| For Sale - Frontend |
| Asher |
| - Alcan Tech / Canon MAS-8000 Microwave Asher |
| - Anatech MP 600 Quartz Barrel Etcher |
| - Axcelis Fusion 200 PCU System, 8" |
| - Axcelis Fusion M200 MCU Metal Asher, 8" |
| - Axcelis Fusion M200 PCU System, up to 8" |
| - Axcelis Fusion M200 PCU Polo System - parts machine |
| - Axcelis Integra Dry Stripper, 12" |
| - Axcelis RadiantStrip 320 Stripper/Asher, 12" |
| - AXIC HF-8 Plasma System |
| - Branson IPC 2000T Barrel Asher |
| - Branson IPC P 2000 Barrel Asher |
| - Branson IPC L3100 Asher |
| - Branson IPC 4155/2 Plasma Etcher |
| - Branson IPC 7102 Plasma Etcher |
| - Branson 91391 Quartz Barrel Plasma Etcher |
| - Canon MAS-8000 Plasma Asher, up to 8" |
| - Canon MAS-8220 Plasma Asher, up to 8" |
| - GaSonics Aura 2000 LL spares - please ask for list ! |
| - GaSonics L3510 Asher, 4" to 8" |
| -GLOW Plasma Cleaning System |
| - Mattson Aspen III Lite Etcher, 12" |
| - PSK Supra Vm Photoresist Stripper, 2 chambers, 12" |
| - PSK TERA21 Photoresist Stripper, 12" |
| - Technics PE II Plasma Etcher |
| - Tegal 901E Plasma Asher, up to 6" |
| - Tegal 903E Plasma Asher, up to 6" |
| - Tegal 903E Plasma Asher, 6", TTW version |
| - Tegal 915 Barrel Resist Stripper |
| - Tegal 965 Plasma Asher, up to 6" |
| - Tepla Auto 300 Asher, 4" to 6", 2.45 GHz, 1000 Watts |
| - ULVAC Phoenix Asher, 6" |
| - Unaxis-Nextral NE860 High Density Plasma Etcher, 8" |
| Chiller |
| - Edwards TCU 40/80 plus Chiller |
| - Lauda Proline Integral XT 150 Process Thermostat |
| - Neslab HX-75 Recirculating Chiller |
| - Neslab HX-150 Chiller |
| - Neslab HCX-300 Air-cooled Chiller |
| - TEL D204 Chiller |
| - TEL D214 Chiller |
| - TEL D250 Chiller |
| - Temptronic TPO3000A Chiller |
| - Temptronic TPO3200A Chiller |
| CVD / PVD Systems |
| - Aixtron 2400 G3 MOCVD System |
| - Aixtron 2600 G3 MOCVD System |
| - Aixtron AIX 2800 G3 MOCVD System |
| - Aixtron AIX 2800 G4 HT MOCVD System, 2" x 42 |
| - Aixtron VP2400HW MOCVD System, 6 x 4" wafers |
| - AMAT AKT 1600 PECVD system, wafer size 370 x 470 mm |
| - AMAT Centura ACL, 4 chambers APF, 8" |
| - AMAT Centura AP Etch, 12", 4 chambers |
| - AMAT Centura AP Enabler, 4 chambers, 12" |
| - AMAT Centura AP Chambers, 12" |
| - AMAT Centura DPS Metal, 4 chambers, 8" |
| - AMAT Centura DPS Metal Super-E, 8" |
| - AMAT Centura DPS Metal E-Max, 8" |
| - AMAT Centura DPS Metal E-Max CT+, 12" |
| - AMAT Centura eMax CT+ Oxide Etcher, 12" |
| - AMAT Centura EPI System w/ Siconi, 12" |
| - AMAT Centura HDP CVD, 8" |
| - AMAT Centura RTP XE, 8" |
| - AMAT Centura Super-E System, 8" |
| - AMAT Centura 5200 CxZ, SACVD, 8" |
| - AMAT Centura 5200 Enabler, 3 ea. E2 chambers, 12" |
| - AMAT Centura 5300 HDP Oxide Etch, 8" |
| - AMAT Centura II Al CVD chamber, 12" |
| - AMAT CenturaI AP HART Etch, 12" |
| - AMAT Centura II DPS+ Metal, 8" |
| - AMAT Centura II IMP Ti chamber, 12", 2 ea. |
| - AMAT Centura Ultima HDP CVD, 8", 3 chambers |
| - AMAT Centura Ultima Plus CVD, 6", 2 chambers |
| - AMAT Centura Ultima TE HDP CVD. 8" |
| - AMAT Centura Ultima X, HDP CVD. 3 chambers, 12" |
| - AMAT Centura WXZ CVD System, 3 chambers, 8" |
| - AMAT Endura RF Sputter Chamber, 8" |
| - AMAT Endura TXZ Chamber, 8" |
| - AMAT Endura II PVD System, 12" |
| - AMAT Endura II CVD Al Chamber, 12" |
| - AMAT Endura II ALPS Chamber, 12" |
| - AMAT Endura II SiCoNi Chamber, 12" |
| - AMAT Endura II RF Ti Chamber, 12" |
| - AMAT Endura II eSIPChamber, 12" |
| - AMAT Endura II Pre Clean Chamber, 12" |
| - AMAT Endura P5000 Mxp+ Oxide Etcher, 2 chambers, 8" |
| - AMAT Endura P5000 CVD, 4 chambers, 6" |
| - AMAT Endura P5000 Mxp Etcher, 3 chambers, 8" ESC |
| - AMAT Endura P5000 CVD Chamber, 6" |
| - AMAT Endura P5000 Loadlock Chamber, 6" |
| - AMAT Endura P5000 Mk II Chamber, 8" |
| - AMAT Endura P5000 Mk II Metal MXP, 6" |
| - AMAT Endura P5000 Mk II Etch, 6" clamp |
| - AMAT Endura P5000 Mk II CVD, 4 chambers, 8" |
| - AMAT Endura P5000 Mk II TEOS Dep. Etch Back, 8" |
| - AMAT Endura P5000 Mk II Tungsten Sputter, 2 chambers, 8" |
| - AMAT Endura 5500, 6" |
| - AMAT Endura Re-Flow Chamber, 12" |
| - AMAT IPS chamber set (Oxide Etch) |
| - AMAT OPUS Metal Etcher, 2 chambers, 12" |
| - AMAT P5000 Metal Etcher, 8" |
| - AMAT P5000 MxP+, Metal, 2 chambers, 6" |
| - AMAT P5000 MxP+, Poly, 3 chambers, 8" |
| - AMAT P5000 PE Oxide, 2 DxZ chambers, 6" |
| - AMAT P5000 PECVD, 8" |
| - AMAT P5000 RIE / PECVD, 2 Chambers, 6" |
| - AMAT P5000 Mk II, 3 Chambers TEOS CVD, 8" |
| - AMAT Producer, Shrink, 8" |
| - AMAT Producer GT, 12" |
| - AMAT Producer SE, 12" |
| - AMAT Producer SE Low K CVD, 12" |
| - AMAT TxZ Chamber |
| - ASM A412 Vertical Atmospheric Furnace, 12" |
| - ASM A412 Vertical Diffusion Furnace, 8" |
| - ASM A412 Vertical Diffusion Furnace, 12" |
| - ASM A412 Vertical LPCVD Furnace, 12" |
| - ASM A412 Vertical LPCVD Furnace, 12", SiN & TEOS |
| - ASM E3200 EPI Deposition System, 12" |
| - ASM Eagle 10 Trident Plasma PECVD System |
| - Canon Anelva C-5100GT PVD Gate Metal Deposition System, 12" |
| - Canon Anelva C-7100GT PVD Gate Metal Deposition System, 12" |
| - Centrotherm DO 7.500-650-CANtrol High Temperature, Continuous-Flow-Furnace |
| - Kokusai DJ-825V-8V Poly Furnace, 8" |
| - Kokusai DJ-823V-8BL3 LPCVD, 8" |
| - Kokusai DJ-833V LP-CVD, 8" |
| - Kokusai DJ-833V H2 Anneal, 8" |
| - Kokusai DJ-853V LPCVD Furnace, 8" |
| - Kokusai DJ-853V Furnace, 8" - parts machine |
| - MRC Eclipse Mark II PVD System, 6" |
| - MRC Eclipse Mark II PVD System, 8" |
| - MRC Eclipse Star PVD System, 6" |
| - Novellus Concept-1 TEOS System, 8" |
| - Novellus Concept-2 Sequel Express, 8" |
| - Novellus Concept-2 Dual Speed Sequel, 8" |
| - Novellus Concept-2 Altus DirectFill, 8" |
| - Novellus Concept-2 Dual Altus Standard CVD, 8" |
| - Novellus Concept-2 Dual Sequel Express ILDS, 8" |
| - Novellus Concept-2 Speed CVD, 8" |
| - Novellus Concept-2 Sequel Chamber |
| - Novellus Concept-3 Speed MAX, 2 chambers, 12" |
| - Novellus Concept-3 Speed NExT, 12" |
| - Novellus Concept-3 Speed Chamber |
| - Novellus Concept-3 Speed MAX HDP CVD, 2 chambers, 12" |
| - Novellus Inova PVD Sputter, 6 chambers, 12" |
| - Novellus PEP Irida Asher, 6" |
| - Novellus Sabre xT Copper Deposition System, 8” |
| - Oxford Plasmalab 80 Plus PECVD System, up to 8" |
| - Oxford Plasmalab 100 PECVD System, 6" to 8" |
| - Oxford Plasmalab 100 PECVD TEOS System, up to 8" |
| - Picosun Sunale R-200 Advanced ALD Reactor, 200mm |
| - Plasmatherm 790 PECVD System, up to 8" |
| - Riber Epineat III-V MBE System |
| - SINGULUS SINGULAR High Volume PECVD System |
| - SPTS CPX Deep Silicon Etch (DSIE) and XeF2 Etcher |
| - SPTS Multiplex ASE-HRM ICP PRO Etcher, 8" |
| - SPTS Sigma FXP Cluster PVD System |
| - TEL Indy A HTOX, 12" |
| - TEL Tactras Plasma Etch System, 4 chambers,12" |
| - TEL Unity M Trench Etch System, 8" |
| - Thomas Swan MOCVD Reactor, 19 x 2" |
| - Thomas Swan MOCVD Reactor, 31 x 2" |
| - Thomas Swan MOCVD GaN Reactor, 6 x 2" |
| - Tystar Mini Tytan 8300 Horizontal Furnace, 6" to 8" |
| - Ulvac Ceraus ZX-1000 PVD System, 8" |
| - Veeco E300 GaNZilla MOCVD System |
| - Veeco Gen 930 MBE System |
| - Veeco K465 GaN MOCVD System |
| - Veeco K465i TurboDisc GaN MOCVD System |
| - Veeco K475 GaN MOCVD System |
| - Watkins-Johnson WJ999 R3.5 CVD System, 8" |
| - Watkins-Johnson WJ-999 TEOS System, 8" |
| - Watkins-Johnson WJ-1500 APCVD TEOS System, 8" |
| Etcher |
| - Akrion UP V2 MP.2000 CU Clean Sink, 8" |
| - Alcatel AMS 200IP DRIE System |
| - Apprecia Technologies Cenote Metal Wet Etching System, 8" |
| - DNS FC-3100 Wet Station, 12" |
| - DNS WS-820L Wet Etching System, 8" |
| - FSI Mercury MP Spray Processor, 8" |
| - FSI Scorpio Resist Develop System, 8" |
| - FSI Zeta 300 Spray Cleaning System, 12" |
| - Innomax ESE 2013 Wet Process Spray System, single wafer |
| - LAM Alliance 9400 DFM Etch System w/ 2 chambers, 8" |
| - LAM Alliance Poly Etch Chamber, 6" |
| - LAM Autoetch 590 Etcher, 6" |
| - LAM 490 Polyimide Plasma Etcher |
| - LAM 2300 Kiyo EX Chamber, 12" |
| - LAM 2300 ELD, WCoP, Electroless Deposition, 12" |
| - LAM 2300 Exelan Etch Oxide, 4 chambers , 12" |
| - LAM 2300 Exelan Etch Oxide, 4 chambers , process CU, 12" |
| - LAM 2300 Stretch ATM + VTM, 12" |
| - LAM 4420 Poly Etcher, 8" |
| - LAM 4420 Rainbow Envision |
| - LAM 4420 Rainbow Poly Etcher, 8" |
| - LAM 4420XL Rainbow Poly Etcher, 8" |
| - LAM 4428 Poly Etcher, 8" |
| - LAM 4520 Rainbow Classic |
| - LAM 4520 Rainbow Oxide Etcher, 8" |
| - LAM 4520i Rainbow Oxide Etcher, 6" |
| - LAM 4520i Rainbow Oxide Etcher, 8" |
| - LAM 4520XL Etcher, 6" |
| - LAM 4520XLE Poly Etcher, 8" |
| - LAM DV-38DS Single Wet Etch, 12" |
| - LAM SOSU EXT3100 Bevel Etch , 12" |
| - LAM TCP 9400 PTX Etch System, 8" |
| - LAM TCP 9400 SE Etcher, 8" |
| - LAM TCP 9408 SE Etcher, 8" |
| - LAM TCP 9600 Etcher, 8" |
| - LAM TCP 9600 SE Etcher, 6" |
| - LAM TCP 9600 SE Metal Etcher, 8" |
| - LAM TCP 9608 SE Etcher, 8" |
| - LAM TCP 9608 SE Metal Etcher, 8" |
| - March Instruments AP-1000 Plasma Cleaner |
| - Oxford Plasmalab 80 Plus RIE System, up to 8" |
| - Oxford Plasmalab 100 ICP Etcher, up to 6" |
| - Oxford Plasmalab 100 ICP Etcher, 8" |
| - Oxford Plasmalab uEtch 300 RIE System |
| - Plasmatherm 790 RIE Etcher, up to 8" |
| - Samco RIE-10NR Reactive Ion Etching System, 8" |
| - Samco RIE-200L Dry Etching System, 8" |
| - Sankyo SWH80 Wet Oxide Etch Bench, 8" |
| - Semitool Scepter Spray Acid System, 8" |
| - Semitool SSTC-321-280 Spray Solvent Tool, 8" |
| - Semitool SSTF-281-280MBT Spray Solvent Tool, 8" |
| - SEZ DV-34BF Wafer Processor, 12" |
| - SEZ 101 Spin Etcher, up to 6" |
| - SEZ 201 Spin Etcher, 6" to 8" |
| - SEZ 203 Spin Etcher, 6" to 8" |
| - SEZ 223 Spin Etcher, 4" to 8" |
| - SEZ 304 Spin Etcher, 8" to 12" |
| - SEZ 305 Spin Etcher, 8" to 12" |
| - SEZ 323 Spin Etcher, 12" |
| - SEZ spares - please ask ! |
| - Shibaura CDE-8 Dry Etcher, 8" |
| - STS Multiplex ICP High Rate Inductively-Couple Plasma Etcher, up to 8" |
| - ULVAC TDE-300M Plasma Etcher, 8" |
| - Veeco RF-350S Ion-Beam Milling System, 6" |
| Evaporation and Sputtering Systems |
| - Balzers BAK-550 Evaporator System |
| - Balzers BAK-760 E-Beam Evaporator System |
| - Balzers LLS-801 Metal Sputter System |
| - Balzers LLS-802 Metal Sputter System |
| - Balzers LLS EVO Sputter System |
| - Canon Anelva I-1060 SV II Plus-1 Sputtering System, 5 chambers, 8" |
| - CHA Mark 40 E-Beam Evaporator |
| - CHA SE-1000 E-Beam Evaporator |
| - Cressington 208HR High Resolution Sputter Coater |
| - Denton Integrity 14 Vacuum System |
| - Edwards E306 Filament Evaporator |
| - Electrotech MS 6210 Sputtering System, 4" |
| - Emitech K675X Table-top Sputtering System |
| - EVG 150 Automated Coater / Developer, up to 8" |
| - HANIL VACUUM HVC-2050DA High Vacuum Box Coater |
| - ITO Roll to Roll Sputtering System, max. 1,400 mm film width |
| - Karl Suss ACS 200 Spin Coater, 8" |
| - Karl Suss Alpha R.12 Liquid Transfer Coating Tool |
| - Karl Suss Delta 12AQ Spin Coater / Developer, 8" / 12" |
| - Karl Suss Delta 12L Spin Coater / Developer, 8" / 12" |
| - Kurt Lesker Aluminum Evaporator, 8" |
| - Leybold APS 1104 Evaporation System |
| - Leybold APS 1504 Optical Coating System |
| - Leybold Pegasus Sputtering System |
| - Leybold ZV-6000 Sputtering System |
| - MRC 8867 Sputtering System |
| - MRC 942 Sputtering System |
| - Optorun OTFC-1100 Optical Coater |
| - Perkin Elmer 2400 Sputtering System |
| - Perkin Elmer 4410 RF / DC Sputtering System |
| - Temescal BJD-1800 Sputtering System |
| - Thermionics VE Series R&D E-Beam System |
| - UHV Magnetron Sputtering System |
| - ULVAC Ei - 5k e-Beam Evaporation System |
| - Ulvac Satella Thin Film Deposition System for OLED, 200 x 200 mm substrate size |
| - Ulvac SMD-450C Sputter |
| - Unaxis LLS EVO Sputtering System, 8" |
| - Veeco Spector Optical Coater |
| Furnaces |
| - ASM COE 139 Curing System |
| - Aviza AVP 8000 AP Vertical Furnace, 8" |
| - Aviza AVP 8000 LP LPCVD Furnace, 8" |
| - Aviza Celsior LPCVD Furnace, 12" |
| - Aviza Pantheon LPCVD Furnace, 12" |
| - Aviza Pantheon LPCVD Furnace, 3 ALD chambers,12" |
| - Aviza RVP 9000 Furnace, 8" |
| - Aviza VTR 7000 High Temperature Furnace, 8" |
| - BTU Bruce 7355 Horizontal Furnace, 8" |
| - Despatch CF-2710 Furnace |
| - Despatch DF-14414 / 10-NS Inline Diffusion Furnace |
| - First Nano ET3000 Horizontal Furnace, 2" to 5" |
| - First Nano ET6000 Horizontal Furnace |
| - GT Advanced Sapphire Furnace |
| - Kokusai DJ-803V Oxidation Furnace, 8" |
| - Kokusai DD-823V Furnace, 8" |
| - Kokusai DJ-825V Poly LPCVD, 6" |
| - Kokusai DJ-853 Furnace, 8" |
| - Kokusai DJ-853V-BL D-Poly, 8" |
| - Kokusai DJ-853V-BL Nitride, 8" |
| - Kokusai DJ-853V-BL SOG Curing, 8" |
| - Kokusai DJ-853V-BL TEOS, 8" |
| - Kokusai Quixace Vertical Furnace, ALD TiN, 12" |
| - Kokusai Quixace DD-1206V-DF Vertical Furnace, 12" |
| - Kokusai Quixace DD-1206VN-DF Vertical Furnace, 12" |
| - Kokusai Quixace DJ-1206VN-DM Vertical Furnace, 12" |
| - Kokusai Quixace Ultimate Vertical Furnace, 12" |
| - Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12" |
| - Kokusai Zestone III (DJ-1223V) Vertical Furnace, Poly, 12" |
| - Koyo Thermo System VF-5300B Polyimide Bake |
| - MRL Cyclone C430 Four-Tube Horizontal Furnace, 6" |
| - SST DAP 1100 Vacuum Furnace, 1000 deg C |
| - SST DAP 2200 Vacuum Furnace, 1000 deg C |
| - SST HVWB 2200 Vacuum Furnace, 1000 deg C |
| - SST MV 2200 Vacuum Furnace, 1000 deg C |
| - SVG VTR-7000 Oxide Vertical Furnace, 8" |
| - SVG AVP 8000 AP Vertical Furnace, 8" |
| - SVG AVP 8000 LP Vertical Furnace, 8" |
| - TEL Alpha 303i Furnace, LT SOD cure, 12" |
| - TEL Alpha 303i Furnace, P-Doped Poly, 12" |
| - TEL Alpha 8S Furnace, 8" |
| - TEL Alpha 8SE Furnace, 8" |
| - TEL Alpha 8SE-E Furnace 8", High Temp Oxide |
| - TEL Alpha 8SE Furnace, 8" |
| - TEL Indy+ Vertical Furnace, 12", ALD HfO2 |
| - TEL UL2604-10H Furnace |
| Implanter |
| - AMAT 9500 XR Ion Implanter, 8" |
| - AMAT Quantum X Plus High Current Ion Implanter, 12" |
| - AMAT xR-LEAP Low Energy Ion Implanter, 8" |
| - Axcelis/Eaton NV GSD HE High Energy Ion Implanter, 8" |
| - Axcelis Paradigma XE Ion Implanter, 12" |
| - Axcelis Purion H High Current Ion Implanter, 12" |
| - Eaton Nova NV 10-160 Ion Implanter, 5" |
| - Nissin Exceed 2300 Ion Implanter, 12" |
| - SEN LEX3 Low Energy High Current Ion Implanter |
| - Varian 160XP High Current Ion Implanter, 6" |
| - Varian E500 EHPi Medium Current Ion Implanter, 8" |
| - Varian E500 HP Ion Implanter, 6" |
| - Varian E500 HP Ion Implanter, 8" |
| - Varian E1000 Implanter, 8" |
| - Varian VIISion 80 Ion Implanter, 8" |
| - Varian VIISta 80 Classic High Current Ion Implanter, 8" |
| - Varian VIISta 80 HP Ion Implanter, 8" |
| - Varian VIISta 810 Medium Current Ion Implanter, 8" |
| - Varian VIISta 810 XEr Medium Current Ion Implanter, 12" |
| Laser |
| - Chicago Laser CLS37 Laser Trimming System, refurbished |
| - Chicago Laser LS960 Laser Trimming System, refurbished |
| - Cymer ELS 4000 Laser |
| - Cymer ELS 5600 Laser |
| - Cymer ELS 6300 Laser |
| - ESI 2050 LP Laser Trimming System |
| - ESI 2100 Laser Trimming System |
| - ESI 5970 Laser Repair System |
| - ESI 9275 Laser Repair System - parts machine |
| - ESI 9300 Laser Repair System |
| - ESI 9820 Laser Processing System, 12" |
| - ESI 9825 Laser Processing System, 8" and 12" |
| - ESI 9830 Laser Processing System, 12" |
| - ESI 9850 Laser Processing System, 12" |
| - GSI M310 Laser Trimming System |
| - GSI M435 Laser Repair System |
| - Hitachi ABC-2C-C CO2 Laser System |
| - Innolas ILSTT-DS Laser System |
| - New Wave Research 2150 Laser Scriber |
| - New Wave Research Titan Laser Scriber |
| - Rofin CL Cube Laser |
| - Rofin DQ 010 q-switched Solid State Laser |
| Metrology |
| - Advantest / Leica E3610 CD SEM |
| - AMAT NanoSEM 3D Critical Dimension SEM, 12" |
| - AMAT Opal 7830i CD SEM, 8" |
| - Beta Squared OS2000 Micralign Mask Scanner, 4" to 6" |
| - Biorad QS 300 FTIR Spectrometer, up to 12" |
| - Biorad QS 408M Manual FTIR Spectrometer, up to 8" |
| - Biorad QS 1200 FTIR Spectrometer, 12" |
| - Biorad Quaestor Q7 Profilometer, 8" |
| - Cyberscan Vantage Noncontact Profiler with Keyence LT9010M |
| - Dynamic Micro Systems 2090 Automatic Reticle Changer |
| - Four Dimensions 280C Four Point Probe System |
| - FSM 128 Film Stress Measurement System, 8" |
| - HSEB Axiospect 300, 12" |
| - Jordan Valley JVX5200 XRR X-Ray Reflectometer, 12" |
| - KLA Tencor 2401 Viper Macro Defect Inspection, 8" |
| - KLA Tencor 5300 Overlay and CD Measurement, 8" |
| - KLA Tencor Aleris Spectra DX Interferometer, 12" |
| - KLA-Tencor Archer AIM, 300mm |
| - KLA-Tencor ASET F5x Thin Film Measurement System, 8" |
| - KLA-Tencor ASET F5x Thin Film Measurement System, 8" / 12" |
| - KLA Tencor eCD 1 SEM, 8" / 12" |
| - KLA-Tencor eDR-5210 Wafer Defect Review System |
| - KLA Tencor eS32 Defect Review System, 12" |
| - KLA Tencor Flexus FLX-2360 Stress Measurement, 12" |
| - KLA-Tencor LMS IPRO5 Photomask Registration and CD Metrology System |
| - KLA Tencor / Prometrix RS35C Four Point Probe System |
| - KLA Tencor / Prometrix RS50/e Four Point Probe System, 8" |
| - KLA Tencor / Prometrix RS55/tc Four Point Probe System, 8" |
| - KLA Tencor / Prometrix RS55/tca Four Point Probe System, 8" |
| - KLA Tencor / Prometrix RS75 Four Point Probe System |
| - KLA Tencor / Prometrix RS75/a Four Point Probe System |
| - KLA Tencor P-15 Long Scan Profilometer |
| - KLA Tencor Puma 9000 Dark Field Defect Inspection, 12" |
| - KLA Tencor Quantox 64100 Silicon and Oxide Monitoring System, 8" |
| - KLA Tencor SCD Interferometer, 12" |
| - KLA Tencor Ultrapointe CRS 1010S Interferometer, 8" |
| - KLA Tencor UV1050 Film Thickness Measurement, 8" |
| - KLA Tencor UV1080SE Film Thickness Measurement, 8" |
| - Nanometrics Nanospec AFT 2100 Thin Film Measurement System, 3" to 8" |
| - Nanometrics NanoSpec 3000 Thin Film Measurement System, 8" |
| - Nanometrics NanoSpec 6100 Thin Film Measurement System, up to 8" |
| - Nanometrics 8000 Thin Film Measurement System, 6" |
| - Nanometrics 8300 Thin Film Measurement System, 8" + 12" |
| - Nanometrics Q200i Biorad Overlay System, 8" |
| - Nanometrics QS-1200 FT-IR Spectrometer, up to 8" |
| - Plasmos SD2000 Ellipsometer |
| - Plasmos SD4000 Ellipsometer |
| - Raytex EdgeScan Wafer Edge Inspection System, 8" |
| - ReVera VeraFlex, 12" |
| - Rigaku MFM65 Small Spot Energy Dispersive X-Ray Fluorescence Spectrometer |
| - Rigaku XRF 3620 X-Ray Fluorescence Spectrometer, 8" |
| - Rigaku XRF 3640 X-Ray Fluorescence Spectrometer, 8" |
| - Rigaku TXRF 3700H X-Ray Spectrometer |
| - Rigaku Ultima IV X-Ray Diffraction System (XRD) |
| - Rudolph / August NSX-90 Wafer Inspection System, 8" |
| - Rudolph / August NSX-105B Wafer Inspection System, 8" |
| - Rudolph / August NSX-105C Wafer Inspection System, 8", w/ Wafer Handler |
| - Rudolph AXI-930 B20 Macro Defect Inspection, 12" |
| - Rudolph MetaPulse 200X Cu System, 8" |
| - Rudolph SE200XL Spectral Ellipsometer, 8" |
| - Rudolph Waferview 320 Wafer Inspection System, 12" |
| - Semilab IR3100S Small spot IR-Near IR FT-IR Spectrometer, 12" |
| - Semilab / SDI WT-2000 Measurement System, 8" |
| - ThermaWave Optiprobe 2600B Film Thickness Measurement System |
| - ThermaWave Optiprobe 3290 DUV Film Thickness Measurement System |
| - Thermawave OptiProbe 5340C Thin Film Thickness Measurement, up to 12" |
| - Thermawave OptiProbe 5340s Thin Film Thickness Measurement, 12" |
| - Thermo Nicolet ECO 1000 FTIR Spectrometer |
| - Thermo Scientific MicroXR VXR Benchtop X-ray Fluorescence Spectrometer |
| - Veeco Dektak 3 Profilometer |
| - Veeco Dektak 3030 Profilometer |
| - Veeco Dimension 5000 Atomic Force Microscope (AFM) |
| - Veeco Dimension X1D Atomic Force Microscope (AFM), 12" |
| - Veeco Dimension X3D Atomic Force Microscope (AFM) |
| - Veeco RF-350 S Ion Mill, 8" |
| - Veeco Dektak 200 SL Profilometer, 8" |
| - Veeco NT3300 Surface Profilometer, 8" |
| Photolithography |
| - Fusion Gemini GPS Photostabilizer, 8" |
| - MIVA 20128 Mask Wrighter |
| - Tamarack 152R Projection Mask Aligner |
| - Tamarack 303 Projection Mask Aligner |
| Pumps |
| - Adixen ATH 500M Turbo Pump |
| - Alcatel ATH 1300M Turbo Pump |
| - Ebara AA70WN Dry Pump |
| - Ebara A30W Dry Pump |
| - Ebara A70W Dry Pump |
| - Ebara ADP122P Dry Pump |
| - Ebara ADP602P Dry Pump |
| - Ebara ESR20N Dry Pump |
| - Edwards E2M-80 Dual Stage Vacuum Pump, Fomblin prepped |
| - Edwards iH600 Mk5 Dry Vacuum Pump |
| - Edwards iH1000 Mk5 Dry Vacuum Pump |
| - Edwards iF1800 Dry Vacuum Pump |
| - Edwards 8 RV8 Vacuum Pump |
| - Leybold TURBOVAC T 1600 Turbo Pump |
| - Osaka TG1813BW Compound Molecular Pump |
| Rapid Thermal Processing |
| - AG Associates 210M Heatpulse RTP System, 4" |
| - AG Associates 410 Heatpulse RTP System, 4" |
| - AG Associates 610 RTP System, up to 6" |
| - AG Associates 4100S Heatpulse RTP System, 6" |
| - AG Associates 8108 Heatpulse RTP System, 8" |
| - Mattson AST 2800 RTP System, 6" |
| - Mattson AST 2800 RTP System, 8" |
| - Mattson AST SHS-2900 RTP System, 8" |
| - Mattson Helios RTP System, 12" |
| Resist Processing |
| - CFM Technologies CFM8050 Full Flow Photo Resist Processing |
| Wafer Bonder |
| - EVG EV501 Wafer Bonder, up to 6" |
| - EVG 520IS UV-NIL Bonder, 8" |
| - EVG 520IS Wafer Bonder, up to 8" |
| - EVG 805CPP Wafer Debonding System, 8" |
| - EVG 805EZD Wafer Debonding System, 8" |
| - EVG 850DB Wafer Debonding System, 8" |
| - EVG 850DB/200 Wafer Debonding System, 6" |
| - EVG 850TB Wafer Bonding System, 8" |
| - EVG 850DB/200 Wafer Bonding System, 6" |
| - EVG Gemini Automated Wafer Bonder, 8" |
| - EVG Smartview Bond Aligner, 6" to 12" |
| - Karl Suss ABC200 Wafer to Wafer Bonder |
| - Karl Suss CBC200 Automated Wafer Bonding Cluster System |
| - Karl Suss SB8e Substrate Bonder, up to 8" |
| - Logitech 3000 Wafer Bonder, up to 6" |
| Wafer Cleaning |
| - Disco DCS-141 Wafer Washer |
| - DNS AS-2000 CMP Scrubber |
| - DNS SS-W60A-AR Scrubber, 6" |
| - DNS SS-W80B-AR Scrubber, 8" |
| - DNS SS-3000-A Wafer Scrubber, 12" |
| - DNS SS-3000-AR Wafer Scrubber, 12" |
| - DNS SU-3000 Single Wafer Cleaner, 12" |
| - DNS Aquaspin SU-3100 Single Wafer Cleaner, 12" |
| - DNS WS-820L Wafer Cleaning Track |
| - Ebara EPO-113 CMP System, 8" |
| - MEG 8BC Spin Cup Cleaning System, up to 12" |
| - MEG SS Spin Scrubber Cleaning System, 4" to 8" |
| - OnTrack DSS-200 Series I Wafer Brush Cleaning System, 8" |
| - OnTrack DSS-200 Series II Wafer Brush Cleaning System, 8" |
| - OnTrack DSS-2200 Synergy Wafer Brush Cleaning System, 8" |
| - Peter Wolters PM300 CMP System, 12" |
| - Rena SC1 / SC2 Wafer Cleaning System, 6" to 12" |
| - Semitool Magnum HF Cleaner, 8" |
| - Semitool 270 Spin Rinse Dryer (SRD), 4" to 6" |
| - Semitool 270S Spin Rinse Dryer (SRD), up to 6" |
| - Semitool 280S Spin Rinse Dryer (SRD), up to 8" |
| - Semitool 870S Spin Rinse Dryer (SRD), dual stack, up to 6" |
| - Semitool 880S Dual Spin Rinse Dryer (SRD), up to 8" |
| - Semitool ST-870 Spin Rinse Dryer (SRD), up to 6" |
| - Semitool 4300S Single Stack SRD, up to 8" |
| - Semitool 8300S Dual Spin Rinse Dryer (SRD), up to 8" |
| - SEZ DaVinci DV-38 Wafer Cleaner, 12" |
| - SVG 8600 Wafer Scrubber, 6" |
| - TEL Mk 11 Clean Track, 6" |
| - Verteq 1800-6AL Dual Stack Spin Rinse Dryer, 8" |
| - Verteq 1800-6AR Spin Rinse Dryer, 8" |
| Wafer Coater / Developer |
| - Brewer Science CEE 200 FX Resist Developer, 12" |
| - Brewer Science 300XD Resist Developer, 12" |
| - Brewer Science CEE 4000 Photoresist Coater (bench top unit) |
| - C & D Semi Dual Coater Track |
| - C & D Semi Dual Developer Track |
| - DNS SC-W60A 2C Coater, 6" |
| - DNS SDW-60-AVP Developer, 6" |
| - DNS SDW-60A-AV Developer, 6" |
| - DNS 80A Developer, 6" |
| - DNS RF3 Coat / Develop Track |
| - DNS SK-W80A-BVPE Track, 1C / 2D, 8" |
| - DNS SK-W80B-AVPE Track, 1C / 2D, 8" |
| - DNS SK-200W Coater / Developer, 8" |
| - DNS SK-2000 Coater / Developer |
| - LAURELL WS-650Sz Manual Spin Coater |
| - Sokudo RF-300A Coater / Developer Track, 12" |
| - STEAG Microtech Coater/Developer Cluster 421 |
| - SVG 88 Coater / Developer Track System, 6" |
| - SVG 90 Coater / Developer Track System, 8" |
| - SVG 8800 Dual Track Coater / Developer System |
| - SVS MSX 1000 Coater / Developer, 2" |
| - TEL Mk 7 2C / 2D Track, 8" |
| - TEL Mk 8 1C / 1D Track, 8" |
| - TEL Mk 8 2C / 2D Track, 8" |
| - TEL Act 8 2C / 3D Track, 6" |
| - TEL Act 8 2C / 2D Track, 8" |
| - TEL Act 8 2C / 2D Track, 8" |
| - TEL Act 8 Track, 2 Coat / 2 Develop, dual block, 8" |
| - TEL Act 8 Track, 3 Coat / 3 Develop, dual block, 8" |
| - TEL Act 8 Track, 3 Coat / 4 Develop, dual block, 8" |
| - TEL Act 8 Track, 4 Coat / 3 Develop, dual block, 8" |
| - TEL Act 8 Track, 4 Coat / 4 Develop, dual block, 8" |
| - TEL Act 8 Single Block Track, 8" |
| - TEL Act 12 2C / 4D Track, setup for 8" |
| - TEL Lithius Coater Developer, 8" |
| - TEL Lithius ArF Photoresist Coater / Developer, 12" |
| - TEL Lithius KrF Photoresist Coater, 12" |
| - TEL Lithius i-Line Coater Developer Track, 12" |
| Wafer Grinder / Polisher |
| - Accretech PG200RM Backside Grinder |
| - Accretech PG300RM Backside Grinder, 8" / 12" |
| - Daitron WBM-2100 Wafer Edge Grinder, 8" |
| - DISCO DAG-810 Automatic Surface Grinder, 8" |
| - DISCO DFG 82IF/8 Grinder |
| - DISCO DFG-840 Backside Grinder, 8" |
| - DISCO DFG-840HS Backside Grinder, 8" |
| - DISCO DFG-841 Backside Grinder, 8" |
| - DISCO DFG-850 Backside Grinder, 8" |
| - DISCO DFP-8160 Polisher, 12" |
| - DISCO DFG-8540 Backside Grinder, 8" |
| - DISCO DFG-8560 Backside Grinder, 8" and 12" |
| - DISCO DFG-8560 Backside Grinder, 12" |
| - DISCO DGP-8760 + DFM-2700 Grinder/Polisher, 12" |
| - DISCO DGP-8761 Grinder/Polisher for 6" LED wafers |
| - DISCO DGP-8761 Polish Grinder, 12" |
| - KOYO DXSG 320 Double Side Grinder, 8" and 12" |
| - Okamoto GDM300 Wafer Grinder / Polisher, 12" |
| - Okamoto GNX200 Backside Wafer Grinder, 8" |
| - Okamoto GNX300 Backside Wafer Grinder, 12" |
| - Okamoto GNX300P Backside Wafer Grinder, 8" and 12" |
| - Shibayama VG502 Mk II Backside Wafer Grinder, 8" |
| - Strasbaugh 7AA Grinder |
| Wafer Handling |
| - Brooks Automation Fixload 6 Loadport, 12" |
| - Brooks Automation Fixload 25 Loadport, 12" |
| - Mactronix AWi-600 Automatic Wafer Sorter |
| - Mactronix Eureka UKA-650 Wafer Transfer System, 6" |
| - Mactronix Eureka UKA-825 Wafer Transfer System, 8" |
| - Recif Technologies ESR300F53 Wafer Sorter, 12" |
| - Recif Technologies SIS300F53 Wafer Sorter, 12" |
| Wafer Inspection / Measurement |
| - Accretech Win-Win 50 A5000 Brightfield Inspection System, 12" |
| - AMAT Compass Pro Wafer Inspection, 8" |
| - AMAT Compass Pro Wafer Inspection, 12" |
| - AMAT ComPLUS Wafer Inspection, 12" |
| - AMAT UVision 4 Wafer Inspection System, 12" |
| - Hermes Inspection HMI eScan 320 eBeam Inspection System, 12" |
| - Hitachi LS-6700 Dark Field Inspection, 12" |
| - Irvine Optical UL208 Wafer Mapper, 8" |
| - Irvine Optical Ultrastation 3.E Wafer Inspection System, 8" |
| - KLA Tencor 2122 Wafer Inspection System incl. SAT, 6" |
| - KLA Tencor 2122 Spares - please ask for list ! |
| - KLA Tencor 2131 Wafer Inspection System, 8" |
| - KLA Tencor 2138 Wafer Defect Inspection, 8" |
| - KLA Tencor 2139 Wafer Defect Inspection, 8" |
| - KLA-Tencor 2608 Wafer Inspection System, 8" |
| - KLA-Tencor 2915 Brightfield Wafer Inspection System, 12" |
| - KLA Tencor 4500 Surfscan Wafer Inspection System |
| - KLA Tencor 5100 XP Surfscan Wafer Inspection, 8" |
| - KLA Tencor 6200 Surfscan Wafer Inspection, 8" |
| - KLA Tencor 6220 Surfscan Unpatterned Wafer Inspection, 8" |
| - KLA Tencor 6400 Surfscan Wafer Inspection, 8" |
| - KLA Tencor AIT I Surfscan Wafer Inspection, 8" |
| - KLA Tencor AIT II Surfscan Wafer Inspection, 8" / 12" |
| - KLA Tencor AIT XUV Darkfield Inspection, 12" |
| - KLA Tencor AlphaStep 200 Profilometer, 5" |
| - KLA Tencor AlphaStep IQ Profilometer, 6" to 8" |
| - KLA Tencor HRP-320 Profiler, up to 12" |
| - KLA Tencor HRP-420S Profiler, 8" |
| - KLA Tencor INS-3300 Defect Review System, 12" |
| - KLA Tencor P-11 Profiler, 8" |
| - KLA Tencor SFS 7600 Wafer Inspection System, 8" |
| - KLA Tencor SFS 7700 Wafer Inspection System, 4" to 8" |
| - KLA Tencor SP1 Classic Wafer Inspection System, 8" |
| - KLA Tencor SP1 TBI Wafer Inspection System, 12" |
| - KLA Tencor SP2 Wafer Inspection System, 12" |
| - N&K Analyser 3000 for Thick Resist Measurement, 6" |
| - Nikon Optistation VII Automated Inspection, 12" |
| - OSI 2100 Overlay and CD Measurement System, up to 6" |
| - SDi FAaST-230m Wafer Characterization System, 8" |
| - SemiTest Epimet 2 Thin Film Epi Measurement, 8" |
| - Vistec LDS 3000 M Wafer Inspection System, 4", 8", 12" |
| - Vistec LDS 3300 M Wafer Inspection System, 4", 8", 12" |
| Wafer Mask Alignment |
| - EVG 620 Mask Aligner, 6" |
| - Karl Suss MJB3 Mask Aligner w/ backside alignment, 3" |
| - Karl Suss MA4 Mask Aligner, 4" |
| - Karl Suss MA6 Mask Aligner, 6" |
| - Karl Suss MA150 Mask Aligner, 6" |
| - Karl Suss MA150CC Mask Aligner, 6", top and backside alignment |
| - Karl Suss MA8 Mask Aligner, 8" |
| - Karl Suss MA8 / BA8 Mask Aligner, 8" |
| - Karl Suss MA200 Mask Aligner, up to 8" |
| - Karl Suss MA200cc Mask Aligner, up to 8" |
| - Karl Suss MA200e Mask Aligner, 8" |
| - Midas MDA 400LJ Mask Aligner, 4" |
| - Neutronix Quintel 7000 Mask Aligner, up to 8" |
| - OAI Hybralign 200 Mask Aligner, 8" |
| - Quintel 7000 Mask Aligner, 12" |
| Wafer Mask Cleaning |
| - K&S 973 MicroWash Mask Cleaner, up to 10" diagonal substrates |
| - SSEC Model 3300 ML Trillenium Photomask Cleaner |
| - SSEC M3306 Flux Cleaner, 12" |
| Wafer Mask Inspection |
| - Carl Zeiss AIMS 193 Mask Inspection System |
| - KLA Tencor StarLight SL3 URSA Mask Inspection System |
| Wafer Polisher |
| - AMAT Mirra Mesa CMP System, 8" |
| - AMAT Reflexion LK Prime Oxide CMP System, 12" |
| - AMAT Reflexion LK-Cu CMP System, 12" |
| - IPEC Avanti 472 CMP System, 8" |
| Wafer Stepper |
| - ASML /300 Wafer Stepper, 6" |
| - ASML AT1100 DUV Scanner, 193 nm, 12" |
| - ASML PAS-5000/55 Stepper, 4" |
| - ASML PAS-5500/100C Stepper, 8" |
| - ASML PAS-5500/100D Stepper, 8" |
| - ASML PAS-5500/200C Scanner, 8" |
| - ASML PAS-5500/250C Scanner, 8" |
| - ASML PAS-5500/275C Stepper, 8" |
| - ASML PAS-5500/300C Scanner, 8" |
| - ASML PAS-5500/350C Scanner, 8" |
| - ASML PAS-5500/400C, 8" |
| - ASML PAS-5500/750E Lithography System, 8" |
| - ASML TwinScan AT1200C Scanner, 12" |
| - ASML TwinScan XT850F KrF Scanner, 12" |
| - ASML TwinScan XT1250B Scanner, 12" |
| - ASML TwinScan XT 1400F ArF Scanner, 12" - |
| - Canon FPA-2500 i2 Stepper, 8", reticle 6" |
| - Canon FPA-3000 EX4 Wafer Stepper, 8" - parts machine |
| - Canon FPA-3000 EX5 Wafer Stepper, 8" |
| - Canon FPA-3000 i4 Wafer Stepper, 8", reticle 6" |
| - Canon FPA-3000 iW Wafer Stepper, 8", reticle 6" |
| - Canon FPA-3000 iW Wafer Stepper, 8" - parts machine |
| - Canon FPA-5000 ES3 Wafer Stepper, 8", reticle 6" |
| - Canon FPA-5500 iZa Wafer Stepper, 12" |
| - Nikon FX601 Stepper |
| - Nikon NSR-1505G6E Stepper, 5" |
| - Nikon NSR-1505G7E Stepper, 5" |
| - Nikon NSR-1755G7A Stepper, 6" |
| - Nikon NSR-1755i7A Stepper |
| - Nikon NSR-1755i7B Stepper |
| - Nikon NSR-2005 i9C i-Line Wafer Stepper, 8", reticle 6" |
| - Nikon NSR-2005i10D Stepper |
| - Nikon NSR-2005 i11C i-Line Wafer Stepper, 6", reticle 5" |
| - Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6" |
| - Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6" |
| - Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6" |
| - Nikon NSR-2205 EX12B Wafer Stepper, 8", reticle 6" |
| - Nikon NSR-2205 EX14C Wafer Stepper, 8" |
| - Nikon NSR-2205 i14E Wafer Stepper, 8" |
| - Nikon NSR-2205 i14E2 Wafer Stepper, 8" |
| - Nikon NSR-4425i i-Line Wide-Field Stepper, 8" |
| - Nikon NSR-S202A Wafer Stepper, 8" |
| - Nikon NSR-S203B Wafer Stepper, 8" |
| - Nikon NSR-S204B Wafer Stepper, 8" |
| - Nikon NSR-S204D Wafer Stepper, 8" |
| - Nikon NSR-S205C Wafer Stepper, 8" to 12" |
| - Nikon NSR-S206D Scanner, 12" |
| - Nikon NSR-S306C 193 nm DUV Scanner |
| - Nikon NSR-S609B Scanner, 12" |
| - Nikon NSR-S610C Scanner, 12" |
| - Ultratech 1500 Wafer Stepper, 6" |
| - Ultratech 1500 MVS Wafer Stepper, 3" to 6" |
| - Ultratech 2244i Wafer Stepper, 2" to 8" |
| - Ultratech Saturn 3 Spectrum Stepper, 8" |
| Wet Process |
| - Amerimade Decap 5ft Wet Bench |
| - IVY Semiconductor Automated Wet Bench |
| - JST Ultrasonic Solvent Wet Bench KOH |
| - JST Ultrasonic Solvent Wet Bench KOH |
| - Schmid Model 59 Silver Plating System |
| - Semitool Alpha CP04MNSPD0801 Wet Processing System |
| - Semitool 1-Chamber Spray Acid Tool (SAT), 8" |
| - Semitool Mini Raider RM02MNSPD0802 Wet Processing System |
| - Semitool Raider ECD-10 Plating System, 12" |
| - Semitool Raider ECD-310 Plating System, 12" |
| - Semitool Scepter Spray Acid Tool (SAT), 8" |
| - Semitool Storm II Box & Cassette Washing System, 8" |
| - Semitool Storm III Box & Cassette Washing System, 6" to 8" |
| - Semitool Storm 300 Wafer Cassette Washing System, 12" |
| - Steag AWP 200 Wet Bench |
| - TEL NS300 Surface Preparation System, 12" |