For Sale - Frontend |
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Asher |
- Alcan Tech / Canon MAS-8000 Microwave Asher |
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- Axcelis Fusion 150 PC System, 6" |
- Axcelis Fusion 200 ACU System, 8" |
- Axcelis Fusion PS3 UV Photo Stabilizer, 8" / 12" |
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- Branson 91391 Quartz Barrel Plasma Etcher |
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- Kokusai Electric RM 6500 R Plasma Asher |
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- Mattson Aspen II - parts machine |
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CVD / PVD Systems |
- Aixtron Crius II MOCVD 2" x 55 |
- Aixtron G3 HT MOCVD 4" x 8 |
- Aixtron G4 MOCVD for Epi growth for SiC |
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- AMAT AKT 1600 PECVD System, flat panel size 320 x 352 mm |
- AMAT Centura EPI Chambers, 300 mm |
- AMAT Endura P5000 Mk II TEOS, 8" |
- AMAT P5000, 6" |
- AMAT P5000, 8" |
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- ASM Epsilon 3200 EPI Deposition System, 12" |
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- Kokusai DD-812 Vertical Furnace, 8" |
- Kokusai DD-853 V Vertical Furnace, 6" and 8" |
- Kokusai DD-9200 GH Furnace, 8" |
- Kokusai DJ-1206VN-DM Vertical Furnace, 300mm, LPCVD Nitride |
- Kokusai DJ-813 LPCVD Furnace, 8" |
- Kokusai DJ-833V Furnace, 8" |
- Kokusai DJ-853V Furnace, 6" and 8" |
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- MATHESON UR25K429 Gallium Nitride MOCVD System (6" x 7) |
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- Novellus Concept-1 System, 6", TEOS |
- Novellus Concept-1 System, 8" |
- Novellus Concept-1 CVD-W, Tungsten, 8" |
- Novellus Concept-3 Speed, 3 chambers, 12" |
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- Oxford Ionfab 300 Plus Ion Beam Etch and Deposition System, 8" |
- Oxford PlasmaPro 800Plus RIE Etcher |
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- Plasma-Therm LLC SLR-770B Deep Reactive Ion Etcher |
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- Sencera 6 Target In-line Sputter, 1.6 x 1.4 meter substrate processing equipment |
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- Veeco E300 MOCVD System |
- Veeco E400 MOCVD System |
- Veeco Gen II MBE System |
- Veeco K475 GaN MOCVD System |
- Veeco K475i MOCVD Upgrade Kit |
- Veeco Spector Ion Beam Sputtering System |
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- Watkins-Johnson WJ999 CVD System, 8" |
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Etcher |
- Alcatel AMS 4200 Plasma DRIE Etch Equipment |
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- LAM 2300 Kiyo Metal Etch, 12" |
- LAM TCP 9400 SE Etch System, 8" |
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- March Instruments AP-1000 Plasma Cleaner |
- March Instruments PX-1000 Plasma Etcher |
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- PVA TePla PS80 Plus Microwave Plasma Cleaner |
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- Samco PC 1100 Photoresist Stripper Asher |
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- Semitool SST 742 Polymer Remover |
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- SEZ 203 Spin Etcher, 6" to 8" |
- SEZ 223 Spin Etcher, 4" to 8" |
- SEZ 323 Spin Etcher, 12" |
- SEZ spares - please ask ! |
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- ULVAC NE-950EX-V CCP Etcher, 2" to 12" |
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Evaporation and Sputtering Systems |
- Balzers LLS-801 Metal Sputter System |
- Balzers LLS-802 Metal Sputter System |
- Balzers LLS EVO Sputter System |
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- CHA Mark 40 E-Beam Evaporator |
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- HANIL VACUUM HVC-2050DA High Vacuum Box Coater |
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- Varian 3290 STQ Sputtering System |
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Furnaces |
- Aviza RVP 9000 Furnace, 8" |
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- Kokusai / Bruce BDF-200 LPCVD Furnace, 8" |
- Kokusai DJ-813 LPCVD Furnace, 8" |
- Kokusai DD-812 Vertical Furnace, 8" |
- Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12" |
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- SST 5100 Programmable Vacuum/Pressure Soldering Furnace |
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- TEL Alpha 8S Furnace, 8" |
- TEL Alpha-8SE-E Vertical FTP LTO/Nitride Furnace, 8" |
- TEL Alpha 8S-Z Furnace, 8" |
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- Ulvac V8-100 Furnace |
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Implanter |
- Axcelis 10-160 Ion Implanter, 4" / 6" |
- Axcelis / Fusion HE 3 High Energy Implanter, 12" |
- Axcelis NV 8200 P MS Implanter, 8" |
- Axcelis Paradigma XE Ion Implanter, 12" |
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- Nissin Exceed 2000 A Ion Implanter, 8" |
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- Varian E220 Medium Current Ion Implanter, 6" |
- Varian 350 D Ion Implanter, 6" |
- Varian E500 HP Ion Implanter, 8" |
- Varian VIISion 80 + HS 31 Ion Implanter, 8" |
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Laser |
- ESI 44 Laser Trimming System |
- ESI 2100 Laser Trimming System |
- ESI 9350 Laser Processing System |
- ESI 9825 Laser Processing System, 8" and 12" |
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- Laser Quantum finesse pure Continuous Wave Laser System |
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Metrology |
- Bio-Rad QS 408M Manual FTIR Spectrometer, up to 8" |
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- Cyberscan CT350T Dual Non-Contact Double-Sided Optical Profilometer |
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- Nanometrics NanoSpec 6100 Thickness Measurement System, 12" |
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- Rudolph MP200 Wafer Inspection System, 6" to 8" |
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- Veeco/Bruker Contour GT-K Optical Profilometer |
- Veeco Dektak 8 Profilometer |
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Photolithography |
- Fusion Gemini GPS Photostabilizer, 8" |
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Pumps |
- Adixen A100L Pump |
- Adixen A100P Pump |
- Adixen ADS602P Pump |
- Adixen ADP122P Pump |
- Adixen ADS602P Pump |
- Adixen ADS1202 Pump |
- Adixen ATH 500M Turbo Pump |
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- Alcatel ADP122 Dry Pump |
- Alcatel ADS602 Dry Pump |
- Alcatel ADS1202 Dry Pump |
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- Ebara A10S Dry Pump |
- Ebara AA10 Dry Pump |
- Ebara A30W Dry Pump |
- Ebara AA40W Dry Pump |
- Ebara A70W Dry Pump |
- Ebara AA70W Dry Pump |
- Ebara AAS70W Dry Pump |
- Ebara A150W Dry Pump |
- Ebara ESR20N Dry Pump |
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- Edwards iH80 Mk5 Dry Vacuum Pump |
- Edwards iH600 Mk5 Dry Vacuum Pump |
- Edwards iH1000 Mk5 Dry Vacuum Pump |
- Edwards iH1800 Mk5 Dry Vacuum Pump |
- Edwards iF1800 Dry Vacuum Pump |
- Edwards iH1800 Dry Vacuum Pump |
- Edwards iQDP80 Dry Vacuum Pump |
- Edwards iXH3030T Dry Vacuum Pump |
- Edwards iXH3045H Dry Vacuum Pump |
- Edwards STP-A1603C Turbomolecular Pump |
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- Edwards ESDP12 Scroll Pump |
- Edwards XDS 10i Scroll Pump |
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- Kashiyama MU100 Dry Pump |
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- Leybold D65BCS Vacuum Pump |
- Leybold SP630F Vacuum Pump |
- Leybold TURBOVAC 1100C Turbo Pump |
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- Seiko Seiki STP1303 Turbo Pump |
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- Varian SH-110 Scroll Pump |
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Wafer Cleaning |
- DNS SS-W80B-AR Scrubber, 8" |
- DNS SU-3100 Single Wafer Cleaner, 12" |
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- TEL / FSI Antares Aerosol Cleaner, 12" |
- TEL / FSI Aries Wafer Cleaner, 8" |
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Wafer Coater / Developer |
- DNS 80B Track Interface for Nikon Stepper |
- DNS SK-W80A-BVP Coater / Developer |
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- SVG 90 S ASML Coater / Developer Track System, 2C2D, 6" |
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- TEL Mark V 1C / 2D Track, 4" |
- TEL Mark Vz 1C / 2D Track, 6" |
- TEL Act M Coater |
- TEL Act M Developer |
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Wafer Grinder / Polisher |
- DISCO DAG810 Backside Grinder, 8" |
- DISCO DFS-8910 Surface Planer, 12" |
- DISCO DGP-8760 + DFM-2700 Grinder/Polisher, 12" |
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- Peter Wolters AC1200 F 2-wheel Fine Grinding Machine |
- Peter Wolters AC1200 L 2-wheel Lapping Machine |
- Peter Wolters AC1200 P 2-wheel Polishing Machine |
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Wafer Inspection / Measurement |
- KLA Tencor 2132 Wafer Inspection System, 8" |
- KLA Tencor 5500 Surfscan Wafer Inspection, 8" |
- KLA Tencor 6220 Surfscan Wafer Inspection, 8" |
- KLA Tencor 6400 Surfscan Wafer Inspection, 8" |
- KLA Tencor 6420 Surfscan Wafer Inspection, 8" |
- KLA Tencor Candela CS20 Optical Surface Analyzer |
- KLA Tencor SP1 Classic Wafer Inspection System, 6" to 8" |
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Wafer Mask Alignment |
- Canon MPA 600 FA Mask Aligner, 6" |
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- EVG 420 Mask Aligner, 4" |
- EVG 6200 Infinity Mask Aligner, 8" |
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- Karl Suss MJB3 Mask Aligner, 3" |
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Wafer Stepper |
- Nikon NSR-1505G4D Stepper, 6" |
- Nikon NSR-2005 i11C i-Line Wafer Stepper, 6", reticle 5" |
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 6", reticle 6" |
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6" |
- Nikon NSR-2205 i12D i-Line Wafer Stepper, 6", reticle 6" |
- Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6" |
- Nikon NSR-S204B KrF Scanner, 8" |
- Nikon NSR-S205 Scanner, 12" |
- Nikon NSR-S207D Scanner, 12" |
- Nikon NSR-S609B Scanner, 12" |
- Nikon NSR-SF100 Polyimide Exposure System, 12" |
- Nikon S609B Immersion Scanner, 12" |