For Sale - Frontend
Asher
- Anatech MP 600 Quartz Barrel Etcher
- Axcelis Fusion 200 PCU System, 8"
- Axcelis Fusion M200 MCU Metal Asher, 8"
- Axcelis Fusion M200 PCU System, up to 8"
- Axcelis Fusion M200 PCU Polo System - parts machine
- Axcelis Integra Dry Stripper, 12"
- Axcelis RadiantStrip 320 Stripper/Asher, 12"
- AXIC HF-8 Plasma System
- Branson IPC 2000T Barrel Asher
- Branson IPC P 2000 Barrel Asher
- Branson IPC L3100 Asher
- Branson IPC 4155/2 Plasma Etcher
- Branson IPC 7102 Plasma Etcher
- Canon MAS-8000 Plasma Asher, up to 8"
- Canon MAS-8220 Plasma Asher, up to 8"
- GaSonics Aura 2000 LL spares - please ask for list !
- GaSonics L3510 Asher, 4" to 8"
-GLOW Plasma Cleaning System
- Mattson Aspen III Lite Etcher, 12"
- PSK Supra Vm Photoresist Stripper, 2 chambers, 12"
- PSK TERA21 Photoresist Stripper, 12"
- Technics PE II Plasma Etcher
- Tegal 901E Plasma Asher, up to 6"
- Tegal 903E Plasma Asher, up to 6"
- Tegal 903E Plasma Asher, 6", TTW version
- Tegal 915 Barrel Resist Stripper
- Tegal 965 Plasma Asher, up to 6"
- Tepla Auto 300 Asher, 4" to 6", 2.45 GHz, 1000 Watts
- ULVAC Phoenix Asher, 6"
- Unaxis-Nextral NE860 High Density Plasma Etcher, 8"
Chiller
- Edwards TCU 40/80 plus Chiller
- Lauda Proline Integral XT 150 Process Thermostat
- Neslab HX-75 Recirculating Chiller
- Neslab HX-150 Chiller
- Neslab HCX-300 Air-cooled Chiller
- TEL D204 Chiller
- TEL D214 Chiller
- TEL D250 Chiller
- Temptronic TPO3000A Chiller
- Temptronic TPO3200A Chiller
CVD / PVD Systems
- Aixtron 2400 G3 MOCVD System
- Aixtron 2600 G3 MOCVD System
- Aixtron AIX 2800 G3 MOCVD System
- Aixtron AIX 2800 G4 HT MOCVD System, 2" x 42
- Aixtron VP2400HW MOCVD System, 6 x 4" wafers
- AMAT AKT 1600 PECVD system, wafer size 370 x 470 mm
- AMAT Centura 4.0, 4 chambers, Poly / Wsix, 12"
- AMAT Centura ACL, 4 chambers APF, 8"
- AMAT Centura AP Etch, 12", 4 chambers
- AMAT Centura AP Enabler, 4 chambers, 12"
- AMAT Centura AP Chambers, 12"
- AMAT Centura DPS Metal, 4 chambers, 8"
- AMAT Centura DPS Metal Super-E, 8"
- AMAT Centura DPS Metal E-Max, 8"
- AMAT Centura DPS Metal E-Max CT+, 12"
- AMAT Centura eMax CT+ Oxide Etcher, 12"
- AMAT Centura EPI System w/ Siconi, 12"
- AMAT Centura HDP CVD, 8"
- AMAT Centura RTP XE, 8"
- AMAT Centura Radiance RTP System, 2 chambers, 12"
- AMAT Centura Super-E System, 8"
- AMAT Centura 5200 CxZ, SACVD, 8"
- AMAT Centura 5200 Enabler, 3 ea. E2 chambers, 12"
- AMAT Centura 5300 HDP Oxide Etch, 8"
- AMAT Centura II Al CVD chamber, 12"
- AMAT CenturaI AP HART Etch, 12"
- AMAT Centura II DPS+ Metal, 8"
- AMAT Centura II IMP Ti chamber, 12", 2 ea.
- AMAT Centura Ultima HDP CVD, 8", 3 chambers
- AMAT Centura Ultima Plus CVD, 6", 2 chambers
- AMAT Centura Ultima TE HDP CVD. 8"
- AMAT Centura Ultima X, HDP CVD. 3 chambers, 12"
- AMAT Centura WXZ CVD System, 3 chambers, 8"
- AMAT Endura RF Sputter Chamber, 8"
- AMAT Endura TXZ Chamber, 8"
- AMAT Endura II PVD System, 12"
- AMAT Endura II CVD Al Chamber, 12"
- AMAT Endura II ALPS Chamber, 12"
- AMAT Endura II SiCoNi Chamber, 12"
- AMAT Endura II RF Ti Chamber, 12"
- AMAT Endura II eSIPChamber, 12"
- AMAT Endura II Pre Clean Chamber, 12"
- AMAT Endura P5000 Mxp+ Oxide Etcher, 2 chambers, 8"
- AMAT Endura P5000 CVD, 4 chambers, 6"
- AMAT Endura P5000 Mxp Etcher, 3 chambers, 8" ESC
- AMAT Endura P5000 CVD Chamber, 6"
- AMAT Endura P5000 Loadlock Chamber, 6"
- AMAT Endura P5000 Mk II Chamber, 8"
- AMAT Endura P5000 Mk II Metal MXP, 6"
- AMAT Endura P5000 Mk II Etch, 6" clamp
- AMAT Endura P5000 Mk II CVD, 4 chambers, 8"
- AMAT Endura P5000 Mk II TEOS Dep. Etch Back, 8"
- AMAT Endura P5000 Mk II Tungsten Sputter, 2 chambers, 8"
- AMAT Endura 5500, 6"
- AMAT Endura Re-Flow Chamber, 12"
- AMAT IPS chamber set (Oxide Etch)
- AMAT OPUS Metal Etcher, 2 chambers, 12"
- AMAT P5000 Metal Etcher, 8"
- AMAT P5000 MxP+, Metal, 2 chambers, 6"
- AMAT P5000 MxP+, Poly, 3 chambers, 8"
- AMAT P5000 PE Oxide, 2 DxZ chambers, 6"
- AMAT P5000 PECVD, 8"
- AMAT P5000 RIE / PECVD, 2 Chambers, 6"
- AMAT P5000 Mk II, 3 Chambers TEOS CVD, 8"
- AMAT Producer, Shrink, 8"
- AMAT Producer GT, 12"
- AMAT Producer SE, 12"
- AMAT Producer SE Low K CVD, 12"
- AMAT TxZ Chamber
- ASM A412 Vertical Atmospheric Furnace, 12"
- ASM A412 Vertical Diffusion Furnace, 8"
- ASM A412 Vertical Diffusion Furnace, 12"
- ASM A412 Vertical LPCVD Furnace, 12"
- ASM A412 Vertical LPCVD Furnace, 12", SiN & TEOS
- ASM E3200 EPI Deposition System, 12"
- ASM Eagle 10 Trident Plasma PECVD System
- Canon Anelva C-5100GT PVD Gate Metal Deposition System, 12"
- Canon Anelva C-7100GT PVD Gate Metal Deposition System, 12"
- Centrotherm DO 7.500-650-CANtrol High Temperature, Continuous-Flow-Furnace
- Kokusai DJ-825V-8V Poly Furnace, 8"
- Kokusai DJ-823V-8BL3 LPCVD, 8"
- Kokusai DJ-833V LP-CVD, 8"
- Kokusai DJ-833V H2 Anneal, 8"
- Kokusai DJ-853V LPCVD Furnace, 8"
- Kokusai DJ-853V Furnace, 8" - parts machine
- MRC Eclipse Mark II PVD System, 6"
- MRC Eclipse Mark II PVD System, 8"
- MRC Eclipse Star PVD System, 6"
- Novellus Concept-1 TEOS System, 8"
- Novellus Concept-2 Sequel Express, 8"
- Novellus Concept-2 Dual Speed Sequel, 8"
- Novellus Concept-2 Altus DirectFill, 8"
- Novellus Concept-2 Dual Altus Standard CVD, 8"
- Novellus Concept-2 Dual Sequel Express ILDS, 8"
- Novellus Concept-2 Speed CVD, 8"
- Novellus Concept-2 Sequel Chamber
- Novellus Concept-3 Speed MAX, 2 chambers, 12"
- Novellus Concept-3 Speed NExT, 12"
- Novellus Concept-3 Speed Chamber
- Novellus Concept-3 Speed MAX HDP CVD, 2 chambers, 12"
- Novellus Inova PVD Sputter, 6 chambers, 12"
- Novellus PEP Irida Asher, 6"
- Novellus Sabre xT Copper Deposition System, 8”
- Oxford Plasmalab 80 Plus PECVD System, up to 8"
- Oxford Plasmalab 100 PECVD System, 6" to 8"
- Oxford Plasmalab 100 PECVD TEOS System, up to 8"
- Picosun Sunale R-200 Advanced ALD Reactor, 200mm
- Plasmatherm 790 PECVD System, up to 8"
- Riber Epineat III-V MBE System
- SINGULUS SINGULAR High Volume PECVD System
- SPTS CPX Deep Silicon Etch (DSIE) and XeF2 Etcher
- SPTS Multiplex ASE-HRM ICP PRO Etcher, 8"
- SPTS Sigma FXP Cluster PVD System
- TEL Indy A HTOX, 12"
- TEL Tactras Plasma Etch System, 4 chambers,12"
- TEL Unity M Trench Etch System, 8"
- TEL Unity II 85DD Oxide Etcher, 8"
- Thomas Swan MOCVD Reactor, 19 x 2"
- Thomas Swan MOCVD Reactor, 31 x 2"
- Thomas Swan MOCVD GaN Reactor, 6 x 2"
- Tystar Mini Tytan 8300 Horizontal Furnace, 6" to 8"
- Ulvac Ceraus ZX-1000 PVD System, 8"
- Veeco E300 GaNZilla MOCVD System
- Veeco Gen 930 MBE System
- Veeco K465 GaN MOCVD System
- Veeco K465i TurboDisc GaN MOCVD System
- Veeco K475 GaN MOCVD System
- Watkins-Johnson WJ999 R3.5 CVD System, 8"
- Watkins-Johnson WJ-999 TEOS System, 8"
- Watkins-Johnson WJ-1500 APCVD TEOS System, 8"
Etcher
- Akrion UP V2 MP.2000 CU Clean Sink, 8"
- Alcatel AMS 200IP DRIE System
- Apprecia Technologies Cenote Metal Wet Etching System, 8"
- DNS FC-3100 Wet Station, 12"
- DNS WS-820L Wet Etching System, 8"
- FSI Mercury MP Spray Processor, 8"
- FSI Scorpio Resist Develop System, 8"
- FSI Zeta 300 Spray Cleaning System, 12"
- Innomax ESE 2013 Wet Process Spray System, single wafer
- LAM Alliance 9400 DFM Etch System w/ 2 chambers, 8"
- LAM Alliance Poly Etch Chamber, 6"
- LAM Autoetch 590 Etcher, 6"
- LAM 490 Polyimide Plasma Etcher
- LAM 2300 Kiyo EX Chamber, 12"
- LAM 2300 ELD, WCoP, Electroless Deposition, 12"
- LAM 2300 Exelan Etch Oxide, 4 chambers , 12"
- LAM 2300 Exelan Etch Oxide, 4 chambers , process CU, 12"
- LAM 2300 Stretch ATM + VTM, 12"
- LAM 4420 Poly Etcher, 8"
- LAM 4420 Rainbow Envision
- LAM 4420 Rainbow Poly Etcher, 8"
- LAM 4420XL Rainbow Poly Etcher, 8"
- LAM 4428 Poly Etcher, 8"
- LAM 4520 Rainbow Classic
- LAM 4520 Rainbow Oxide Etcher, 8"
- LAM 4520i Rainbow Oxide Etcher, 6"
- LAM 4520i Rainbow Oxide Etcher, 8"
- LAM 4520XL Etcher, 6"
- LAM 4520XLE Poly Etcher, 8"
- LAM DV-38DS Single Wet Etch, 12"
- LAM SOSU EXT3100 Bevel Etch , 12"
- LAM TCP 9400 PTX Etch System, 8"
- LAM TCP 9400 SE Etcher, 8"
- LAM TCP 9408 SE Etcher, 8"
- LAM TCP 9600 Etcher, 8"
- LAM TCP 9600 SE Etcher, 6"
- LAM TCP 9600 SE Metal Etcher, 8"
- LAM TCP 9608 SE Etcher, 8"
- LAM TCP 9608 SE Metal Etcher, 8"
- March Instruments AP-1000 Plasma Cleaner
- Oxford Plasmalab 80 Plus RIE System, up to 8"
- Oxford Plasmalab 100 ICP Etcher, up to 6"
- Oxford Plasmalab 100 ICP Etcher, 8"
- Oxford Plasmalab uEtch 300 RIE System
- Plasmatherm 790 RIE Etcher, up to 8"
- Samco RIE-10NR Reactive Ion Etching System, 8"
- Samco RIE-200L Dry Etching System, 8"
- Sankyo SWH80 Wet Oxide Etch Bench, 8"
- Semitool Scepter Spray Acid System, 8"
- Semitool SSTC-321-280 Spray Solvent Tool, 8"
- Semitool SSTF-281-280MBT Spray Solvent Tool, 8"
- SEZ DV-34BF Wafer Processor, 12"
- SEZ 101 Spin Etcher, up to 6"
- SEZ 201 Spin Etcher, 6" to 8"
- SEZ 203 Spin Etcher, 6" to 8"
- SEZ 223 Spin Etcher, 4" to 8"
- SEZ 304 Spin Etcher, 8" to 12"
- SEZ 305 Spin Etcher, 8" to 12"
- SEZ 323 Spin Etcher, 12"
- SEZ spares - please ask !
- Shibaura CDE-8 Dry Etcher, 8"
- STS Multiplex ICP High Rate Inductively-Couple Plasma Etcher, up to 8"
- ULVAC TDE-300M Plasma Etcher, 8"
- Veeco RF-350S Ion-Beam Milling System, 6"
Evaporation and Sputtering Systems
- Balzers BAK-550 Evaporator System
- Balzers BAK-760 E-Beam Evaporator System
- Balzers LLS-802 Metal Sputter System
- Balzers LLS EVO Sputter System
- Canon Anelva I-1060 SV II Plus-1 Sputtering System, 5 chambers, 8"
- CHA SE-1000 E-Beam Evaporator
- Cressington 208HR High Resolution Sputter Coater
- Denton Integrity 14 Vacuum System
- Edwards E306 Filament Evaporator
- Electrotech MS 6210 Sputtering System, 4"
- Emitech K675X Table-top Sputtering System
- EVG 150 Automated Coater / Developer, up to 8"
- HANIL VACUUM HVC-2050DA High Vacuum Box Coater
- ITO Roll to Roll Sputtering System, max. 1,400 mm film width
- Karl Suss ACS 200 Spin Coater, 8"
- Karl Suss Alpha R.12 Liquid Transfer Coating Tool
- Karl Suss Delta 12AQ Spin Coater / Developer, 8" / 12"
- Karl Suss Delta 12L Spin Coater / Developer, 8" / 12"
- Kurt Lesker Aluminum Evaporator, 8"
- Leybold APS 1104 Evaporation System
- Leybold APS 1504 Optical Coating System
- Leybold Pegasus Sputtering System
- Leybold ZV-6000 Sputtering System
- MRC 8867 Sputtering System
- MRC 942 Sputtering System
- Optorun OTFC-1100 Optical Coater
- Perkin Elmer 2400 Sputtering System
- Perkin Elmer 4410 RF / DC Sputtering System
- Temescal BJD-1800 Sputtering System
- Thermionics VE Series R&D E-Beam System
- UHV Magnetron Sputtering System
- ULVAC Ei - 5k e-Beam Evaporation System
- Ulvac Satella Thin Film Deposition System for OLED, 200 x 200 mm substrate size
- Ulvac SMD-450C Sputter
- Unaxis LLS EVO Sputtering System, 8"
- Veeco Spector Optical Coater
Furnaces
- ASM COE 139 Curing System
- Aviza AVP 8000 AP Vertical Furnace, 8"
- Aviza AVP 8000 LP LPCVD Furnace, 8"
- Aviza Celsior LPCVD Furnace, 12"
- Aviza Pantheon LPCVD Furnace, 12"
- Aviza Pantheon LPCVD Furnace, 3 ALD chambers,12"
- Aviza VTR 7000 High Temperature Furnace, 8"
- BTU Bruce 7355 Horizontal Furnace, 8"
- Despatch CF-2710 Furnace				10.11.17
- Despatch DF-14414 / 10-NS Inline Diffusion Furnace
- First Nano ET3000 Horizontal Furnace, 2" to 5"
- First Nano ET6000 Horizontal Furnace
- GT Advanced Sapphire Furnace
- Kokusai DJ-803V Oxidation Furnace, 8"
- Kokusai DD-823V Furnace, 8"
- Kokusai DJ-825V Poly LPCVD, 6"
- Kokusai DJ-853 Furnace, 8"
- Kokusai DJ-853V-BL D-Poly, 8"
- Kokusai DJ-853V-BL Nitride, 8"
- Kokusai DJ-853V-BL SOG Curing, 8"
- Kokusai DJ-853V-BL TEOS, 8"
- Kokusai Quixace Vertical Furnace, ALD TiN, 12"
- Kokusai Quixace DD-1206V-DF Vertical Furnace, 12"
- Kokusai Quixace DD-1206VN-DF Vertical Furnace, 12"
- Kokusai Quixace DJ-1206VN-DM Vertical Furnace, 12"
- Kokusai Quixace Ultimate Vertical Furnace, 12"
- Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12"
- Kokusai Zestone III (DJ-1223V) Vertical Furnace, Poly, 12"
- Koyo Thermo System VF-5300B Polyimide Bake
- MRL Cyclone C430 Four-Tube Horizontal Furnace, 6"
- SST DAP 1100 Vacuum Furnace, 1000 deg C
- SST DAP 2200 Vacuum Furnace, 1000 deg C
- SST HVWB 2200 Vacuum Furnace, 1000 deg C
- SST MV 2200 Vacuum Furnace, 1000 deg C
- SVG VTR-7000 Oxide Vertical Furnace, 8"
- SVG AVP 8000 AP Vertical Furnace, 8"
- SVG AVP 8000 LP Vertical Furnace, 8"
- TEL Alpha 303i Furnace, LT SOD cure, 12"
- TEL Alpha 303i Furnace, P-Doped Poly, 12"
- TEL Alpha 8S Furnace, 8"
- TEL Alpha 8SE Furnace, 8"
- TEL Alpha 8SE-E Furnace 8", High Temp Oxide
- TEL Alpha 8SE Furnace, 8"
- TEL Indy+ Vertical Furnace, 12", ALD HfO2
- TEL UL2604-10H Furnace
Implanter
- AMAT 9500 XR Ion Implanter, 8"
- AMAT Quantum X Plus High Current Ion Implanter, 12"
- AMAT xR-LEAP Low Energy Ion Implanter, 8"
- Axcelis/Eaton NV GSD HE High Energy Ion Implanter, 8"
- Axcelis Paradigma XE Ion Implanter, 12"
- Axcelis Purion H High Current Ion Implanter, 12"
- Eaton Nova NV 10-160 Ion Implanter, 5"
- Nissin Exceed 2300 Ion Implanter, 12"
- SEN LEX3 Low Energy High Current Ion Implanter
- Varian 160XP High Current Ion Implanter, 6"
- Varian E500 EHPi Medium Current Ion Implanter, 8"
- Varian E500 HP Ion Implanter, 6"
- Varian E500 HP Ion Implanter, 8"
- Varian E1000 Implanter, 8"
- Varian VIISion 80 Ion Implanter, 8"
- Varian VIISta 80 Classic High Current Ion Implanter, 8"
- Varian VIISta 80 HP Ion Implanter, 8"
- Varian VIISta 810 Medium Current Ion Implanter, 8"
- Varian VIISta 810 XEr Medium Current Ion Implanter, 12"
Laser
- Chicago Laser CLS37 Laser Trimming System, refurbished
- Chicago Laser LS960 Laser Trimming System, refurbished
- Cymer ELS 4000 Laser
- Cymer ELS 5600 Laser
- Cymer ELS 6300 Laser
- ESI 2050 LP Laser Trimming System
- ESI 4990 Laser Trimming System
- ESI 5970 Laser Repair System
- ESI 9275 Laser Repair System - parts machine
- ESI 9300 Laser Repair System
- ESI 9820 Laser Processing System, 12"
- ESI 9825 Laser Processing System, 8" and 12"
- ESI 9830 Laser Processing System, 12"
- ESI 9850 Laser Processing System, 12"
- GSI M310 Laser Trimming System
- GSI M435 Laser Repair System
- Hitachi ABC-2C-C CO2 Laser System
- Innolas ILSTT-DS Laser System
- New Wave Research 2150 Laser Scriber
- New Wave Research Titan Laser Scriber
- Rofin CL Cube Laser
- Rofin DQ 010 q-switched Solid State Laser
Metrology
- Advantest / Leica E3610 CD SEM
- AMAT NanoSEM 3D Critical Dimension SEM, 12"
- AMAT Opal 7830i CD SEM, 8"
- Beta Squared OS2000 Micralign Mask Scanner, 4" to 6"
- Biorad QS 300 FTIR Spectrometer, up to 12"
- Biorad QS 408M Manual FTIR Spectrometer, up to 8"
- Biorad QS 1200 FTIR Spectrometer, 12"
- Biorad Quaestor Q7 Profilometer, 8"
- Cyberscan Vantage Noncontact Profiler with Keyence LT9010M
- Dynamic Micro Systems 2090 Automatic Reticle Changer
- Four Dimensions 280C Four Point Probe System
- FSM 128 Film Stress Measurement System, 8"
- HSEB Axiospect 300, 12"
- Jordan Valley JVX5200 XRR X-Ray Reflectometer, 12"
- KLA Tencor 2401 Viper Macro Defect Inspection, 8"
- KLA Tencor 5300 Overlay and CD Measurement, 8"
- KLA Tencor Aleris Spectra DX Interferometer, 12"
- KLA-Tencor Archer AIM, 300mm
- KLA-Tencor ASET F5x Thin Film Measurement System, 8"
- KLA-Tencor ASET F5x Thin Film Measurement System, 8" / 12"
- KLA Tencor eCD 1 SEM, 8" / 12"
- KLA-Tencor eDR-5210 Wafer Defect Review System
- KLA Tencor eS32 Defect Review System, 12"
- KLA Tencor Flexus FLX-2360 Stress Measurement, 12"
- KLA-Tencor LMS IPRO5 Photomask Registration and CD Metrology System
- KLA Tencor / Prometrix RS35C Four Point Probe System
- KLA Tencor / Prometrix RS50/e Four Point Probe System, 8"
- KLA Tencor / Prometrix RS55/tc Four Point Probe System, 8"
- KLA Tencor / Prometrix RS55/tca Four Point Probe System, 8"
- KLA Tencor / Prometrix RS75 Four Point Probe System
- KLA Tencor / Prometrix RS75/a Four Point Probe System
- KLA Tencor P-15 Long Scan Profilometer
- KLA Tencor Puma 9000 Dark Field Defect Inspection, 12"
- KLA Tencor Quantox 64100 Silicon and Oxide Monitoring System, 8"
- KLA Tencor SCD Interferometer, 12"
- KLA Tencor Ultrapointe CRS 1010S Interferometer, 8"
- KLA Tencor UV1050 Film Thickness Measurement, 8"
- KLA Tencor UV1080SE Film Thickness Measurement, 8"
- Nanometrics Nanospec AFT 2100 Thin Film Measurement System, 3" to 8"
- Nanometrics NanoSpec 3000 Thin Film Measurement System, 8"
- Nanometrics NanoSpec 6100 Thin Film Measurement System, up to 8"
- Nanometrics 8000 Thin Film Measurement System, 6"
- Nanometrics 8300 Thin Film Measurement System, 8" + 12"
- Nanometrics Q200i Biorad Overlay System, 8"
- Nanometrics QS-1200 FT-IR Spectrometer, up to 8"
- Plasmos SD2000 Ellipsometer
- Plasmos SD4000 Ellipsometer
- Raytex EdgeScan Wafer Edge Inspection System, 8"
- ReVera VeraFlex, 12"
- Rigaku MFM65 Small Spot Energy Dispersive X-Ray Fluorescence Spectrometer
- Rigaku XRF 3620 X-Ray Fluorescence Spectrometer, 8"
- Rigaku XRF 3640 X-Ray Fluorescence Spectrometer, 8"
- Rigaku TXRF 3700H X-Ray Spectrometer
- Rigaku Ultima IV X-Ray Diffraction System (XRD)
- Rudolph / August NSX-90 Wafer Inspection System, 8"
- Rudolph / August NSX-105B Wafer Inspection System, 8"
- Rudolph / August NSX-105C Wafer Inspection System, 8", w/ Wafer Handler
- Rudolph AXI-930 B20 Macro Defect Inspection, 12"
- Rudolph MetaPulse 200X Cu System, 8"
- Rudolph SE200XL Spectral Ellipsometer, 8"
- Rudolph Waferview 320 Wafer Inspection System, 12"
- Semilab IR3100S Small spot IR-Near IR FT-IR Spectrometer, 12"
- Semilab / SDI WT-2000 Measurement System, 8"
- ThermaWave Optiprobe 2600B Film Thickness Measurement System
- ThermaWave Optiprobe 3290 DUV Film Thickness Measurement System
- Thermawave OptiProbe 5340C Thin Film Thickness Measurement, up to 12"
- Thermawave OptiProbe 5340s Thin Film Thickness Measurement, 12"
- Thermo Nicolet ECO 1000 FTIR Spectrometer
- Thermo Scientific MicroXR VXR Benchtop X-ray Fluorescence Spectrometer
- Veeco Dektak 3 Profilometer
- Veeco Dektak 3030 Profilometer
- Veeco Dimension 5000 Atomic Force Microscope (AFM)
- Veeco Dimension X1D Atomic Force Microscope (AFM), 12"
- Veeco Dimension X3D Atomic Force Microscope (AFM)
- Veeco RF-350 S Ion Mill, 8"
- Veeco Dektak 200 SL Profilometer, 8"
- Veeco NT3300 Surface Profilometer, 8"
Photolithography
- Fusion Gemini GPS Photostabilizer, 8"
- MIVA 20128 Mask Wrighter
- Tamarack 152R Projection Mask Aligner
- Tamarack 303 Projection Mask Aligner
Pumps
- Adixen ATH 500M Turbo Pump
- Alcatel ATH 1300M Turbo Pump
- Ebara AA70WN Dry Pump
- Ebara A30W Dry Pump
- Ebara A70W Dry Pump
- Ebara ADP122P Dry Pump
- Ebara ADP602P Dry Pump
- Ebara ESR20N Dry Pump
- Edwards E2M-80 Dual Stage Vacuum Pump, Fomblin prepped
- Edwards iH600 Mk5 Dry Vacuum Pump
- Edwards iH1000 Mk5 Dry Vacuum Pump
- Edwards iF1800 Dry Vacuum Pump
- Edwards 8 RV8 Vacuum Pump
- Leybold TURBOVAC T 1600 Turbo Pump
- Osaka TG1813BW Compound Molecular Pump
Rapid Thermal Processing
- AG Associates 210M Heatpulse RTP System, 4"
- AG Associates 410 Heatpulse RTP System, 4"
- AG Associates 610 RTP System, up to 6"
- AG Associates 4100S Heatpulse RTP System, 6"
- AG Associates 8108 Heatpulse RTP System, 8"
- Mattson AST 2800 RTP System, 6"
- Mattson AST 2800 RTP System, 8"
- Mattson AST SHS-2900 RTP System, 8"
- Mattson Helios RTP System, 12"
Resist Processing
- CFM Technologies CFM8050 Full Flow Photo Resist Processing
Wafer Bonder
- EVG EV501 Wafer Bonder, up to 6"
- EVG 520IS UV-NIL Bonder, 8"
- EVG 520IS Wafer Bonder, up to 8"
- EVG 805CPP Wafer Debonding System, 8"
- EVG 805EZD Wafer Debonding System, 8"
- EVG 850DB Wafer Debonding System, 8"
- EVG 850DB/200 Wafer Debonding System, 6"
- EVG 850TB Wafer Bonding System, 8"
- EVG 850DB/200 Wafer Bonding System, 6"
- EVG Gemini Automated Wafer Bonder, 8"
- EVG Smartview Bond Aligner, 6" to 12"
- Karl Suss ABC200 Wafer to Wafer Bonder
- Karl Suss CBC200 Automated Wafer Bonding Cluster System
- Karl Suss SB8e Substrate Bonder, up to 8"
- Logitech 3000 Wafer Bonder, up to 6"
Wafer Cleaning
- Disco DCS-141 Wafer Washer
- DNS AS-2000 CMP Scrubber
- DNS SS-W60A-AR Scrubber, 6"
- DNS SSW-80B-AR Scrubber, 8"
- DNS SS-W80B-AR Scrubber, 8"
- DNS SS-3000-A Wafer Scrubber, 12"
- DNS SS-3000-AR Wafer Scrubber, 12"
- DNS SU-3000 Single Wafer Cleaner, 12"
- DNS Aquaspin SU-3100 Single Wafer Cleaner, 12"
- DNS WS-820L Wafer Cleaning Track
- Ebara EPO-113 CMP System, 8"
- MEG 8BC Spin Cup Cleaning System, up to 12"
- MEG SS Spin Scrubber Cleaning System, 4" to 8"
- OnTrack DSS-200 Series I Wafer Brush Cleaning System, 8"
- OnTrack DSS-200 Series II Wafer Brush Cleaning System, 8"
- OnTrack DSS-2200 Synergy Wafer Brush Cleaning System, 8"
- Peter Wolters PM300 CMP System, 12"
- Rena SC1 / SC2 Wafer Cleaning System, 6" to 12"
- Semitool Magnum HF Cleaner, 8"
- Semitool 270 Spin Rinse Dryer (SRD), 4" to 6"
- Semitool 270S Spin Rinse Dryer (SRD), up to 6"
- Semitool 280S Spin Rinse Dryer (SRD), up to 8"
- Semitool 870S Spin Rinse Dryer (SRD), dual stack, up to 6"
- Semitool 880S Dual Spin Rinse Dryer (SRD), up to 8"
- Semitool ST-870 Spin Rinse Dryer (SRD), up to 6"
- Semitool 4300S Single Stack SRD, up to 8"
- Semitool 8300S Dual Spin Rinse Dryer (SRD), up to 8"
- SEZ DaVinci DV-38 Wafer Cleaner, 12"
- SVG 8600 Wafer Scrubber, 6"
- TEL Mk 11 Clean Track, 6"
- Verteq 1800-6AL Dual Stack Spin Rinse Dryer, 8"
- Verteq 1800-6AR Spin Rinse Dryer, 8"
Wafer Coater / Developer
- Brewer Science CEE 200 FX Resist Developer, 12"
- Brewer Science 300XD Resist Developer, 12"
- Brewer Science CEE 4000 Photoresist Coater (bench top unit)
- C & D Semi Dual Coater Track
- C & D Semi Dual Developer Track
- DNS SC-W60A 2C Coater, 6"
- DNS SDW-60-AVP Developer, 6"
- DNS SDW-60A-AV Developer, 6"
- DNS 80A Developer, 6"
- DNS RF3 Coat / Develop Track
- DNS SK-W80A-BVPE Track, 1C / 2D, 8"
- DNS SK-W80B-AVPE Track, 1C / 2D, 8"
- DNS SK-200W Coater / Developer, 8"
- DNS SK-2000 Coater / Developer
- LAURELL WS-650Sz Manual Spin Coater
- Sokudo RF-300A Coater / Developer Track, 12"
- STEAG Microtech Coater/Developer Cluster 421
- SVG 88 Coater / Developer Track System, 6"
- SVG 90 Coater / Developer Track System, 8"
- SVG 8800 Dual Track Coater / Developer System
- SVS MSX 1000 Coater / Developer, 2"
- TEL Mk 7 2C / 2D Track, 8"
- TEL Mk 8 1C / 1D Track, 8"
- TEL Mk 8 2C / 2D Track, 8"
- TEL Act 8 2C / 3D Track, 6"
- TEL Act 8 2C / 2D Track, 8"
- TEL Act 8 2C / 2D Track, 8"
- TEL Act 8 Track, 2 Coat / 2 Develop, dual block, 8"
- TEL Act 8 Track, 3 Coat / 3 Develop, dual block, 8"
- TEL Act 8 Track, 3 Coat / 4 Develop, dual block, 8"
- TEL Act 8 Track, 4 Coat / 3 Develop, dual block, 8"
- TEL Act 8 Track, 4 Coat / 4 Develop, dual block, 8"
- TEL Act 8 Single Block Track, 8"
- TEL Act 12 2C / 4D Track, setup for 8"
- TEL Lithius Coater Developer, 8"
- TEL Lithius ArF Photoresist Coater / Developer, 12"
- TEL Lithius KrF Photoresist Coater, 12"
- TEL Lithius i-Line Coater Developer Track, 12"
Wafer Grinder / Polisher
- Accretech PG200RM Backside Grinder
- Accretech PG300RM Backside Grinder, 8" / 12"
- Daitron WBM-2100 Wafer Edge Grinder, 8"
- DISCO DAG-810 Automatic Surface Grinder, 8"
- DISCO DFG 82IF/8 Grinder
- DISCO DFG-840 Backside Grinder, 8"
- DISCO DFG-840HS Backside Grinder, 8"
- DISCO DFG-841 Backside Grinder, 8"
- DISCO DFG-850 Backside Grinder, 8"
- DISCO DFP-8160 Polisher, 12"
- DISCO DFG-8540 Backside Grinder, 8"
- DISCO DFG-8560 Backside Grinder, 8" and 12"
- DISCO DFG-8560 Backside Grinder, 12"
- DISCO DGP-8760 + DFM-2700 Grinder/Polisher, 12"
- DISCO DGP-8761 Grinder/Polisher for 6" LED wafers
- DISCO DGP-8761 Polish Grinder, 12"
- KOYO DXSG 320 Double Side Grinder, 8" and 12"
- Okamoto GDM300 Wafer Grinder / Polisher, 12"
- Okamoto GNX200 Backside Wafer Grinder, 8"
- Okamoto GNX300 Backside Wafer Grinder, 12"
- Okamoto GNX300P Backside Wafer Grinder, 8" and 12"
- Shibayama VG502 Mk II Backside Wafer Grinder, 8"
- Strasbaugh 7AA Grinder
Wafer Handling
- Brooks Automation Fixload 6 Loadport, 12"
- Brooks Automation Fixload 25 Loadport, 12"
- Mactronix AWi-600 Automatic Wafer Sorter
- Mactronix Eureka UKA-650 Wafer Transfer System, 6"
- Mactronix Eureka UKA-825 Wafer Transfer System, 8"
- Recif Technologies ESR300F53 Wafer Sorter, 12"
- Recif Technologies SIS300F53 Wafer Sorter, 12"
Wafer Inspection / Measurement
- Accretech Win-Win 50 A5000 Brightfield Inspection System, 12"
- AMAT Compass Pro Wafer Inspection, 8"
- AMAT Compass Pro Wafer Inspection, 12"
- AMAT ComPLUS Wafer Inspection, 12"
- AMAT UVision 4 Wafer Inspection System, 12"
- Hermes Inspection HMI eScan 320 eBeam Inspection System, 12"
- Hitachi LS-6700 Dark Field Inspection, 12"
- Irvine Optical UL208 Wafer Mapper, 8"
- Irvine Optical Ultrastation 3.E Wafer Inspection System, 8"
- KLA Tencor 2122 Wafer Inspection System incl. SAT, 6"
- KLA Tencor 2122 Spares - please ask for list !
- KLA Tencor 2131 Wafer Inspection System, 8"
- KLA Tencor 2138 Wafer Defect Inspection, 8"
- KLA Tencor 2139 Wafer Defect Inspection, 8"
- KLA-Tencor 2608 Wafer Inspection System, 8"
- KLA-Tencor 2915 Brightfield Wafer Inspection System, 12"
- KLA Tencor 4500 Surfscan Wafer Inspection System
- KLA Tencor 5100 XP Surfscan Wafer Inspection, 8"
- KLA Tencor 6200 Surfscan Wafer Inspection, 8"
- KLA Tencor 6220 Surfscan Unpatterned Wafer Inspection, 8"
- KLA Tencor 6400 Surfscan Wafer Inspection, 8"
- KLA Tencor AIT I Surfscan Wafer Inspection, 8"
- KLA Tencor AIT II Surfscan Wafer Inspection, 8" / 12"
- KLA Tencor AIT XUV Darkfield Inspection, 12"
- KLA Tencor AlphaStep 200 Profilometer, 5"
- KLA Tencor AlphaStep IQ Profilometer, 6" to 8"
- KLA Tencor HRP-320 Profiler, up to 12"
- KLA Tencor HRP-420S Profiler, 8"
- KLA Tencor INS-3300 Defect Review System, 12"
- KLA Tencor P-11 Profiler, 8"
- KLA Tencor SFS 7600 Wafer Inspection System, 8"
- KLA Tencor SFS 7700 Wafer Inspection System, 4" to 8"
- KLA Tencor SP1 Classic Wafer Inspection System, 8"
- KLA Tencor SP1 TBI Wafer Inspection System, 12"
- KLA Tencor SP2 Wafer Inspection System, 12"
- N&K Analyser 3000 for Thick Resist Measurement, 6"
- Nikon Optistation VII Automated Inspection, 12"
- OSI 2100 Overlay and CD Measurement System, up to 6"
- SDi FAaST-230m Wafer Characterization System, 8"
- SemiTest Epimet 2 Thin Film Epi Measurement, 8"
- Vistec LDS 3000 M Wafer Inspection System, 4", 8", 12"
- Vistec LDS 3300 M Wafer Inspection System, 4", 8", 12"
Wafer Mask Alignment
- EVG 620 Mask Aligner, 6"
- Karl Suss MJB3 Mask Aligner w/ backside alignment, 3"
- Karl Suss MA4 Mask Aligner, 4"
- Karl Suss MA6 Mask Aligner, 6"
- Karl Suss MA150 Mask Aligner, 6"
- Karl Suss MA150CC Mask Aligner, 6", top and backside alignment
- Karl Suss MA8 Mask Aligner, 8"
- Karl Suss MA8 / BA8 Mask Aligner, 8"
- Karl Suss MA200 Mask Aligner, up to 8"
- Karl Suss MA200cc Mask Aligner, up to 8"
- Karl Suss MA200e Mask Aligner, 8"
- Midas MDA 400LJ Mask Aligner, 4"
- Neutronix Quintel 7000 Mask Aligner, up to 8"
- OAI Hybralign 200 Mask Aligner, 8"
- Quintel 7000 Mask Aligner, 12"
Wafer Mask Cleaning
- K&S 973 MicroWash Mask Cleaner, up to 10" diagonal substrates
- SSEC Model 3300 ML Trillenium Photomask Cleaner
- SSEC M3306 Flux Cleaner, 12"
Wafer Mask Inspection
- Carl Zeiss AIMS 193 Mask Inspection System
- KLA Tencor StarLight SL3 URSA Mask Inspection System
Wafer Polisher
- AMAT Mirra Mesa CMP System, 8"
- AMAT Reflexion LK Prime Oxide CMP System, 12"
- AMAT Reflexion LK-Cu CMP System, 12"
- IPEC Avanti 472 CMP System, 8"
Wafer Stepper
- ASML /300 Wafer Stepper, 6"
- ASML AT1100 DUV Scanner, 193 nm, 12"
- ASML PAS-5000/55 Stepper, 4"
- ASML PAS-5500/100C Stepper, 8"
- ASML PAS-5500/100D Stepper, 8"
- ASML PAS-5500/200C Scanner, 8"
- ASML PAS-5500/250C Scanner, 8"
- ASML PAS-5500/275C Stepper, 8"
- ASML PAS-5500/300C Scanner, 8"
- ASML PAS-5500/350C Scanner, 8"
- ASML PAS-5500/400C, 8"
- ASML PAS-5500/750E Lithography System, 8"
- ASML PAS-5500/1100B 193nm ArF Scanner, 8"
- ASML TwinScan AT1200C Scanner, 12"
- ASML TwinScan XT850F KrF Scanner, 12"
- ASML TwinScan XT1250B Scanner, 12"
- ASML TwinScan XT 1400F ArF Scanner, 12" -
- Canon FPA-2500 i2 Stepper, 8", reticle 6"
- Canon FPA-3000 EX4 Wafer Stepper, 8" - parts machine
- Canon FPA-3000 EX5 Wafer Stepper, 8"
- Canon FPA-3000 i4 Wafer Stepper, 8", reticle 6"
- Canon FPA-3000 iW Wafer Stepper, 8", reticle 6"
- Canon FPA-3000 iW Wafer Stepper, 8" - parts machine
- Canon FPA-5000 ES3 Wafer Stepper, 8", reticle 6"
- Canon FPA-5500 iZa Wafer Stepper, 12"
- Nikon FX601 Stepper
- Nikon NSR-1505G6E Stepper, 5"
- Nikon NSR-1505G7E Stepper, 5"
- Nikon NSR-1755G7A Stepper, 6"
- Nikon NSR-1755i7A Stepper
- Nikon NSR-1755i7B Stepper
- Nikon NSR-2005 i9C i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2005i10D Stepper
- Nikon NSR-2005 i11C i-Line Wafer Stepper, 6", reticle 5"
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 EX12B Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 EX14C Wafer Stepper, 8"
- Nikon NSR-2205 i14E Wafer Stepper, 8"
- Nikon NSR-2205 i14E2 Wafer Stepper, 8"
- Nikon NSR-4425i i-Line Wide-Field Stepper, 8"
- Nikon NSR-S202A Wafer Stepper, 8"
- Nikon NSR-S203B Wafer Stepper, 8"
- Nikon NSR-S204B Wafer Stepper, 8"
- Nikon NSR-S204D Wafer Stepper, 8"
- Nikon NSR-S205C Wafer Stepper, 8" to 12"
- Nikon NSR-S206D Scanner, 12"
- Nikon NSR-S306C 193 nm DUV Scanner
- Nikon NSR-S609B Scanner, 12"
- Nikon NSR-S610C Scanner, 12"
- Ultratech 1500 Wafer Stepper, 6"
- Ultratech 1500 MVS Wafer Stepper, 3" to 6"
- Ultratech 2244i Wafer Stepper, 2" to 8"
- Ultratech Saturn 3 Spectrum Stepper, 8"
Wet Process
- Amerimade Decap 5ft Wet Bench
- IVY Semiconductor Automated Wet Bench
- JST Ultrasonic Solvent Wet Bench KOH
- JST Ultrasonic Solvent Wet Bench KOH
- Schmid Model 59 Silver Plating System
- Semitool Alpha CP04MNSPD0801 Wet Processing System
- Semitool 1-Chamber Spray Acid Tool (SAT), 8"
- Semitool Mini Raider RM02MNSPD0802 Wet Processing System
- Semitool Raider ECD-10 Plating System, 12"
- Semitool Raider ECD-310 Plating System, 12"
- Semitool Scepter Spray Acid Tool (SAT), 8"
- Semitool Storm II Box & Cassette Washing System, 8"
- Semitool Storm III Box & Cassette Washing System, 6" to 8"
- Semitool Storm 300 Wafer Cassette Washing System, 12"
- Steag AWP 200 Wet Bench
- TEL NS300 Surface Preparation System, 12"