For Sale - Frontend
Asher
- Anatech MP 600 Quartz Barrel Etcher
- Axcelis Fusion 200 PCU System, 8"
- Axcelis Fusion ES3 Stripper/Asher, 12"
- Axcelis Fusion M200 MCU Metal Asher, 8"
- Axcelis Fusion M200 PCU System, up to 8"
- Axcelis Integra Dry Stripper, 12"
- Axcelis RadiantStrip 320 Stripper/Asher, 12"
- AXIC HF-8 Plasma System
- Branson 10" Quartz Barrel Asher
- Branson IPC 2000T Barrel Asher
- Branson IPC P 2000 Barrel Asher
- Branson IPC L3100 Asher
- Branson IPC 4155/2 Plasma Etcher
- Branson IPC 7102 Plasma Etcher
- Canon MAS-8000 Plasma Asher, up to 8"
- Canon MAS-8220 Plasma Asher, up to 8"
- GaSonics Aura 1000 Photoresist Asher, 6"
- GaSonics Aura 2000 LL spares - please ask for list !
- GaSonics Aura 3010 Asher, 5" to 8"
- GaSonics L3510 Asher, 4" to 8"
-GLOW Plasma Cleaning System
- Mattson Aspen II Triode Asher, 8"
- Mattson Aspen III CVD, 8"
- Mattson Aspen III CVD, 12"
- Mattson Aspen III Dual Chamber Strip, 8"
- Mattson Aspen III Lite Etcher, 12"
- PSK Supra Vm Photoresist Stripper, 2 chambers, 12"
- PSK TERA21 Photoresist Stripper, 12"
- Ramco RAM-8500 II Dry Asher, 8"
- Technics 500-II Plasma Asher, 6"
- Technics PE II Plasma Etcher
- Tegal 415 Plasma Asher, up to 4"
- Tegal 515 Plasma Asher, up to 5"
- Tegal 903E Plasma / RIE Asher, up to 6"
- Tegal 915 Barrel Resist Stripper
- Tegal 965 Plasma Asher, up to 6"
- Tepla Auto 300 Asher, 4" to 6", 2.45 GHz, 1000 Watts
- Tepla 300 AL PC Plasma Asher, 6"
- Tepla 300E Plasma Asher
- TePla 400 Plasma Asher
- Tepla 600 AL RF Barrel Asher, up to 8"
- ULVAC Phoenix Asher, 6"
- Unaxis-Nextral NE860 High Density Plasma Etcher, 8"
Chiller
- Accretech SHI-500S Chiller
- Affinity PBA-40k Air-Cooled Chiller
- DISCO DTU-151 Chiller
- DISCO DTU-152 Chiller
- Edwards TCU 40/80 Chiller
- Edwards TCU 40/80 plus Chiller
- Lauda RE204 Ecoline Star Edition Thermostatic Bath / Circulator
- Neslab CFT-75 Recirculating Chiller
- Neslab HX-75 Recirculating Chiller
- Neslab HX-75A Recirculating Chiller
- Neslab HX-150 Chiller
- Neslab HCX-300 Air-cooled Chiller
- Neslab HX-750 Air-cooled Chiller
- Neslab Merlin M25 Recirculating Chiller
- Neslab Merlin M33 Recirculating Chiller
- Neslab RTE-7 Recirculating Chiller
- SMC HRG-015-A Chiller
- TEL D204 Chiller
- TEL D214 Chiller
- TEL D250 Chiller
- Temptronic TPO3000A Chiller
- Temptronic TPO3200A Chiller
- Thermo Neslab HX-300 Chiller
- Thermo Neslab M25 Recirculating Chiller
- Thermo Neslab RTE 7 Refrigerated Bath / Circulator
- VWR 1173PD Refrigerated Recirculating Chiller
CVD / PVD Systems
- Aixtron 2400 G2 MOCVD System
- Aixtron 2400 G3 MOCVD System
- Aixtron 2400 G4 MOCVD System
- Aixtron 2600 G3 MOCVD System
- Aixtron 2600 G3 HT MOCVD System
- Aixtron 2800 G4 MOCVD System
- Aixtron AIX 200 / 4 G2 MOCVD System, 4" / 5"
- Aixtron AIX 200 / 4 HT MOCVD System
- Aixtron AIX 2800 G3 MOCVD System
- Aixtron AIX 2800 G4 HT MOCVD System, 2" x 42
- Aixtron Crius 30X2 MOVD System
- Aixtron Crius 31X2 MOVD System
- Aixtron VP2400HW MOCVD System, 6 x 4" wafers
- AMAT 7700 EPI Reactor, 6"
- AMAT 7810 EPI Reactor
- AMAT AKT 1600 PECVD system, wafer size 370 x 470 mm
- AMAT Centura 4.0, 4 chambers, Poly / Wsix, 12"
- AMAT Centura ACL, 4 chambers APF, 8"
- AMAT Centura DCVD, 4 chambers, ACL, 8"
- AMAT Centura ACP RP EPI, 12"
- AMAT Centura AP Etch, 12", 4 chambers
- AMAT Centura AP Enabler, 4 chambers, 12"
- AMAT Centura AP Enabler FEOL E5
- AMAT Centura AP Chambers, 12"
- AMAT Centura DPS Metal, 4 chambers, 8"
- AMAT Centura DPS Metal Super-E, 8"
- AMAT Centura DPS Metal E-Max, 8"
- AMAT Centura DPS Metal E-Max CT+, 12"
- AMAT Centura DPS+ Metal, 8"
- AMAT Centura eMax CT+ Oxide Etcher, 12"
- AMAT Centura eMax DPS, DPS2 System, 8"
- AMAT Centura EPI System w/ Siconi, 12"
- AMAT Centura EPI System, 2 chambers, RP-EPI, 12"
- AMAT Centura GigaFill SACVD, 3 chambers
- AMAT Centura HDP CVD, 8"
- AMAT Centura RTP XE, 8"
- AMAT Centura Radiance RTP System, 2 chambers, 12"
- AMAT Centura Super-E System, 8"
- AMAT Centura 5200 DxZ, 3 Chambers, TEOS, 8"
- AMAT Centura 5200 Enabler, 3 ea. E2 chambers, 12"
- AMAT Centura 5200 MxP Dielectric Etch, 8"
- AMAT Centura 5200 Oxide PECVD, 3 chambers, 8"
- AMAT Centura 5200 Tungsten PECVD, 4 chambers, 8"
- AMAT Centura 5300 HDP Oxide Etch, 8"
- AMAT Centura II Al CVD chamber, 12"
- AMAT Centura II, 4 HART chambers, 8"
- AMAT Centura II DPS Metal R1, 8"
- AMAT Centura II DPS+ Metal, 8"
- AMAT Centura II IMP Ti chamber, 12", 2 ea.
- AMAT Centura Ultima HDP CVD, 8", 3 chambers
- AMAT Centura Ultima Plus CVD, 6", 2 chambers
- AMAT Centura Ultima TE HDP CVD. 8"
- AMAT Centura Ultima X, HDP CVD. 3 chambers, 12"
- AMAT Centura WXZ CVD System, 3 chambers, 8"
- AMAT Endura 300 Aluminum PVD, 12"
- AMAT Endura CVD, 3 chambers, 8"
- AMAT Endura CVD, 4 chambers, 6"
- AMAT Endura CVD, 4 chambers, AlCU, 8"
- AMAT Endura Dura Ti Chamber, 12"
- AMAT Endura RF Sputter Chamber, 8"
- AMAT Endura II PVD System, 12"
- AMAT Endura II CVD Al Chamber, 12"
- AMAT Endura II RF Ti Chamber, 12"
- AMAT Endura II eSIPChamber, 12"
- AMAT Endura II Pre Clean Chamber, 12"
- AMAT Endura P5000 Mxp+ Oxide Etcher, 2 chambers, 8"
- AMAT Endura P5000 CVD, 4 chambers, 6"
- AMAT Endura P5000 Mxp Etcher, 3 chambers, 8" ESC
- AMAT Endura P5000 CVD Chamber, 6"
- AMAT Endura P5000 Loadlock Chamber, 6"
- AMAT Endura P5000 Mk II Chamber, 8"
- AMAT Endura P5000 Mk II Metal MXP, 6"
- AMAT Endura P5000 Mk II Etch, 6" clamp
- AMAT Endura P5000 Mk II CVD, 4 chambers, 8"
- AMAT Endura P5000 Mk II Nitride PECVD, 2 chambers, 8"
- AMAT Endura P5000 Mk II TEOS Dep. Etch Back, 8"
- AMAT Endura P5000 Mk II Tungsten Sputter, 2 chambers, 8"
- AMAT Endura P5000 Spares - please ask for list !
- AMAT Endura 5500, 6"
- AMAT Endura 5500 HP PVD, 3 chambers, 8"
- AMAT Endura Re-Flow Chamber, 12"
- AMAT OPUS Metal Etcher, 2 chambers, 12"
- AMAT Precision 5000 Mk II Metal Etch, 6"
- AMAT P5000 Metal Etcher, 6"
- AMAT P5000 Metal Etcher, 8"
- AMAT P5000 MxP+, Metal, 2 chambers, 6"
- AMAT P5000 MxP+, Poly, 3 chambers, 8"
- AMAT P5000 PE Oxide, 2 DxZ chambers, 6"
- AMAT P5000 PECVD, 8"
- AMAT P5000 CVD, 3 Chambers, 8"
- AMAT P5000, 2 Chambers, TEOS Oxide CVD
- AMAT P5000 RIE / PECVD, 2 Chambers, 6"
- AMAT P5000 Mk II, 3 Chambers TEOS CVD, 8"
- AMAT Producer Standard, 8"
- AMAT Producer GT, 12"
- AMAT Producer SE, 12"
- AMAT Producer SE APF, 12"
- AMAT Producer SE Oxide HT, 12"
- AMAT Producer SE Low K CVD, 12"
- AMAT Tectra, 4 chambers, 8"
- AMAT TxZ Chamber
- AMAT Super-E Chamber
- AMAT WC MCA Chamber
- AMAT 3-Channel Heater / Susceptor Leveling System
- ASM A400 Atmosperic Oxidation, 8"
- ASM A400 High Temp Oxidation, 8"
- ASM A400 LPCVD, 8"
- ASM A412 Vertical Atmospheric Furnace, 12"
- ASM A412 Vertical LPCVD Furnace, 12"
- ASM A412 Vertical LPCVD Furnace, 12", SiN & TEOS
- ASM E3200 EPI Deposition System, 12"
- ASM Eagle 10 Trident Plasma PECVD System
- Canon Anelva C-5100GT PVD Gate Metal Deposition System, 12"
- Canon Anelva C-7100GT PVD Gate Metal Deposition System, 12"
- CVC 2800 Cluster Tool
- DNS Aquaspin CVD System, 12"
- Emcore D180 MOCVD System
- Emcore E300 MOCVD System
- Emcore E400 MOCVD System
- Jusung Engineering Cyclone+ LPCVD Furnace, 2 chambers, 12"
- Kokusai DJ-825V-8V Poly Furnace, 8"
- Kokusai DJ-823V-8BL3 LPCVD, 8"
- Kokusai DJ-833V LP-CVD, 8"
- Kokusai DJ-833V H2 Anneal, 8"
- Kokusai DJ-853V LPCVD Furnace, 8"
- Kokusai DJ-853V Furnace, 8" - parts machine
- MRC Eclipse Mark II PVD System, 6"
- MRC Eclipse Mark II PVD System, 8"
- MRC Eclipse pre-Redux PVD System, 6"
- MRC Eclipse Star PVD System, 6"
- Novellus Concept-1 TEOS System, 8"
- Novellus Flat Aligner for Concept-2, 6"
- Novellus Concept-2 Sequel Single Chamber System, 8"
- Novellus Concept-2 Sequel Express, 8"
- Novellus Concept-2 Dual Speed Sequel, 8"
- Novellus Concept-2 Altus DirectFill, 8"
- Novellus Concept-2 Dual Altus Standard CVD, 8"
- Novellus Concept-2 Speed CVD, 8"
- Novellus Concept-2 Sequel Chamber
- Novellus Concept-3 PDL PECVD, 12"
- Novellus Concept-3 Speed NExT, 12"
- Novellus Concept-3 Speed Chamber
- Novellus Concept-3 Speed, 12"
- Novellus Inova PVD Sputter, 6 chambers, 12"
- Novellus PEP Irida Asher, 6"
- Novellus Sabre xT Copper Deposition System, 8”
- Oxford Plasmalab 80 Plus PECVD System, up to 8"
- Oxford Plasmalab 100 PECVD System, 6" to 8"
- Oxford Plasmalab 100 PECVD TEOS System, up to 8"
- Picosun Sunale R-200 Advanced ALD Reactor, 200mm
- Plasmatherm 700 VLR (Versalock) RIE System
- Plasmatherm 700 VLR (Versalock) PECVD System
- Plasmatherm SL-7300 PECVD System
- Plasmatherm SLR-730 PECVD System
- Plasmatherm SLR 770 ICP Etcher, Dual Chamber
- Plasmatherm 740 Etcher, 4"
- Plasmatherm 790 ICP System, up to 8"
- Plasmatherm 790 PECVD System, up to 8"
- Plasmatherm 790 RIE System
- Riber Epineat III-V MBE System
- Semitool Scepter Spray Acid System, 8"
- Semitool 2-Chamber Spray Acid System, 8"
- Sigma Solutions WJ-1000 CVD System
- SINGULUS SINGULAR High Volume PECVD System
- SPTS CPX Deep Silicon Etch (DSIE) and XeF2 Etcher
- SPTS ICP AOE Oxide Etcher, 8"
- SPTS Multiplex ASE-HRM ICP PRO Etcher, 8"
- SPTS Omega FXP Rapier Plasma Etch System
- SPTS VpX PECVD System, 8"
- SPTS VpX Pegasus ICP Etcher, 8"
- TEL Indy A HTOX, 12"
- TEL MB2-730 CVD System, 8", 2 chambers
- TEL Tactras Plasma Etch System, 12"
- TEL Trias Metal MOCVD System, single chamber, 12"
- TEL Trias TI / TiN PECVD System, 4 chambers, 12"
- TEL Unity M85 TD Dielectric Etch System, 8"
- TEL Unity EP PECVD System, 8"
- TEL Unity II 85DD Oxide Etcher, 8"
- TEL Unity IIe 85 PPA Nitride Etch System, 8"
- TEL Unity IIe 85 IA Nitride Etch System, 8", SMIF
- Thomas Swan MOCVD Reactor, 19 x 2"
- Thomas Swan MOCVD Reactor, 31 x 2"
- Thomas Swan MOCVD GaN Reactor, 3 x 2"
- Thomas Swan MOCVD GaN Reactor, 6 x 2"
- Tystar Mini Tytan 8300 Horizontal Furnace, 6" to 8"
- Ulvac Ceraus ZX-1000 PVD System, 8"
- Ulvac Entron PVD System, 12"
- Veeco E300 GaNZilla MOCVD System
- Veeco Gen II MBE System
- Veeco Gen 930 MBE System
- Veeco K465 GaN MOCVD System
- Veeco K465i TurboDisc GaN MOCVD System
- Watkins-Johnson WJ999 R3.5 CVD System, 8"
- Watkins-Johnson WJ-999 TEOS System, 8"
- Watkins-Johnson T1000 APCVD System
- Watkins-Johnson WJ-1500 APCVD TEOS System, 8"
Etcher
- Akrion UP V2 HL.2000 Hybrid-Linear Automatic Acid Wet Station w/ Robotic Transfer
- Akrion UP V2 MP.2000 CU Clean Sink, 8"
- Akrion UP V2 SA.2300 Semi-Automatic Solvent Wet Station - parts system
- Alcatel AMS 200IP DRIE System
- Apprecia Technologies Cenote Metal Wet Etching System, 8"
- DNS FC-3000 Wet Station, 12"
- DNS FC-3100 Wet Station, 12"
- DNS WS-820C Wet Etching System, 8"
- DNS WS-820L Wet Etching System, 8"
- Drytek Etcher Spares - please ask for list !
- FSI ISR-200 Wet Process Bench, 8"
- FSI Mercury MP Spray Processor, 8"
- FSI Mercury OC Spray Processor, 8"
- FSI Scorpio Resist Develop System, 8"
- FSI Zeta 300 Spray Cleaning System, 12"
- FSI Zeta G3 Batch Spray System, 12"
- Innomax ESE 2013 Wet Process Spray System, single wafer
- LAM Alliance 9400 DFM Etch System w/ 2 chambers, 8"
- LAM Alliance Poly Etch Chamber, 6"
- LAM Autoetch 590 Etcher, 6"
- LAM 490 Polyimide Plasma Etcher
- LAM 2300 Kiyo EX Chamber, 12"
- LAM 2300 ELD, WCoP, Electroless Deposition, 12"
- LAM 2300 Exelan Etch Oxide, 4 chambers , 12"
- LAM 2300 Exelan Etch Oxide, 4 chambers , process CU, 12"
- LAM 2300 Stretch ATM + VTM, 12"
- LAM 4420 Poly Etcher, 8"
- LAM 4420 Rainbow Envision
- LAM 4420 Rainbow Poly Etcher, 6"
- LAM 4420 Rainbow Poly Etcher, 8"
- LAM 4420XL Rainbow Poly Etcher, 8"
- LAM 4428 Poly Etcher, 8"
- LAM 4520 Rainbow Classic
- LAM 4520 Rainbow Oxide Etcher, 8"
- LAM 4520i Rainbow Oxide Etcher, 6"
- LAM 4520i Rainbow Oxide Etcher, 8"
- LAM 4520XL Etcher, 6"
- LAM 4520XLE Poly Etcher, 8"
- LAM 4528 Oxide Etcher, 8"
- LAM 4600 Tungsten Etcher, 8" - parts machine				10.11.17
- LAM 4628 Etcher, 6" to 8"
- LAM DV-38DS Single Wet Etch, 12"
- LAM SOSU EXT3100 Bevel Etch , 12"
- LAM TCP 9400 PTX Etch System, 8"
- LAM TCP 9400 SE Etcher, 6"
- LAM TCP 9400 SE Etcher, 8"
- LAM TCP 9400 SE/ENV Etcher, 8"
- LAM TCP 9408 SE Etcher, 8"
- LAM TCP 9600 Etcher, 8"
- LAM TCP 9600 PTX Metal Etch System, 8"
- LAM TCP 9600 SE Etcher, 6"
- LAM TCP 9600 SE Metal Etcher, 8"
- LAM TCP 9608 SE Etcher, 8"
- LAM TCP 9608 SE Metal Etcher, 8"
- March Instruments AP-1000 Plasma Cleaner
- March Instruments Plasmod Barrel Asher
- March Instruments PX-500 Plasma Etcher
- March Instruments PX-1000 Plasma Etcher
- Matrix 403 Plasma Etcher
- Oxford Plasmalab 80 Plus RIE System, up to 8"
- Oxford Plasmalab 100 ICP Etcher, up to 6"
- Oxford Plasmalab 100 ICP Etcher, 8"
- Oxford Plasmalab 130 ICP System
- Oxford Plasmalab 133 ICP 380 System
- Oxford Plasmalab uEtch 300 RIE System
- Plasmatherm SLR-730 PECVD System, Dual Chamber, 8"
- Plasmatherm 790 RIE Etcher, up to 8"
- Samco RIE-10NR Reactive Ion Etching System, 8"
- Samco RIE-200L Dry Etching System, 8"
- Sankyo SWH80 Wet Oxide Etch Bench, 8"
- SCP Evolution 200 Oxyde Strip Wet Station, up to 8"
- Semitool Scepter Spray Acid System, 8", setup for 6"
- Semitool SST-C-321-280 Spray Solvent Tool, 8"
- Semitool SST-C-421-280 Spray Solvent Tool, 8"
- SEZ 4300 Spin Etcher, 12"
- SEZ DV-34BF Wafer Processor, 12"
- SEZ RST101 Spin Etcher, 6"
- SEZ RST201 Spin Etcher, 8"
- SEZ SP304 Spin Etcher, 12"
- SEZ SP323 Spin Etcher, 12"
- SEZ spares - please ask !
- Shibaura CDE-8 Dry Etcher, 8"
- Shibaura µ ASH 1800W Asher, 8"
- STS Multiplex ICP Etcher, 6"
- STS Multiplex ICP High Rate Inductively-Couple Plasma Etcher, up to 8"
- STS Multiplex Reactive Ion Etcher (RIE), 6"
- STS Multiplex ICP AOE System, up to 8"
- Technics Micro 800 RIE Benchtop Etcher
- Tegal 6520 HRe Alu Etcher, 6"
- TEL Telius SP Cluster Plasma Etcher, 2 chambers, 12"
- Trikon Omega 201 Metal Etcher
- ULVAC TDE-300M Plasma Etcher, 8"
- Veeco Microetch 1201 Ion-Beam Milling System, up to 8"
- Veeco RF-350 Ion Beam Milling System, up to 8"
- Veeco RF-350S Ion-Beam Milling System, 6"
Evaporation and Sputtering Systems
- Airco Temescal VES 2550 Sputtering System
- Alcatel SCM 560 Sputtering System
- Alcatel SCR 650 Sputtering System
- Alliance Concept EVA-450 Evaporation / Sputtering System
- Balzers BAK-550 Evaporator System
- Balzers BAK-600 Evaporator System
- Balzers BAK-600 CE Evaporator System
- Balzers BAK-640 Evaporator System
- Balzers BAK-750 E-Beam Evaporator System
- Balzers BAK-760 E-Beam Evaporator System
- Balzers LLS-802 Metal Sputter System
- Balzers LLS EVO Sputter System
- Balzers UMS 500 Ultra High Vacuum Evaporator
- Canon Anelva I-1060 SV II Plus-1 Sputtering System, 5 chambers, 8"
- CHA Mark 50 E-Beam Evaporator, 6"
- CHA Mark 50C E-Beam Evaporator, 4"
- CHA SE-600 Evaporator w/ 4 pocket electron beam gun and cryopump
- CHA SE-1000 E-Beam Evaporator
- Cressington 208HR High Resolution Sputter Coater
- Denton Desk IV High Vacuum Evaporation Deposition System
- Denton Integrity 14 Vacuum System
- Edwards E306 Filament Evaporator
- Electrotech MS 6210 Sputtering System, 4"
- Emitech K675X Table-top Sputtering System
- EVG EV101 Manual Spin Coater
- EVG 150 Automated Coater / Developer, up to 8"
- ITO Roll to Roll Sputtering System, max. 1,400 mm film width
- Karl Suss ACS 200 Spin Coater, 8"
- Karl Suss Alpha R.12 Liquid Transfer Coating Tool
- Karl Suss Delta 12AQ Spin Coater / Developer, 8" / 12"
- Karl Suss Delta 12L Spin Coater / Developer, 8" / 12"
- Karl Suss Gamma 60 Coater, 6"
- Karl Suss RC16 Spin Coater, 6"
- Kurt Lesker Aluminum Evaporator, 8"
- Leybold A-1100 E-beam Evaporation System
- Leybold APS 904 Optical Coating System
- Leybold APS 1104 Evaporation System
- Leybold APS 1504 Optical Coating System
- Leybold L-560 E-beam Evaporation System
- Leybold LH-900 Evaporation System
- Leybold Pegasus Sputtering System
- Leybold Z-550 MS Sputtering System
- Leybold ZV-6000 Sputtering System
- MRC 643 Sputtering System
- MRC 8867 Sputtering System
- MRC 903M Sputtering System, 3 targets
- MRC 942 Sputtering System
- Optorun OTFC-1100 Optical Coater
- Perkin-Elmer 2400 Sputtering System, up to 6" - refurbished
- Perkin Elmer 2400 Sputtering System
- Perkin Elmer 4410 RF / DC Sputtering System
- Plasma Sciences HRC-200 Table-Top RIE System
- Satisloh S-900 E-beam Evaporation System
- Satisloh 1200 E-beam Evaporation System
- Semicore SC250-450 Benchtop Sputtering System
- Semicore SC3500 Electron Beam Evaporation System
- Semicore SC4000 Electron Beam Evaporation System
- Temescal BJD2000 Electron Beam Evaporator
- Temescal FC1800 Electron Beam Evaporator
- Temescal VES-2550 Evaporation System
- Thermionics VE Series R&D E-Beam System
- Torr CRC 150 Sputtering System
- Torr EB-4P3kWS Thin Film Deposition System
- UHV Magnetron Sputtering System
- ULVAC Ei - 5k e-Beam Evaporation System
- Ulvac Satella Thin Film Deposition System for OLED, 200 x 200 mm substrate size
- Ulvac SMD-450C Sputter
- Ulvac STD-1200 In-Line Sputter
- Ulvac ZX-1000 Sputter
- Unaxis LLS EVO Sputtering System, 8"
- Varian 3290 ST Sputtering System
- Varian M2i Sputtering System, 8"
- Veeco Spector Optical Coater
Furnaces
- ASM A412 Furnace, 12"
- ASM COE 139 Curing System
- Aviza AVP 8000 AP Vertical Furnace, 8"
- Aviza AVP 8000 LP LPCVD Furnace, 8"
- Aviza Celsior LPCVD Furnace, 12"
- Aviza Pantheon LPCVD Furnace, 12"
- Aviza Pantheon LPCVD Furnace, 3 ALD chambers,12"
- Aviza VTR 7000 High Temperature Furnace, 8"
- BTI BDF-4 Horizontal Oxidation Furnace, up to 6"
- BTU Bruce 7355 Horizontal Furnace, 8"
- BTU TCA 52-3-36N24 Belt Furnace
- BTU TCA 93-4-36E36 Belt Furnace
- BTU TL63-3-54E48 Belt Furnace
- Bruce BTU BDF-41 Spares - please ask for list !
- Despatch CF-2710 Furnace
- Despatch DF-14414 / 10-NS Inline Diffusion Furnace
- First Nano ET3000 Horizontal Furnace, 2" to 5"
- First Nano ET6000 Horizontal Furnace
- Futek PF-3103 Magnetic Annealing Furnace
- GT Advanced Sapphire Furnace
- Kokusai DJ-803V Oxidation Furnace, 8"
- Kokusai DD-823V Furnace, 8"
- Kokusai DJ-825V Poly LPCVD, 6"
- Kokusai DJ-853 Furnace, 8"
- Kokusai DJ-853V-BL D-Poly, 8"
- Kokusai DJ-853V-BL Nitride, 8"
- Kokusai DJ-853V-BL SOG Curing, 8"
- Kokusai DJ-853V-BL TEOS, 8"
- Kokusai Quixace Vertical Furnace, ALD TiN, 12"
- Kokusai Quixace DD-1206V-DF Vertical Furnace, 12"
- Kokusai Quixace DD-1206VN-DF Vertical Furnace, 12"
- Kokusai Quixace DJ-1206VN-DM Vertical Furnace, 12"
- Kokusai Quixace Ultimate Vertical Furnace, 12"
- Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12"
- Kokusai Zestone III (DJ-1223V) Vertical Furnace, Poly, 12"
- Koyo Thermo System VF-5300B Polyimide Bake
- MRL Diffusion Furnace, 12", single stack
- MRL Cyclone C430 Four-Tube Horizontal Furnace, 6"
- RTC S910 Furnace, up to 1000 deg C
- RTC S915 Furnace, up to 1000 deg C
- SST DAP 1100 Vacuum Furnace, 1000 deg C
- SST DAP 2200 Vacuum Furnace, 1000 deg C
- SST HVWB 2200 Vacuum Furnace, 1000 deg C
- SST MV 2200 Vacuum Furnace, 1000 deg C
- SVG 7000 Furnace, 6"
- SVG VTR-7000 Oxide Vertical Furnace, 8"
- SVG AVP 8000 AP Vertical Furnace, 8"
- SVG AVP 8000 LP Vertical Furnace, 8"
- TEL Alpha 303 Furnace, TEOS, 12"
- TEL Alpha 303i DCS-HTO Furnace, 12"
- TEL Alpha 303i Furnace, LT SOD cure, 12"
- TEL Alpha 303i Furnace, P-Doped Poly, 12"
- TEL Alpha 8S Furnace, 8"
- TEL Alpha 8SE Furnace, 8"
- TEL Alpha 8SE-E Furnace 8", High Temp Oxide
- TEL Alpha 8SE Furnace, 8"
- TEL Formula Vertical Nitride Furnace, 12"
- TEL Indy Vertical Furnace
- TEL Indy+ Vertical Furnace, 12", ALD HfO2
- TEL UL2604-08H Furnace
- TEL UL2604-10H Furnace
- Thermal Technology Meltmaster High-Purity Vacuum Arc Melt Furnace
- Thermco Diffusion Furnace, 3 tubes, up to 4"
- Thermco MiniBrute MB71 Furnace, 5"
- Thermco MiniBrute MB80 Furnace, 5"
- Thermco HTR 5200 Horizontal Diffusion Furnace, 6"
- Thermolyne 46230CM-75 Furnace, up to 1,700 deg C
- VacLong VSG-B200 Vacuum Furnace
Implanter
- AMAT 9500 XR Ion Implanter, 8"
- AMAT Quantum X Plus High Current Ion Implanter, 12"
- AMAT XR120 Ion Implanter
- AMAT xR-LEAP Low Energy Ion Implanter, 8"
- Axcelis HC3 High Current Ion Implanter, 12"
- Axcelis/Eaton NV GSD HE High Energy Ion Implanter, 8"
- Axcelis/Eaton NV GSD 200E2 80 keV High Current Implanter, 8"
- Axcelis Optima HD High Dose Ion Implanter, 12"
- Axcelis Purion H High Current Ion Implanter, 12"
- Eaton Nova NV 10-160 Ion Implanter, 5"
- Nissin Exceed 2300 Ion Implanter, 12"
- SEN Eaton GSD-HE Ion Implanter, 8"
- SEN Eaton GSDIII-LE Ion Implanter, 8"
- SEN LEX3 Low Energy High Current Ion Implanter
- SEN Eaton NV-GSD-A160 Ion Implanter, 5"
- SEN Eaton NV-GSDIII-LE High Current Implanter, 8"
- Varian 160XP High Current Ion Implanter, 6"
- Varian E220 HP Ion Implanter, 8"
- Varian E220 HP Ion Implanter, 6"
- Varian E500 EHP Medium Current Ion Implanter, 8"
- Varian E500 EHPi Medium Current Ion Implanter, 8"
- Varian E500 HP Ion Implanter, 6"
- Varian E500 HP Ion Implanter, 8"
- Varian E1000 Implanter, 8"
- Varian VIISion 80 Ion Implanter, 6"
- Varian VIISion 80 Ion Implanter, 8"
- Varian VIISta 80 Classic High Current Ion Implanter, 8"
- Varian VIISta 810 Medium Current Ion Implanter, 8"
- Varian VIISta 810 XEr Medium Current Ion Implanter, 12"
- Varian xR120 Ion Implanter, 8"
Laser
- Advanced Laser Separation DCM802 Laser Scribe
- Cymer ELS 4000 Laser
- Cymer ELS 5600 Laser
- Cymer ELS 6300 Laser
- ESI 44 Laser Trimming System
- ESI 2050 LP Laser Trimming System
- ESI 4410 Laser Trimming System w/o parts handler
- ESI 4990 Laser Trimming System
- ESI 5970 Laser Repair System
- ESI 9275 Laser Repair System - parts machine
- ESI 9300 Laser Repair System
- ESI 9350 Laser Repair System
- ESI 9820 Laser Processing System, 12"
- ESI 9830 Laser Processing System, 12"
- ESI 9835 Laser Processing System, 12"
- ESI 9850 Laser Processing System, 12"
- GSI JK201H Laser
- GSI M310 Laser Trimming System
- GSI M320 Laser Repair System
- GSI M430 Laser Repair System
- GSI M435 Laser Repair System
- Hitachi ABC-2C-C CO2 Laser System
- Innolas ILSTT-DS Laser System
- New Wave Research 2150 Laser Scriber
- New Wave Research Titan Laser Scriber
- Rofin Baasel Starcut 100 SC-100 ICQ-DK Laser
- Rofin DQ 010 q-switched Solid State Laser
LED Production
- ASM AD830 Die Bonder for LED's
- ASM DS830 Dispensing / Jetting Machine
- ASM IBE139H Buffer
- ASM iHawk Xtreme Wire Bonder
- ASM MC906H Curing Oven
- ASM MP-TAB Singulation Machine
- ASM SLS230T Automatic LED Sorting Machine
- ASM SLT400 Taping Machine
Metrology
- Accent RPM 2000 PL Mapper
- ADE Episcan 1000 FT-IR Spectrometer
- ADE Microsense 6033T Thickness Gauge, up to 6"
- Advantest / Leica E3610 CD SEM
- AMAT AERA2+ Reticle Inspection
- AMAT NanoSEM 3D Critical Dimension SEM, 12"
- AMAT Opal 7830i CD SEM, 8"
- AMS IR-3000 FT-IR Spectrometer, 12"
- AMS IR-3100 FT-IR Spectrometer, 8"
- Beta Squared OS2000 Micralign Mask Scanner, 4" to 6"
- Biorad QS 300 FTIR Spectrometer
- Biorad QS 300 FTIR Spectrometer, up to 12"
- Biorad QS 408M Manual FTIR Spectrometer, up to 8"
- Biorad QS 1200 FTIR Spectrometer, 12"
- Biorad Quaestor Q7 Profilometer, 8"
- Bomem MB-160 PH FTIR Spectrometer
- Bruker Tensor 27 FTIR Spectrometer w/ MCT and DTGS Detector
- Cary 50 Bio Spectrophotometer
- CDE ResMap 168 Four Point Probe System
- Commonwealth Scientific / Veeco 8C Ion Milling System
- Cyberscan Vantage Noncontact Profiler with Keyence LT9010M
- Dynamic Micro Systems 2090 Automatic Reticle Changer
- Filmetrics F20-EXR Film Thickness Measurement
- Four Dimensions 280C Four Point Probe System
- FSM 128 Film Stress Measurement System, 8"
- Gaertner L116S Ellipsometer
- HSEB Axiospect 300, 12"
- Hypervision Visionary 2000 Wafer Inspection System, 8"
- ICOS WI-2000 Wafer Inspection System, 8"
- ICOS WI-2200 Wafer Inspection System, 8", w/ HM-200 Handler
- Jordan Valley JVX5200 XRR X-Ray Reflectometer, 12"
- KLA Tencor 2401 Viper Macro Defect Inspection, 8"
- KLA Tencor 5200 XP Overlay and CD Measurement, 8"
- KLA Tencor 5300 Overlay and CD Measurement, 8"
- KLA Tencor Aleris Spectra DX Interferometer, 12"
- KLA Tencor Archer XT Plus, 12"
- KLA-Tencor Archer AIM, 300mm
- KLA-Tencor ASET F5x Thin Film Measurement System, 8"
- KLA-Tencor ASET F5x Thin Film Measurement System, 8" / 12"
- KLA Tencor eCD 1 SEM, 8" / 12"
- KLA-Tencor eDR-5210 Wafer Defect Review System
- KLA Tencor eS32 Defect Review System, 12"
- KLA Tencor Flexus FLX-2300 Stress Measurement, 8"
- KLA Tencor Flexus FLX-2320 Stress Measurement, 6"
- KLA Tencor Flexus FLX-2320 Stress Measurement, 8"
- KLA Tencor Flexus FLX-2360 Stress Measurement, 12"
- KLA Tencor Flexus FLX-2908 Stress Measurement, 8"
- KLA Tencor Flexus FLX-5500 Stress Measurement, 8"
- KLA-Tencor LMS IPRO5 Photomask Registration and CD Metrology System
- KLA Tencor M-Gage 300 Wafer Monitor w/ DDC
- KLA Tencor / Prometrix RS35C Four Point Probe System
- KLA Tencor / Prometrix RS50/e Four Point Probe System, 8"
- KLA Tencor / Prometrix RS55/tc Four Point Probe System, 8"
- KLA Tencor / Prometrix RS55/tca Four Point Probe System, 8"
- KLA Tencor / Prometrix RS75 Four Point Probe System
- KLA Tencor / Prometrix RS75/a Four Point Probe System
- KLA Tencor P-2 Long Scan Profilometer, 8"
- KLA Tencor P-15 Long Scan Profilometer
- KLA Tencor P-20H Long Scan Profilometer, 8"
- KLA Tencor Puma 9000 Dark Field Defect Inspection, 12"
- KLA Tencor Quantox 64100 Silicon and Oxide Monitoring System, 8"
- KLA Tencor SCD Interferometer, 12"
- KLA Tencor TeraScan SL526 Reticle Inspection
- KLA Tencor TeraScan 586 Reticle Inspection
- KLA Tencor Ultrapointe CRS 1010S Interferometer, 8"
- KLA Tencor UV1050 Film Thickness Measurement, 8"
- KLA Tencor UV1080SE Film Thickness Measurement, 8"
- KLA Tencor UV1250SE Film Thickness Measurement, 8"
- KLA Tencor UV1280SE Film Thickness Measurement, 8"
- KLA Tencor / Prometrix VP-10 Four Point Probe System
- KLA Tencor Parts - please ask !
- Lasertec M2351 Reticle Inspection
- Leica IPRO2 Reticle Inspection SEM
- Micrion 9500 FIB System
- MTS Nano Indenter SA2
- Nanometrics NanoSpec AFT 180 Thin Film Measurement System
- Nanometrics Nanospec AFT 210UV Thin Film Measurement System, up to 6"
- Nanometrics Nanospec AFT 2100 Thin Film Measurement System, 3" to 8"
- Nanometrics NanoSpec 3000 Thin Film Measurement System, 8"
- Nanometrics NanoSpec 4000 Thin Film Measurement System
- Nanometrics NanoSpec 4150 Thin Film Measurement System, up to 8"
- Nanometrics NanoSpec 6100 Thin Film Measurement System, up to 8"
- Nanometrics 8000 Thin Film Measurement System, 6"
- Nanometrics 8300 Thin Film Measurement System, 8" + 12"
- Nanometrics Q200i Biorad Overlay System, 8"
- Nanometrics QS-1200 FT-IR Spectrometer, up to 8"
- Nanometrics Vertex PL Mapper
- Newport SP92250A-1000-U Class A Solar Simulator
- Nicolet Magna 550 FT-IR Spectrometer, 8"
- Nicolet Protégé 460 FTIR Spectrometer, up to 12"
- Perkin Elmer Spectrum One FTIR Spectrophotometer
- Perkin Elmer 1000 PE GX FTIR Spectrophotometer
- Philips PQ Ruby X-Ray Ellipsometer
- Philips SPW-2800 X-Ray Surface Analyzer, 8"
- Plasmos SD2000 Ellipsometer
- Plasmos SD2003 3 Wavelength Ellipsometer
- Plasmos SD2302 Ellipsometer
- Plasmos SD4000 Ellipsometer
- Raytex EdgeScan Wafer Edge Inspection System, 8"
- ReVera VeraFlex, 12"
- Rigaku MFM65 Small Spot Energy Dispersive X-Ray Fluorescence Spectrometer
- Rigaku TXRF 300S X-Ray Fluorescence Spectrometer
- Rigaku XRF 3620 X-Ray Fluorescence Spectrometer, 8"
- Rigaku XRF 3630 X-Ray Fluorescence Spectrometer, 8"
- Rigaku XRF 3640 X-Ray Fluorescence Spectrometer, 8"
- Rigaku TXRF 3700H X-Ray Spectrometer
- Rigaku Ultima IV X-Ray Diffraction System (XRD)
- Rigaku Wafer X 300 XRF Spectrometer
- Rudolph / August NSX-90 Wafer Inspection System, 8"
- Rudolph / August NSX-95 Wafer Inspection System, 8", w/ FFH handler
- Rudolph / August NSX-105B Wafer Inspection System, 8"
- Rudolph / August NSX-105C Wafer Inspection System, 8", w/ Wafer Handler
- Rudolph Auto EL-III Ellipsometer, 6"
- Rudolph AXI-930 B20 Macro Defect Inspection, 12"
- Rudolph FE-III Ellipsometer, 6"
- Rudolph FE-VII Ellipsometer, 8"
- Rudolph MetaPulse 200X Cu System, 8"
- Rudolph SE200XL Spectral Ellipsometer, 8"
- Rudolph STI WAV1000 Wafer Inspection Station, 12", w/ Accretech UF300A
- Rudolph Waferview 320 Wafer Inspection System, 12"
- RVSI WS-2800 Wafer Inspection System
- Semilab IR3100S Small spot IR-Near IR FT-IR Spectrometer, 12"
- Semilab / SDI WT-2000 Measurement System, 8"
- Seminet SAFEGUARD-RHIS Reticle Handling and Inspection System
- Sopra GES-5 Ellipsometer
- ThermaWave Optiprobe 2600B Film Thickness Measurement System
- ThermaWave Optiprobe 2690 Film Thickness Measurement System
- ThermaWave Optiprobe 3260 DUV Film Thickness Measurement System
- ThermaWave Optiprobe 3260 DUVi Film Thickness Measurement System
- ThermaWave Optiprobe 3290 DUV Film Thickness Measurement System
- ThermaWave Optiprobe 5220 Film Thickness Measurement System
- ThermaWave Optiprobe 5240 Film Thickness Measurement System
- Thermawave OptiProbe 5340C Thin Film Thickness Measurement, up to 12"
- Thermo Nicolet Avatar 360 FTIR Spectrometer
- Thermo Nicolet Avatar 370 FTIR Spectrometer
- Thermo Nicolet Avatar 870 Spectrum FTIR Spectrometer
- Thermo Nicolet ECO 1000 FTIR Spectrometer
- Thermo Scientific MicroXR VXR Benchtop X-ray Fluorescence Spectrometer
- Veeco Dektak IID Profilometer
- Veeco Dektak 3 Profilometer
- Veeco Dektak 3030 Profilometer
- Veeco Dimension 3000 Atomic Force Microscope (AFM)
- Veeco Dimension 5000 Atomic Force Microscope (AFM)
- Veeco Dimension X1D Atomic Force Microscope (AFM), 12"
- Veeco Dimension X3D Atomic Force Microscope (AFM)
- Veeco RF-350 S Ion Mill, 8"
- Veeco Sloan Dektak 8000 Profiler, 8"
- Veeco V200 Si Profilometer, 8"
- Veeco Vx330 Atomic Force Profiler, 12"
- Veeco NT3300 Surface Profilometer, 8"
- WYKO NT-2000 Surface Profilometer
Photolithography
- Fairchild FALCON Photolithographic Line, up to 8"
- Fusion Gemini GPS Photostabilizer, 8"
- MIVA 20128 Mask Wrighter
- Raith 150 E-Beam Writer, 6"
- Tamarack 152P/162 Projection Mask Aligner
- Tamarack 152R Projection Mask Aligner
- Tamarack 161 Optical Comparator
- Tamarack 163 Rotary Projection Printer
- Tamarack 303 Projection Mask Aligner
Pumps
- Adixen ATH 500M Turbo Pump
- Alcatel 2021 I Pre-Pump
- Alcatel 2063 CP+ Pump
- Alcatel A100L Dry Pump
- Alcatel ADS501 Dry Pump
- Alcatel ADS602 Dry Pump
- Alcatel ADS602P Dry Pump
- Alcatel ADS801 Dry Pump
- Alcatel ADS1202H Dry Pump
- Alcatel ATH 1300M Turbo Pump
- Balzers DIF 160 Diffusion Pump
- Balzers DIF 250 Diffusion Pump
- Ebara AA10 Dry Pump
- Ebara AA70WN Dry Pump
- Ebara A25S Dry Pump
- Ebara A30W Dry Pump
- Ebara A70W Dry Pump
- Ebara ADP122P Dry Pump
- Ebara ADP602P Dry Pump
- Ebara ESR20N Dry Pump
- Ebara ESR80WN Dry Pump
- Edwards E2M-80 Dual Stage Vacuum Pump, Fomblin prepped
- Edwards EH250 Vacuum Pump
- Edwards iF30K Dry pump
- Edwards iH80 Dry Vacuum Pump
- Edwards iH600 Dry Vacuum Pump
- Edwards iH600 Mk5 Dry Vacuum Pump
- Edwards iH1000 Dry Vacuum Pump
- Edwards iH1000 Mk5 Dry Vacuum Pump
- Edwards iF1800 Dry Vacuum Pump
- Edwards iH1800 Dry Vacuum Pump
- Edwards iQDP40 Dry Vacuum Pump
- Edwards iQDP80/500 Dry Vacuum Pump
- Edwards iQDP80/1200 Dry Vacuum Pump
- Edwards QDP80 Dry Vacuum Pump
- Edwards 8 RV8 Vacuum Pump
- Edwards STP-603-U Turbomolecular Pump
- Edwards STP-301 Turbomolecular Pump
- Edwards STP-1003U Turbomolecular Pump
- Edwards STP-H600C Turbomolecular Pump
- Edwards XDS5 Dry Scroll Vacuum Pump
- Kashiyama SD60V Dry Pump
- Kashiyama SDE1203B Dry Pump
- Leybold D65BCS Vacuum Pump
- Leybold TW250S Turbo Pump
- Leybold TURBOVAC T 1600 Turbo Pump
- Osaka TG1813BW Compound Molecular Pump
- Pfeiffer TMH521 Turbo Pump
- Seiko Seiki STP-H301C Turbomolecular Pump
- Shimadzu TMP Turbo Pump
- Trebor Magnum 610 Acid Pump
- Unozawa TS300A Dry Vacuum Pump
- Varian Turbo-V 300HT Macro Torr Turbomolecular Vacuum Turbo Pump
- White Knight AP-100 Acid Pump
- White Knight AT-300 Acid Pump w/ filter
- Kashiyama SD60V Dry Pump
- Kashiyama SDE1203B Dry Pump
Rapid Thermal Processing
- AG Associates 210M Heatpulse RTP System, 4"
- AG Associates 410 Heatpulse RTP System, 4"
- AG Associates 601 Heatpulse RTP System, up to 6"
- AG Associates 610 RTP System, up to 6"
- AG Associates 4100S Heatpulse RTP System, 6"
- AG Associates 8108 Heatpulse RTP System, 8"
- AG Associates 8800 Heatpulse RTP System, 8"
- AST SHS 200 RTP System
- Mattson AST 2800 RTP System, 6"
- Mattson AST 2800 RTP System, 8"
- Mattson AST-2800 Spares - please ask for list !
- Mattson AST SHS-2900 RTP System, 8"
- Mattson AST SHS-3000 RTP System, 8"
- Mattson AST SHS-3000 RTP System, 12"
- Mattson Helios RTP System, 12"
- MTP RTP-600XP Rapid Thermal Process System, Benchtop
Resist Processing
- CFM Technologies CFM8050 Full Flow Photo Resist Processing
Wafer Bonder
- EVG EV501 Wafer Bonder, up to 6"
- EVG 520 Wafer Bonder, up to 6"
- EVG 520IS UV-NIL Bonder, 8"
- EVG 520IS Wafer Bonder, up to 8"
- EVG 850DB Wafer Debonding System, 8"
- EVG 850DB/200 Wafer Debonding System, 6"
- EVG 850TB Wafer Bonding System, 8"
- EVG 850DB/200 Wafer Bonding System, 6"
- EVG Gemini Automated Wafer Bonder, 8"
- EVG Smartview Bond Aligner, 6" to 12"
- Karl Suss ABC200 Wafer to Wafer Bonder
- Karl Suss CBC200 Automated Wafer Bonding Cluster System
- Karl Suss SB8e Substrate Bonder, up to 8"
- Logitech 3000 Wafer Bonder, up to 6"
- Logitech 1WBT2 Wafer Substrate Bonder - parts machine
Wafer Cleaning
- Disco DCS-140 Wafer Washer
- Disco DCS-141 Wafer Washer
- DNS AS-2000 CMP Scrubber
- DNS SC-W60A spares - please ask !
- DNS SS-W60A-AR Scrubber, 6"
- DNS SS-60A-AR Double Side Scrubber, 6"
- DNS SSW-80B-AR Scrubber, 8"
- DNS SSW-80A Scrubber, 8"
- DNS SS-W80A-AR Scrubber, 8"
- DNS SS-W80B-AR Scrubber, 8"
- DNS SS-3000-A Wafer Scrubber, 12"
- DNS SS-3000-AR Wafer Scrubber, 12"
- DNS SU-3000 Single Wafer Cleaner, 12"
- DNS Aquaspin SU-3100 Single Wafer Cleaner, 12"
- DNS WS-820L Wafer Cleaning Track
- Ebara EPO-222 ILD CMP System, 8"
- Ebara FREX300-S CMP System, 12"
- MEG 8BC Spin Cup Cleaning System, up to 12"
- MEG SS Spin Scrubber Cleaning System, 4" to 8"
- OnTrack DSS-200 Series I Wafer Brush Cleaning System, 8"
- OnTrack DSS-200 Series II Wafer Brush Cleaning System, 8"
- OnTrack DSS-2200 Synergy Wafer Brush Cleaning System, 8"
- Peter Wolters PM300 CMP System, 12"
- Rena SC1 / SC2 Wafer Cleaning System, 6" to 12"
- Semitool Magnum HF Cleaner, 8"
- Semitool WST308 Solvent Spray Processor, 8"
- Semitool 270 Spin Rinse Dryer (SRD), 4" to 6"
- Semitool 270D Dual Stack Spin Rinse Dryer (SRD), 6"
- Semitool 270S Spin Rinse Dryer (SRD), up to 6"
- Semitool 280S Spin Rinse Dryer (SRD), up to 8"
- Semitool 840 Dual Stack SRD, 4"
- Semitool 860 Dual Stack Spin Rinse Dryer (SRD), up to 5"
- Semitool 870S Spin Rinse Dryer (SRD), dual stack, up to 6"
- Semitool 880S Dual Spin Rinse Dryer (SRD), up to 8"
- Semitool ST-870 Spin Rinse Dryer (SRD), up to 6"
- Semitool 2700 Dual Stack SRD, 4" to 6"
- Semitool 4300S Single Stack SRD, up to 8"
- Semitool ST-8300 Dual Spin Rinse Dryer (SRD), up to 8"
- Semitool 8300S Dual Spin Rinse Dryer (SRD), up to 8"
- Semitool Rotors - please ask !
- SEZ DaVinci DV-38 Wafer Cleaner, 12"
- SSEC 3302 Trilennium Double Sided Cleaner, 8" / 12"
- SVG 8600 Wafer Scrubber, 6"
- TEL Mk 11 Clean Track, 6"
- Ultra-t Equipment SCS 112 Wafer Cleaner, up to 8"
- Ultra-t Equipment SCS 124 Wafer Cleaner, up to 8"
- Verteq 1800-6AL Dual Stack Spin Rinse Dryer, 8"
- Verteq 1800-6AR Spin Rinse Dryer, 8"
- Verteq RD 4500 Classic Spin Rinse Dryer, 4"
- Verteq ST800-41L Megasonic Wafer Cleaner, up to 8"
- Verteq Rotors - please ask !
- Yieldup Omega 6200 Wafer Cleaning System, 8"
Wafer Coater / Developer
- Brewer Science CEE 100CB Coat Bake Track
- Brewer Science CEE 200 FX Resist Developer, 12"
- Brewer Science 300XD Resist Developer, 12"
- Brewer Science CEE 4000 Photoresist Coater (bench top unit)
- C & D Semi Dual Coater Track
- C & D Semi Dual Developer Track
- DNS SC-W60A-AVFG SOG Coater, 6"
- DNS SC-W60A 2C Coater, 6"
- DNS SDW-60-AVP Developer, 6"
- DNS SDW-60A-AV Developer, 6"
- DNS 80A Developer, 6"
- DNS 80A Scrubber
- DNS RF3 Coat / Develop Track
- DNS SK-W80A-BVPE Track, 1C / 2D, 8"
- DNS SK-W80B-AVPE Track, 1C / 2D, 8"
- DNS SK-200W Coater / Developer, 8"
- DNS SK-2000 Coater / Developer
- EVG 101 Spray Coater
- LAURELL WS-650Sz Manual Spin Coater
- Sokudo RF-300A Coater / Developer Track, 12"
- Solitec Coat Bake Track, 2" / 3"
- STEAG Microtech Coater/Developer Cluster 421
- SVG 88 Coater / Developer Track System, 6"
- SVG 88 Dual Track Coater, 6"
- SVG 8800 Dual Track Coater / Developer System
- SVG 8826 Dual Track Coater / Developer System, up to 6"
- SVS MSX 1000 Coater / Developer, 2"
- TEL Mk 7 2C / 2D Track, 8"
- TEL Mk 8 1C / 1D Track, 8"
- TEL Mk 8 2C / 2D Track, 8"
- TEL Act 8 2C / 3D Track, 6"
- TEL Act 8 2C / 2D Track, 8"
- TEL Act 8 2C / 2D Track, 8"
- TEL Act 8 Track, 2 Coat / 2 Develop, dual block, 8"
- TEL Act 8 Track, 3 Coat / 3 Develop, dual block, 8"
- TEL Act 8 Track, 3 Coat / 4 Develop, dual block, 8"
- TEL Act 8 Track, 4 Coat / 3 Develop, dual block, 8"
- TEL Act 8 Track, 4 Coat / 4 Develop, dual block, 8"
- TEL Act 8 Single Block Track, 8"
- TEL Act 12 2C / 4D Track, setup for 8"
- TEL Lithius Coater Developer, 8"
- TEL Lithius ArF Photoresist Coater / Developer, 12"
- TEL Lithius KrF Photoresist Coater, 12"
- TEL Lithius i-Line Coater Developer Track, 12"
Wafer Grinder / Polisher
- Accretech PG200RM Backside Grinder
- Accretech PG300RM Backside Grinder, 8" / 12"
- Buehler Ecomet-3 Automatic Grinder
- Buehler MPC-3000 Precision Parallel Grinder
- Daitron WBM-2100 Wafer Edge Grinder, 8"
- DISCO DAG-810 Automatic Surface Grinder, 8"
- DISCO DFG 82IF/8 Grinder
- DISCO DFG-840 Backside Grinder, 8"
- DISCO DFG-840HS Backside Grinder, 8"
- DISCO DFG-841 Backside Grinder, 8"
- DISCO DFG-850 Backside Grinder, 8"
- DISCO DFP-8140 Polisher, 8"
- DISCO DFP-8160 Polisher, 12"
- DISCO DFG-8540 Backside Grinder, 8"
- DISCO DFG-8560 Backside Grinder, 8" and 12"
- DISCO DFG-8560 Backside Grinder, 12"
- DISCO DGP-8761 Grinder/Polisher for 6" LED wafers
- DISCO DGP-8761 Polish Grinder, 12"
- KOYO DXSG 320 Double Side Grinder, 8" and 12"
- Okamoto GDM300 Wafer Grinder / Polisher, 12"
- Okamoto GNX200 Backside Wafer Grinder, 8"
- Okamoto GNX300 Backside Wafer Grinder, 12"
- Okamoto GNX300P Backside Wafer Grinder, 8" and 12"
- Okamoto VG502 Mk II Backside Wafer Grinder, 8"
- Shibayama VG502 Mk II Backside Wafer Grinder, 8"
- Strasbaugh 7AA Grinder
Wafer Handling
- Brooks Automation Ergospeed II Wafer Handling, 8"
- Brooks Automation Ergospeed 3800 SMIF Wafer Handling, 8"
- Brooks Automation Fixload 6 Loadport, 12"
- Brooks Automation Fixload 25 Loadport, 12"
- Mactronix AWi-600 Automatic Wafer Sorter
- Mactronix Eureka UKA-650 Wafer Transfer System, 6"
- Mactronix Eureka UKA-825 Wafer Transfer System, 8"
- Recif Technologies ESR300F53 Wafer Sorter, 12"
- Recif Technologies SIS300F53 Wafer Sorter, 12"
Wafer Inspection / Measurement
- 4 Dimensions Automated 4-Point Probe, up to 8"
- Accretech Win-Win 50 A5000 Brightfield Inspection System, 12"
- Accretech Win-Win 50-1600 Brightfield Inspection System, 8" + 12"
- ADE AFS-3220 Wafer Characterization, 12"
- AMAT Compass Pro Wafer Inspection, 8"
- AMAT Compass Pro Wafer Inspection, 12"
- AMAT ComPLUS Wafer Inspection, 12"
- AMAT ComPLUS EV Wafer Inspection, 8"
- AMAT ComPLUS MP Wafer Inspection, 8"
- AMAT ComPLUS MP Wafer Inspection, 12"
- AMAT ComPLUS 2T Darkfield Wafer Inspection, 8"
- AMAT ComPLUS 3T Darkfield Wafer Inspection, 8"
- AMAT Excite IPM 832 Particle Detection, 8" to 12"
- AMAT Orbot WF-736 Wafer Inspection System, 8"
- AMAT UVision 4 Wafer Inspection System, 12"
- Datacon 8000is 3D Wafer Inspection System, up to 12"
- Hermes Inspection HMI eScan 320 eBeam Inspection System, 12"
- Hitachi LS-6700 Dark Field Inspection, 12"
- Irvine Optical UL208 Wafer Mapper, 8"
- Irvine Optical Ultrastation 3.E Wafer Inspection System, 8"
- KLA Tencor 2122 Wafer Inspection System incl. SAT, 6"
- KLA Tencor 2122 Spares - please ask for list !
- KLA Tencor 2131 Wafer Inspection System, 8"
- KLA Tencor 2138 Wafer Defect Inspection, 8"
- KLA Tencor 2139 Wafer Defect Inspection, 8"
- KLA-Tencor 2360 Wafer Inspection System, 8"
- KLA-Tencor 2370 Wafer Inspection System, 8"
- KLA-Tencor 2371 Wafer Inspection System, 8"
- KLA-Tencor 2552 Wafer Inspection System, 8"
- KLA-Tencor 2608 Wafer Inspection System, 8"
- KLA-Tencor 2915 Brightfield Wafer Inspection System, 12"
- KLA Tencor 4500 Surfscan Wafer Inspection System
- KLA Tencor 5100 XP Surfscan Wafer Inspection, 8"
- KLA Tencor 5500 Surfscan Wafer Inspection, 8"
- KLA Tencor 6200 Surfscan Wafer Inspection, 8"
- KLA Tencor 6220 Surfscan Unpatterned Wafer Inspection, 8"
- KLA Tencor 6420 Surfscan Spares - please ask for list !
- KLA Tencor 8100 CD-SEM Measurement System, 8"
- KLA Tencor 8100 XP CD-SEM Measurement System, 8"
- KLA Tencor AIT I Surfscan Wafer Inspection, 8"
- KLA Tencor AIT II Surfscan Wafer Inspection, 8"
- KLA Tencor AIT II Surfscan Wafer Inspection, 8" / 12"
- KLA-Tencor AIT II XP Darkfield Defect Inspection System, 12", SMIF
- KLA Tencor AIT XUV Darkfield Inspection, 12"
- KLA Tencor AlphaStep 200 Profilometer, 5"
- KLA Tencor AlphaStep IQ Profilometer, 6" to 8"
- KLA Tencor Candela CS20R Dual Wafer Inspection System, 6"
- KLA Tencor HRP-220 Profiler, 8"
- KLA Tencor HRP-320 Profiler, up to 12"
- KLA Tencor HRP-420S Profiler, 8"
- KLA Tencor INS-3300 Defect Review System, 12"
- KLA Tencor OmniMap RS75 Resistivity Measurement, 8"
- KLA Tencor P-2 Long Scan Profiler
- KLA Tencor P-11 Profiler, 8"
- KLA-Tencor RS-35C Resistivity Measurement
- KLA Tencor SFS 6200 Wafer Inspection System, 6"
- KLA Tencor SFS 6400 Wafer Inspection System, 6"
- KLA Tencor SFS 7200 Wafer Inspection System, 8"
- KLA Tencor SFS 7600 Wafer Inspection System, 8"
- KLA Tencor SFS 7700 Wafer Inspection System, 4" to 8"
- KLA Tencor SFX 1000 HT Thin Film Metrology System, 12"
- KLA Tencor SP1 Classic Wafer Inspection System, 8"
- KLA Tencor SP1 DLS Wafer Inspection System, 12"
- KLA Tencor SP1 TBI Wafer Inspection System, 8"
- KLA Tencor SP1 TBI Wafer Inspection System, 12"
- KLA Tencor SP2 Wafer Inspection System, 12"
- KLA-Tencor SMIF Wafer Handler Module for Surfscan SP1 with PRI ATM-407 Robot & ESC-200 Controller
- KLA Tencor UV-1050 Thin Film Measurement System, 8"
- KLA Tencor UV-1280SE Thin Film Measurement System, 8"
- KLA-Tencor Viper 2401 Macro Defect Inspection, 8"
- N&K Analyzer 3000 for Thick Resist Measurement, 6"
- Nanometrics 8000X Auto Film Thickness Mapping, 8"
- Nanometrics 8000XSE Thin Film Measurement, 8", cassette to cassette
- Negevtech 302 High Resolution Wafer Inspection System, 12"
- Nikon Optistation 2A Automated Inspection, 4” to 6"
- Nikon Optistation VII Automated Inspection, 12"
- OSI 2100 Overlay and CD Measurement System, up to 6"
- Prometrix FT-650 Film Thickness Mapping System, up to 8"
- Prometrix OmniMap NC-110 Non-Contact Resistivity Measurement, 2" to 8"
- Prometrix RS-55 Resistivity Measurement, 2" to 8"
- Prometrix Spectramap SM300 Film Thickness Mapping System, 8"
- Rudolph / August 3Di-8500 Inspection Station, 12"
- SDi FAaST-230m Wafer Characterization System, 8"
- SemiTest Epimet 2 Thin Film Epi Measurement, 8"
- Veeco FPP-1000 4-Point Probe, up to 4"
- Veeco FPP-5000 4-Point Probe, up to 6"
- Vistec LDS 3000 M Wafer Inspection System, 4", 8", 12"
- Vistec LDS 3300 M Wafer Inspection System, 4", 8", 12"
- Zeiss Axiosprint Wafer Inspection System, 8"
- Zygo 15" Phase Measuring Interferometer (PMI)
- Zygo GPI-XP 6" Interferometer
- Zygo GPI-LC 6" Interferometer
- Zygo Mark-II Interferometer
- Zygo Mark-series Interferometer upgraded to phase with Zygo Phase Upgrade
Wafer Mask Alignment
- Canon MPA 600 FA Mask Aligner, 6"
- Canon MPA 600 Super Mask Aligner, 6"
- Canon PLA 501 F Mask Aligner
- Canon PLA 600 F Mask Aligner, 3" to 6"
- EVG 620 Mask Aligner, 6"
- Karl Suss MJB21 Mask Aligner, double sided
- Karl Suss MJB3 Mask Aligner, 3"
- Karl Suss MJB3 Mask Aligner w/ backside alignment, 3"
- Karl Suss MA25 Mask Aligner
- Karl Suss MA25 Mask Aligner, double sided, 5"
- Karl Suss MA4 Mask Aligner, 4"
- Karl Suss MA45 Mask Aligner, 4"
- Karl Suss MA56 Mask Aligner, 4"
- Karl Suss MA56 Mask Aligner, 5"
- Karl Suss MA6 Mask Aligner, 6"
- Karl Suss MA6 Mask Aligner, 6", top and backside alignment
- Karl Suss MA150 Mask Aligner, 6"
- Karl Suss MA8 Mask Aligner, 8"
- Karl Suss MA8 / BA8 Mask Aligner, 8"
- Karl Suss MA200 Mask Aligner, up to 8"
- Karl Suss MA200cc Mask Aligner, up to 8"
- Karl Suss MA200e Mask Aligner, 8"
- Midas MDA 400LJ Mask Aligner, 4"
- Neutronix Quintel 7000 Mask Aligner, up to 8"
- OAI Hybralign 200 Mask Aligner, 8"
- Oriel / Newport Mask Aligner, up to 8"
- Quintel Q4000 Mask Aligner
- Quintel 7000 Mask Aligner, 12"
Wafer Mask Cleaning
- Accord 400 Substrate Cleaner
- K&S 971 MicroWash Mask Cleaner, up to 10" diagonal substrates
- K&S 973 MicroWash Mask Cleaner, up to 10" diagonal substrates
- SSEC Model 3300 ML Trillenium Photomask Cleaner
- Ultratech / Semi Sys 2066 Mask Cleaner, up to 8" wafer
- Ultratech 602 Mask Cleaner, up to 6" wafer size
- Ultratech 608 Mask Cleaner, up to 12" wafer size
- Ultra t Equipment PSC122M Mask Cleaner, up to 10" x 10" substrates
- Ultra t Equipment SCS-124 Substrate Cleaner w/o high pressure pump option
- Ultra t Equipment SWC111 Mask Cleaner, up to 9 x 9" masks
Wafer Mask Inspection
- Carl Zeiss AIMS 193 Mask Inspection System
- KLA Tencor StarLight SL3 URSA Mask Inspection System
Wafer Polisher
- AMAT Mirra 3400 CMP System, 8"
- AMAT Mirra Mesa CMP System, 8"
- AMAT Mirra Ontrak CMP System, 8"
- AMAT Reflexion CMP System, 12"
- AMAT Reflexion LK Prime Oxide CMP System, 12"
- AMAT Reflexion LK-Cu CMP System, 12"
- Disco DFP-8140 Wafer Polisher, 8"
- Disco DFP-8160 Wafer Polisher, 12"
- IPEC Avanti 472 CMP System, 8"
- Strasbaugh 6DS-SP/6 CMP Wafer Polisher
- Strasbaugh 6EG CMP Wafer Polisher, 12"
Wafer Stepper
- ASML /300 Wafer Stepper, 6"
- ASML AT1100 DUV Scanner, 193 nm, 12"
- ASML PAS-5500/60 Stepper, 6"
- ASML PAS-5500/100C Stepper, 8"
- ASML PAS-5500/100D Stepper, 8"
- ASML PAS-5500/200C Scanner, 8"
- ASML PAS-5500/250C Scanner, 8"
- ASML PAS-5500/275C Stepper, 8"
- ASML PAS-5500/300C Scanner, 8"
- ASML PAS-5500/350C Scanner, 8"
- ASML PAS-5500/400C, 8"
- ASML PAS-5500/750E Lithography System, 8"
- ASML PAS-5500/1100B 193nm ArF Scanner, 8"
- ASML TwinScan AT1200C Scanner, 12"
- ASML TwinScan XT1250B Scanner, 12"
- ASML TwinScan XT 1400F ArF Scanner, 12" -
- ASML TwinScan XT:1700i Scanner
- Canon FPA-1500 Mk4-W Stepper, 6", reticle 5"
- Canon FPA-1550 Mk4-W g-line Stepper, 6", reticle 5"
- Canon FPA-2500 i2 Stepper, 8", reticle 6"
- Canon Prealigner Unit for FPA-2500 i3 Stepper, 6"
- Canon FPA-2500 i3 Stepper, 6", reticle 5"
- Canon FPA-2500 i3 Wafer Stepper, 8", reticle 6"
- Canon FPA-3000 EX4 Wafer Stepper, 8"
- Canon FPA-3000 EX4 Wafer Stepper, 8" - parts machine
- Canon FPA-3000 EX5 Wafer Stepper, 8"
- Canon FPA-3000 EX6 Wafer Stepper, 8"
- Canon FPA-3000 i4 Wafer Stepper, 8", reticle 6"
- Canon FPA-3000 i5+ Wafer Stepper, 8", reticle 6"
- Canon FPA-3000 iW Wafer Stepper, 8", reticle 6"
- Canon FPA-3000 iW Wafer Stepper, 8" - parts machine
- Canon FPA-5000 ES3 Wafer Stepper, 8", reticle 6"
- Canon FPA-5500 iZa Wafer Stepper, 12"
- Nikon FX601 Stepper
- Nikon NSR-1505G6E Stepper, 5"
- Nikon NSR-1505G7E Stepper, 5"
- Nikon NSR-1755G7A Stepper, 6"
- Nikon NSR-1755i7A Stepper
- Nikon NSR-1755i7B Stepper
- Nikon NSR-2005 i8A i-Line Wafer Stepper, 6"
- Nikon NSR-2005 i9C i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2005 i10C i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2005i10D Stepper
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 EX12B Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 EX14C Wafer Stepper, 8"
- Nikon NSR-2205 i14E Wafer Stepper, 8"
- Nikon NSR-2205 i14E2 Wafer Stepper, 8"
- Nikon NSR-4425i i-Line Wide-Field Stepper, 8"
- Nikon NSR-SF100 Wafer Stepper, 8"
- Nikon NSR-S202A Wafer Stepper, 8"
- Nikon NSR-S203B Wafer Stepper, 8"
- Nikon NSR-S204B Wafer Stepper, 8"
- Nikon NSR-S204D Wafer Stepper, 8"
- Nikon NSR-S205C Wafer Stepper, 8" to 12"
- Nikon NSR-S206D Scanner, 12"
- Nikon NSR-S306C 193 nm DUV Scanner
- Nikon NSR-S307E ArF Scanner, 8", reticle 6"
- Nikon NSR-S609B Scanner, 12"
- Nikon NSR-S610C Scanner, 12"
- Ultratech 1500 Wafer Stepper, 6"
- Ultratech 1500 MVS Wafer Stepper, 3" to 6"
- Ultratech 6700 Saturn Stepper, 5" to 8"
- Ultratech Saturn 3 Spectrum Stepper, 8"
Wet Process
- Amerimade Decap 5ft Wet Bench
- Entegris / Fluoroware HTC 8010 Cassette/Box Washer
- Entegris / Fluoroware HTC 8020 Cassette/Box Washer
- IVY Semiconductor Automated Wet Bench
- JST Ultrasonic Solvent Wet Bench KOH
- JST Ultrasonic Solvent Wet Bench KOH
- Karl Suss M6000L Lift Off System, 4"
- Leatherwood Plastic 6ft HF Polypro Wet Bench
- Schmid Model 59 Silver Plating System
- Semitool Alpha CP04MNSPD0801 Wet Processing System
- Semitool 1-Chamber Spray Acid Tool (SAT), 8"
- Semitool LT-210C Cu Plating System, 6"
- Semitool Mini Raider RM02MNSPD0802 Wet Processing System
- Semitool Raider ECD Au Plating System, 6"
- Semitool Raider-M Lift-Off System, 8"
- Semitool Scepter Spray Acid Tool (SAT), 8"
- Semitool Storm II Box & Cassette Washing System, 8"
- Semitool Storm III Box & Cassette Washing System, 6" to 8"
- Steag AWP 200 Wet Bench
- TEL NS300 Surface Preparation System, 12"
- Verteq ST600 Megasonic System