Etch , 12"

- LAM TCP 9400 PTX Etch System, 8"

- LAM TCP 9400 SE Etcher, 8"

- LAM TCP 9408 SE Etcher, 8"

- LAM TCP 9600 Etcher, 8"

- LAM TCP 9600 SE Etcher, 6"

- LAM TCP 9600 SE Metal Etcher, 8"

- LAM TCP 9608 SE Etcher, 8"

 

- March Instruments AP-1000 Plasma Cleaner

- March Instruments PX-500 Plasma Etcher

- March Instruments PX-1000 Plasma Etcher

 

- Samco PC 1100 Photoresist Stripper Asher

- Samco RIE-200L Dry Etching System, 8"

 

- Sankyo SWH80 Wet Oxide Etch Bench, 8"

 

- Semitool Scepter Spray Acid System, 8"

- Semitool SSTC-321-280 Spray Solvent Tool, 8"

- Semitool SSTF-281-280MBT Spray Solvent Tool, 8"

 

- SEZ DV-34BF Wafer Processor, 12"

- SEZ 101 Spin Etcher, up to 6"

- SEZ 201 Spin Etcher, 6" to 8"

- SEZ 203 Spin Etcher, 6" to 8"

- SEZ 223 Spin Etcher, 4" to 8"

- SEZ 304 Spin Etcher, 8" to 12"

- SEZ 305 Spin Etcher, 8" to 12"

- SEZ 323 Spin Etcher, 12"

- SEZ spares - please ask !

 

- STS Multiplex ICP High Rate Inductively-Couple Plasma Etcher, up to 8"

 

- ULVAC TDE-300M Plasma Etcher, 8"

 

- Veeco RF-350S Ion-Beam Milling System, 6"

 

Evaporation and Sputtering Systems

- Balzers BAK-550 Evaporator System

- Balzers BAK-760 E-Beam Evaporator System

- Balzers LLS-801 Metal Sputter System

- Balzers LLS-802 Metal Sputter System

- Balzers LLS EVO Sputter System

 

- Canon Anelva I-1060 SV II Plus-1 Sputtering System, 5 chambers, 8"

 

- CHA Mark 40 E-Beam Evaporator

- CHA SE-1000 E-Beam Evaporator

 

- Denton Integrity 14 Vacuum System

 

- HANIL VACUUM HVC-2050DA High Vacuum Box Coater

 

- ITO Roll to Roll Sputtering System, max. 1,400 mm film width

 

- Karl Suss ACS 200 Spin Coater, 8"

- Karl Suss Alpha R.12 Liquid Transfer Coating Tool

- Karl Suss Delta 12AQ Spin Coater / Developer, 8" / 12"

- Karl Suss Delta 12L Spin Coater / Developer, 8" / 12"

 

- Kurt Lesker Aluminum Evaporator, 8"

 

- Leybold APS 1104 Evaporation System

- Leybold APS 1504 Optical Coating System

- Leybold Pegasus Sputtering System

- Leybold ZV-6000 Sputtering System

 

- MRC 8867 Sputtering System

- MRC 942 Sputtering System

 

- Temescal BJD-1800 Sputtering System

 

- ULVAC Ei - 5k e-Beam Evaporation System

- Ulvac Satella Thin Film Deposition System for OLED, 200 x 200 mm substrate size

- Ulvac SMD-450C Sputter

 

- Veeco Spector Optical Coater

 

Furnaces

- ASM COE 139 Curing System

 

- Aviza AVP 8000 AP Vertical Furnace, 8"

- Aviza AVP 8000 LP LPCVD Furnace, 8"

- Aviza Celsior LPCVD Furnace, 12"

- Aviza RVP 9000 Furnace, 8"

 

- Bruce BTU 7355 Horizontal Furnace, 8"

 

- Despatch CF-2710 Furnace

- Despatch DF-14414 / 10-NS Inline Diffusion Furnace

 

- First Nano ET3000 Horizontal Furnace, 2" to 5"

- First Nano ET6000 Horizontal Furnace

 

- GT Advanced Sapphire Furnace

 

- Kokusai / Bruce BDF-200 LPCVD Furnace, 8"

- Kokusai DJ-813 LPCVD Furnace, 8"

- Kokusai DD-812 Vertical Furnace, 8"

- Kokusai DJ-825V Poly LPCVD, 6"

- Kokusai DJ-853 Furnace, 8"

- Kokusai DJ-853V-BL D-Poly, 8"

- Kokusai DJ-853V-BL Nitride, 8"

- Kokusai DJ-853V-BL SOG Curing, 8"

- Kokusai DJ-853V-BL TEOS, 8"

- Kokusai Quixace Vertical Furnace, ALD TiN, 12"

- Kokusai Quixace DD-1206V-DF Vertical Furnace, 12"

- Kokusai Quixace DD-1206VN-DF Vertical Furnace, 12"

- Kokusai Quixace DJ-1206VN-DM Vertical Furnace, 12"

- Kokusai Quixace Ultimate Vertical Furnace, 12"

- Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12"

 

- Koyo Thermo System VF-5300B Polyimide Bake

 

- MRL Cyclone C430 Four-Tube Horizontal Furnace, 6"

 

- SST DAP 1100 Vacuum Furnace, 1000 deg C

- SST DAP 2200 Vacuum Furnace, 1000 deg C

- SST HVWB 2200 Vacuum Furnace, 1000 deg C

- SST MV 2200 Vacuum Furnace, 1000 deg C

- SST 5100 Programmable Vacuum/Pressure Soldering Furnace

 

- SVG VTR-7000 Oxide Vertical Furnace, 8"

- SVG AVP 8000 AP Vertical Furnace, 8"

- SVG AVP 8000 LP Vertical Furnace, 8"

 

- TEL Alpha 303i Furnace, LT SOD cure, 12"

- TEL Alpha 303i Furnace, P-Doped Poly, 12"

- TEL Alpha 8S Furnace, 8" 

- TEL Alpha-8SE-E Vertical FTP LTO/Nitride Furnace, 8"

- TEL Alpha 8S-Z Furnace, 8" 

- TEL Indy+ Vertical Furnace, 12", ALD HfO2

 

- Thermco 6204 Horizontal Diffusion Furnace, 6"

 

Implanter

- AMAT Quantum X Plus High Current Ion Implanter, 12"

- AMAT xR-LEAP Low Energy Ion Implanter, 8"

 

- Axcelis/Eaton NV GSD HE High Energy Ion Implanter, 8"

- Axcelis Paradigma XE Ion Implanter, 12"

- Axcelis Purion H High Current Ion Implanter, 12"

 

- Nissin Exceed 2300 Ion Implanter, 12"

 

- SEN LEX3 Low Energy High Current Ion Implanter

 

- Varian 160XP High Current Ion Implanter, 6"

- Varian E500 HP Ion Implanter, 6"

- Varian E500 HP Ion Implanter, 8"

- Varian E1000 Implanter, 8"

- Varian VIISion 80 Ion Implanter, 8"

- Varian VIISta 80 Classic High Current Ion Implanter, 8"

- Varian VIISta 80 HP Ion Implanter, 8"

- Varian VIISta 810 Medium Current Ion Implanter, 8"

- Varian VIISta 810 XEr Medium Current Ion Implanter, 12"

 

Laser

- Chicago Laser CLS37 Laser Trimming System, refurbished

- Chicago Laser LS960 Laser Trimming System, refurbished

 

- ESI 2050 LP Laser Trimming System

- ESI 2100 Laser Trimming System

- ESI 5970 Laser Repair System

- ESI 9275 Laser Repair System - parts machine

- ESI 9300 Laser Repair System

- ESI 9820 Laser Processing System, 12"

- ESI 9825 Laser Processing System, 8" and 12"

- ESI 9830 Laser Processing System, 12"

- ESI 9850 Laser Processing System, 12"

 

- GSI M310 Laser Trimming System

 

- Hitachi ABC-2C-C CO2 Laser System

 

- Innolas ILSTT-DS Laser System

 

- Laser Quantum finesse pure Continuous Wave Laser System

 

- New Wave Research 2150 Laser Scriber

- New Wave Research Titan Laser Scriber

 

- Rofin CL Cube Laser

- Rofin DQ 010 q-switched Solid State Laser

 

Metrology

- Advantest / Leica E3610 CD SEM

 

- AMAT Opal 7830i CD SEM, 8"

 

- Beta Squared OS2000 Micralign Mask Scanner, 4" to 6"

 

- Biorad QS 300 FTIR Spectrometer, up to 12"

- Biorad QS 408M Manual FTIR Spectrometer, up to 8"

- Biorad Quaestor Q7 Profilometer, 8"

 

- Cyberscan CT350T Dual Non-Contact Double-Sided Optical Profilometer

 

- Four Dimensions 280C Four Point Probe System

 

- FSM 128 Film Stress Measurement System, 8"

 

- KLA Tencor 2401 Viper Macro Defect Inspection, 8"

- KLA Tencor 5300 Overlay and CD Measurement, 8"

- KLA Tencor Aleris Spectra DX Interferometer, 12"

- KLA-Tencor Archer AIM, 300mm

- KLA-Tencor ASET F5x Thin Film Measurement System, 8"

- KLA Tencor eS32 Defect Review System, 12"

- KLA Tencor Flexus FLX-2360 Stress Measurement, 12"

- KLA-Tencor LMS IPRO5 Photomask Registration and CD Metrology System

- KLA Tencor / Prometrix RS35C Four Point Probe System

- KLA Tencor / Prometrix RS50/e Four Point Probe System, 8"

- KLA Tencor / Prometrix RS55/tc Four Point Probe System, 8"

- KLA Tencor / Prometrix RS55/tca Four Point Probe System, 8"

- KLA Tencor P-15 Long Scan Profilometer

- KLA Tencor Puma 9000 Dark Field Defect Inspection, 12"

- KLA Tencor SCD Interferometer, 12"

- KLA Tencor Ultrapointe CRS 1010S Interferometer, 8"

- KLA Tencor UV1050 Film Thickness Measurement, 8"

- KLA Tencor UV1080SE Film Thickness Measurement, 8"

 

- Nanometrics 8000 Thin Film Measurement System, 6"

- Nanometrics Q200i Biorad Overlay System, 8"

- Nanometrics QS-1200 FT-IR Spectrometer, up to 8"

 

- ReVera VeraFlex, 12"

 

- Rigaku MFM65 Small Spot Energy Dispersive X-Ray Fluorescence Spectrometer

- Rigaku XRF 3620 X-Ray Fluorescence Spectrometer, 8"

- Rigaku XRF 3640 X-Ray Fluorescence Spectrometer, 8"

- Rigaku Ultima IV X-Ray Diffraction System (XRD)

 

- Rudolph / August NSX-90 Wafer Inspection System, 8"

- Rudolph / August NSX-105B Wafer Inspection System, 8"

- Rudolph / August NSX-105C Wafer Inspection System, 8", w/ Wafer Handler

 

- Rudolph AXI-930 B20 Macro Defect Inspection, 12"

- Rudolph MetaPulse 200X Cu System, 8"

- Rudolph SE200XL Spectral Ellipsometer, 8"

- Rudolph Waferview 320 Wafer Inspection System, 12"

 

- Semilab IR3100S Small spot IR-Near IR FT-IR Spectrometer, 12"

- Semilab / SDI WT-2000 Measurement System, 8"

 

- ThermaWave Optiprobe 2600B Film Thickness Measurement System

- ThermaWave Optiprobe 3290 DUV Film Thickness Measurement System

- Thermawave OptiProbe 5340C Thin Film Thickness Measurement, up to 12"

- Thermawave OptiProbe 5340s Thin Film Thickness Measurement, 12"

 

- Thermo Nicolet ECO 1000 FTIR Spectrometer

 

- Veeco Dektak 8 Profilometer

- Veeco Dektak 3030 Profilometer

- Veeco Dimension 5000 Atomic Force Microscope (AFM)

- Veeco Dimension X1D Atomic Force Microscope (AFM), 12"

- Veeco Dimension X3D Atomic Force Microscope (AFM)

- Veeco Dektak 200 SL Profilometer, 8"

- Veeco NT3300 Surface Profilometer, 8"

 

Photolithography

- Fusion Gemini GPS Photostabilizer, 8"

 

- MIVA 20128 Mask Wrighter

 

- Tamarack 152R Projection Mask Aligner

 

Pumps

- Adixen A100L Pump

- Adixen A100P Pump

- Adixen ADS602P Pump

- Adixen ADP122P Pump

- Adixen ADS602P Pump

- Adixen ADS1202 Pump

- Adixen ATH 500M Turbo Pump

 

- Ebara A10S Dry Pump

- Ebara AA10 Dry Pump

- Ebara A30W Dry Pump

- Ebara AA40W Dry Pump

- Ebara A70W Dry Pump

- Ebara AA70W Dry Pump

- Ebara AAS70W Dry Pump

- Ebara A150W Dry Pump

- Ebara ESR20N Dry Pump

 

- Edwards iH600 Mk5 Dry Vacuum Pump

- Edwards iH1000 Mk5 Dry Vacuum Pump

- Edwards iF1800 Dry Vacuum Pump

- Edwards iH1800 Dry Vacuum Pump

- Edwards iQDP80 Dry Vacuum Pump

- Edwards iXH3030T Dry Vacuum Pump

- Edwards iXH3045H Dry Vacuum Pump

 

- Leybold TURBOVAC 1100C Turbo Pump

 

- Seiko Seiki STP1303 Turbo Pump

 

Rapid Thermal Processing

- AG Associates 210M Heatpulse RTP System, 4"

- AG Associates 410 Heatpulse RTP System, 4"

- AG Associates 610 RTP System, up to 6"

- AG Associates 4100S Heatpulse RTP System, 6"

- AG Associates 8108 Heatpulse RTP System, 8"

 

- Mattson AST 2800 RTP System, 6"

- Mattson AST 2800 RTP System, 8"

- Mattson AST SHS-2900 RTP System, 8"

- Mattson Helios RTP System, 12"

 

Wafer Bonder

- EVG 805CPP Wafer Debonding System, 8"

- EVG 805EZD Wafer Debonding System, 8"

- EVG 850DB/200 Wafer Debonding System, 6"

- EVG 850DB/200 Wafer Bonding System, 6"

- EVG Gemini Automated Wafer Bonder, 8"

- EVG Smartview Bond Aligner, 6" to 12"

 

- Karl Suss ABC200 Wafer to Wafer Bonder

- Karl Suss CBC200 Automated Wafer Bonding Cluster System

- Karl Suss SB8e Substrate Bonder, up to 8"

 

- Logitech 3000 Wafer Bonder, up to 6"

 

Wafer Cleaning

- Disco DCS-141 Wafer Washer

 

- DNS AS-2000 CMP Scrubber

- DNS SS-W60A-AR Scrubber, 6"

- DNS SS-W80B-AR Scrubber, 8"

- DNS SS-3000-A Wafer Scrubber, 12"

- DNS SS-3000-AR Wafer Scrubber, 12"

- DNS SU-3000 Single Wafer Cleaner, 12"

- DNS Aquaspin SU-3100 Single Wafer Cleaner, 12"

- DNS WS-820L Wafer Cleaning Track

 

- Ebara EPO-113 CMP System, 8"

 

- MEG 8BC Spin Cup Cleaning System, up to 12"

- MEG SS Spin Scrubber Cleaning System, 4" to 8"

 

- OnTrack DSS-200 Series II Wafer Brush Cleaning System, 8"

- OnTrack DSS-2200 Synergy Wafer Brush Cleaning System, 8"

 

- Peter Wolters PM300 CMP System, 12"

 

- Semitool 270 Spin Rinse Dryer (SRD), 4" to 6"

 

- SEZ DaVinci DV-38 Wafer Cleaner, 12"

 

- SVG 8600 Wafer Scrubber, 6"

 

- TEL Mk 11 Clean Track, 6"

 

Wafer Coater / Developer

- Brewer Science CEE 200 FX Resist Developer, 12"

- Brewer Science 300XD Resist Developer, 12"

- Brewer Science CEE 4000 Photoresist Coater (bench top unit)

 

- C & D Semi Dual Coater Track

- C & D Semi Dual Developer Track

 

- DNS SC-W60A 2C Coater, 6"

- DNS SDW-60-AVP Developer, 6"

- DNS 80A Developer, 6"

- DNS SK-W80A-BVPE Track, 1C / 2D, 8"

- DNS SK-W80B-AVPE Track, 1C / 2D, 8"

- DNS SK-200W Coater / Developer, 8"

 

- LAURELL WS-650Sz Manual Spin Coater

 

- Sokudo RF-300A Coater / Developer Track, 12"

 

- STEAG Microtech Coater/Developer Cluster 421

 

- SVG 88 Coater / Developer Track System, 6"

- SVG 90 Coater / Developer Track System, 8"

- SVG 8800 Dual Track Coater / Developer System

 

- SVS MSX 1000 Coater / Developer, 2"

 

- TEL Mark Vz 1C2D Track, 6"

- TEL Mk 7 2C / 2D Track, 8"

- TEL Mk 8 1C / 1D Track, 8"

- TEL Mk 8 2C / 2D Track, 8"

- TEL Act 8 2C / 3D Track, 6"

- TEL Act 8 2C / 2D Track, 8"

- TEL Act 8 2C / 2D Track, 8"

- TEL Act 8 Track, 2 Coat / 2 Develop, dual block, 8"

- TEL Act 8 Single Block Track, 8"

- TEL Act 12 2C / 4D Track, setup for 8"

- TEL Lithius ArF Photoresist Coater / Developer, 12"

- TEL Lithius KrF Photoresist Coater, 12"

- TEL Lithius i-Line Coater Developer Track, 12"

 

Wafer Grinder / Polisher

- Accretech PG200RM Backside Grinder

- Accretech PG300RM Backside Grinder, 8" / 12"

 

- Daitron WBM-2100 Wafer Edge Grinder, 8"

 

- DISCO DAG810 Backside Grinder, 8"

- DISCO DFG 82IF/8 Grinder

- DISCO DFG-840 Backside Grinder, 8"

- DISCO DFG-850 Backside Grinder, 8"

- DISCO DFG-8540 Backside Grinder, 8"

- DISCO DFG-8560 Backside Grinder, 8" and 12"

- DISCO DFG-8560 Backside Grinder, 12"

- DISCO DFS-8910 Surface Planer, 12"

- DISCO DGP-8760 + DFM-2700 Grinder/Polisher, 12"

- DISCO DGP-8761 Polish Grinder, 12"

 

- KOYO DXSG 320 Double Side Grinder, 8" and 12"

 

- Okamoto GNX200 Backside Wafer Grinder, 8"

- Okamoto GNX300P Backside Wafer Grinder, 8" and 12"

 

- Strasbaugh 7AA Grinder

 

Wafer Handling

- Brooks Automation Fixload 6 Loadport, 12"

- Brooks Automation Fixload 25 Loadport, 12"

 

- Recif Technologies ESR300F53 Wafer Sorter, 12"

- Recif Technologies SIS300F53 Wafer Sorter, 12"

 

Wafer Inspection / Measurement

- Accretech Win-Win 50 A5000 Brightfield Inspection System, 12"

 

- AMAT Compass Pro Wafer Inspection, 8"

- AMAT Compass Pro Wafer Inspection, 12"

- AMAT ComPLUS Wafer Inspection, 12"

- AMAT UVision 4 Wafer Inspection System, 12"

- Hermes Inspection HMI eScan 320 eBeam Inspection System, 12"

 

- Irvine Optical UL208 Wafer Mapper, 8"

- Irvine Optical Ultrastation 3.E Wafer Inspection System, 8"

 

- KLA Tencor 2122 Wafer Inspection System incl. SAT, 6"

- KLA Tencor 2122 Spares - please ask for list !

- KLA Tencor 2132 Wafer Inspection System, 8"

- KLA Tencor 2138 Wafer Defect Inspection, 8"

- KLA Tencor 2139 Wafer Defect Inspection, 8"

- KLA-Tencor 2915 Brightfield Wafer Inspection System, 12"

- KLA Tencor 5100 XP Surfscan Wafer Inspection, 8"

- KLA Tencor 6200 Surfscan Wafer Inspection, 8"

- KLA Tencor 6220 Surfscan Wafer Inspection, 8"

- KLA Tencor 6400 Surfscan Wafer Inspection, 8"

- KLA Tencor 6420 Surfscan Wafer Inspection, 8"

- KLA Tencor AIT I Surfscan Wafer Inspection, 8"

- KLA Tencor AlphaStep IQ Profilometer, 6" to 8"

- KLA Tencor HRP-320 Profiler, up to 12"

- KLA Tencor HRP-420S Profiler, 8"

- KLA Tencor INS-3300 Defect Review System, 12"

- KLA Tencor P-11 Profiler, 8"

- KLA Tencor SFS 7600 Wafer Inspection System, 8"

- KLA Tencor SFS 7700 Wafer Inspection System, 4" to 8"

- KLA Tencor SP1 Classic Wafer Inspection System, 8"

- KLA Tencor SP1 TBI Wafer Inspection System, 12"

- KLA Tencor SP2 Wafer Inspection System, 12"

 

- N&K Analyser 3000 for Thick Resist Measurement, 6"

 

- Nikon Optistation VII Automated Inspection, 12"

 

- OSI 2100 Overlay and CD Measurement System, up to 6"

 

- SDi FAaST-230m Wafer Characterization System, 8"

 

- SemiTest Epimet 2 Thin Film Epi Measurement, 8"

 

- Vistec LDS 3000 M Wafer Inspection System, 4", 8", 12"

- Vistec LDS 3300 M Wafer Inspection System, 4", 8", 12"

 

Wafer Mask Alignment

- EVG 620 Mask Aligner, 6"

 

- Karl Suss MJB3 Mask Aligner, 3"

 

- Karl Suss MA4 Mask Aligner, 4"

- Karl Suss MA6 Mask Aligner, 6"

- Karl Suss MA150 Mask Aligner, 6"

- Karl Suss MA150CC Mask Aligner, 6", top and backside alignment

- Karl Suss MA8 Mask Aligner, 8"

- Karl Suss MA200 Mask Aligner, up to 8"

- Karl Suss MA200e Mask Aligner, 8"

 

- Neutronix Quintel 7000 Mask Aligner, up to 8"

 

- Quintel 7000 Mask Aligner, 12"

 

Wafer Mask Cleaning

- SSEC Model 3300 ML Trillenium Photomask Cleaner

- SSEC M3306 Flux Cleaner, 12"

 

Wafer Mask Inspection

- KLA Tencor StarLight SL3 URSA Mask Inspection System

 

Wafer Polisher

- AMAT Reflexion LK Prime Oxide CMP System, 12"

 

- IPEC Avanti 472 CMP System, 8"

 

Wafer Stepper

- ASML /300 Wafer Stepper, 6"

- ASML PAS-5000/55 Stepper, 4"

- ASML PAS-5500/100C Stepper, 8"

- ASML PAS-5500/100D Stepper, 8"

- ASML PAS-5500/200C Scanner, 8"

- ASML PAS-5500/250C Scanner, 8"

- ASML PAS-5500/275C Stepper, 8"

- ASML PAS-5500/350C Scanner, 8"

- ASML PAS-5500/750E Lithography System, 8"

- ASML TwinScan AT1200C Scanner, 12"

- ASML TwinScan XT850F KrF Scanner, 12"

- ASML TwinScan XT1250B Scanner, 12"

- ASML TwinScan XT 1400F ArF Scanner, 12" -

 

- Canon FPA-2500 i2 Stepper, 8", reticle 6"

- Canon FPA-3000 EX4 Wafer Stepper, 8" - parts machine

- Canon FPA-3000 EX5 Wafer Stepper, 8"

- Canon FPA-3000 i4 Wafer Stepper, 8", reticle 6"

- Canon FPA-3000 iW Wafer Stepper, 8", reticle 6"

- Canon FPA-3000 iW Wafer Stepper, 8" - parts machine

- Canon FPA-5500 iZa Wafer Stepper, 12"

 

- Nikon FX601 Stepper

- Nikon NSR-1505G6E Stepper, 5"

- Nikon NSR-1505G7E Stepper, 5"

- Nikon NSR-1755G7A Stepper, 6"

- Nikon NSR-1755i7A Stepper

- Nikon NSR-1755i7B Stepper

- Nikon NSR-2005 i9C i-Line Wafer Stepper, 8", reticle 6"

- Nikon NSR-2005i10D Stepper

- Nikon NSR-2005 i11C i-Line Wafer Stepper, 6", reticle 5"

- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"

- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"

- Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6"

- Nikon NSR-2205 EX12B Wafer Stepper, 8", reticle 6"

- Nikon NSR-2205 EX14C Wafer Stepper, 8"

- Nikon NSR-2205 i14E Wafer Stepper, 8"

- Nikon NSR-2205 i14E2 Wafer Stepper, 8"

- Nikon NSR-4425i i-Line Wide-Field Stepper, 8"

- Nikon NSR-S202A Wafer Stepper, 8"

- Nikon NSR-S203B Wafer Stepper, 8"

- Nikon NSR-S204B KrF Scanner, 8"

- Nikon NSR-S204D Wafer Stepper, 8"

- Nikon NSR-S205C Wafer Stepper, 8" to 12"

- Nikon NSR-S206D Scanner, 12"

- Nikon NSR-S306C 193 nm DUV Scanner

- Nikon NSR-S609B Scanner, 12"

- Nikon NSR-S610C Scanner, 12"

 

- Ultratech 1500 Wafer Stepper, 6"

- Ultratech 1500 MVS Wafer Stepper, 3" to 6"

- Ultratech 2244i Wafer Stepper, 2" to 8"

- Ultratech Saturn 3 Spectrum Stepper, 8"

 

Wet Process

- Amerimade Decap 5ft Wet Bench

 

- IVY Semiconductor Automated Wet Bench

 

- JST Ultrasonic Solvent Wet Bench KOH

- JST Ultrasonic Solvent Wet Bench KOH

 

- Schmid Model 59 Silver Plating System

 

- Semitool Alpha CP04MNSPD0801 Wet Processing System

- Semitool Mini Raider RM02MNSPD0802 Wet Processing System

- Semitool Raider ECD-10 Plating System, 12"

- Semitool Raider ECD-310 Plating System, 12"

- Semitool Storm II Box & Cassette Washing System, 8"

- Semitool Storm III Box & Cassette Washing System, 6" to 8"

- Semitool Storm 300 Wafer Cassette Washing System, 12"

 

- Steag AWP 200 Wet Bench

 

- TEL NS300 Surface Preparation System, 12"