For Sale - Frontend

Asher
- Alcan Tech / Canon MAS-8000 Microwave Asher

- Axcelis Fusion 150 PC System, 6"
- Axcelis Fusion 200 ACU System, 8"
- Axcelis Fusion PS3 UV Photo Stabilizer, 8" / 12"

- Branson 91391 Quartz Barrel Plasma Etcher

- Kokusai Electric RM 6500 R Plasma Asher

- Mattson Aspen II - parts machine

CVD / PVD Systems
- Aixtron Crius II MOCVD 2" x 55
- Aixtron G3 HT MOCVD 4" x 8
- Aixtron G4 MOCVD for Epi growth for SiC

- AMAT AKT 1600 PECVD System, flat panel size 320 x 352 mm
- AMAT Centura EPI Chambers, 300 mm
- AMAT Endura P5000 Mk II TEOS, 8"
- AMAT P5000, 6"
- AMAT P5000, 8"

- ASM Epsilon 3200 EPI Deposition System, 12"

- Kokusai DD-812 Vertical Furnace, 8"
- Kokusai DD-853 V Vertical Furnace, 6" and 8"
- Kokusai DD-9200 GH Furnace, 8"
- Kokusai DJ-1206VN-DM Vertical Furnace, 300mm, LPCVD Nitride
- Kokusai DJ-813 LPCVD Furnace, 8"
- Kokusai DJ-833V Furnace, 8"
- Kokusai DJ-853V Furnace, 6" and 8"

- MATHESON UR25K429 Gallium Nitride MOCVD System (6" x 7)

- Novellus Concept-1 System, 6", TEOS
- Novellus Concept-1 System, 8"
- Novellus Concept-1 CVD-W, Tungsten, 8"
- Novellus Concept-3 Speed, 3 chambers, 12"

- Oxford Ionfab 300 Plus Ion Beam Etch and Deposition System, 8"
- Oxford PlasmaPro 800Plus RIE Etcher

- Plasma-Therm LLC SLR-770B Deep Reactive Ion Etcher

- Sencera 6 Target In-line Sputter, 1.6 x 1.4 meter substrate processing equipment

- Veeco E300 MOCVD System
- Veeco E400 MOCVD System
- Veeco Gen II MBE System
- Veeco K475 GaN MOCVD System
- Veeco K475i MOCVD Upgrade Kit
- Veeco Spector Ion Beam Sputtering System

- Watkins-Johnson WJ999 CVD System, 8"

Etcher
- Alcatel AMS 4200 Plasma DRIE Etch Equipment

- LAM 2300 Kiyo Metal Etch, 12"
- LAM TCP 9400 SE Etch System, 8"

- March Instruments AP-1000 Plasma Cleaner
- March Instruments PX-1000 Plasma Etcher

- PVA TePla PS80 Plus Microwave Plasma Cleaner

- Samco PC 1100 Photoresist Stripper Asher

- Semitool SST 742 Polymer Remover 

- SEZ 203 Spin Etcher, 6" to 8"
- SEZ 223 Spin Etcher, 4" to 8"
- SEZ 323 Spin Etcher, 12"
- SEZ spares - please ask !

- ULVAC NE-950EX-V CCP Etcher, 2" to 12"

Evaporation and Sputtering Systems
- Balzers LLS-801 Metal Sputter System
- Balzers LLS-802 Metal Sputter System
- Balzers LLS EVO Sputter System

- CHA Mark 40 E-Beam Evaporator

- HANIL VACUUM HVC-2050DA High Vacuum Box Coater

- Varian 3290 STQ Sputtering System

Furnaces
- Aviza RVP 9000 Furnace, 8"

- Kokusai / Bruce BDF-200 LPCVD Furnace, 8"
- Kokusai DJ-813 LPCVD Furnace, 8"
- Kokusai DD-812 Vertical Furnace, 8"
- Kokusai Quixace II ALD / SiO2 Vertical Furnace, 12"

- SST 5100 Programmable Vacuum/Pressure Soldering Furnace

- TEL Alpha 8S Furnace, 8" 
- TEL Alpha-8SE-E Vertical FTP LTO/Nitride Furnace, 8"
- TEL Alpha 8S-Z Furnace, 8" 

- Ulvac V8-100 Furnace

Implanter
- Axcelis 10-160 Ion Implanter, 4" / 6"
- Axcelis / Fusion HE 3 High Energy Implanter, 12"
- Axcelis NV 8200 P MS Implanter, 8"
- Axcelis Paradigma XE Ion Implanter, 12"

- Nissin Exceed 2000 A Ion Implanter, 8"

- Varian E220 Medium Current Ion Implanter, 6"
- Varian 350 D Ion Implanter, 6"
- Varian E500 HP Ion Implanter, 8"
- Varian VIISion 80 + HS 31 Ion Implanter, 8"

Laser
- ESI 44 Laser Trimming System
- ESI 2100 Laser Trimming System
- ESI 9350 Laser Processing System
- ESI 9825 Laser Processing System, 8" and 12"

- Laser Quantum finesse pure Continuous Wave Laser System

Metrology
- Bio-Rad QS 408M Manual FTIR Spectrometer, up to 8"

- Cyberscan CT350T Dual Non-Contact Double-Sided Optical Profilometer

- Nanometrics NanoSpec 6100 Thickness Measurement System, 12"

- Rudolph MP200 Wafer Inspection System, 6" to 8"

- Veeco/Bruker Contour GT-K Optical Profilometer
- Veeco Dektak 8 Profilometer

Photolithography
- Fusion Gemini GPS Photostabilizer, 8"

Pumps
- Adixen A100L Pump
- Adixen A100P Pump
- Adixen ADS602P Pump
- Adixen ADP122P Pump
- Adixen ADS602P Pump
- Adixen ADS1202 Pump
- Adixen ATH 500M Turbo Pump

- Alcatel ADP122 Dry Pump
- Alcatel ADS602 Dry Pump
- Alcatel ADS1202 Dry Pump

- Ebara A10S Dry Pump
- Ebara AA10 Dry Pump
- Ebara A30W Dry Pump
- Ebara AA40W Dry Pump
- Ebara A70W Dry Pump
- Ebara AA70W Dry Pump
- Ebara AAS70W Dry Pump
- Ebara A150W Dry Pump
- Ebara ESR20N Dry Pump

- Edwards iH80 Mk5 Dry Vacuum Pump
- Edwards iH600 Mk5 Dry Vacuum Pump
- Edwards iH1000 Mk5 Dry Vacuum Pump
- Edwards iH1800 Mk5 Dry Vacuum Pump
- Edwards iF1800 Dry Vacuum Pump
- Edwards iH1800 Dry Vacuum Pump
- Edwards iQDP80 Dry Vacuum Pump
- Edwards iXH3030T Dry Vacuum Pump
- Edwards iXH3045H Dry Vacuum Pump
- Edwards STP-A1603C Turbomolecular Pump

- Edwards ESDP12 Scroll Pump
- Edwards XDS 10i Scroll Pump

- Kashiyama MU100 Dry Pump

- Leybold D65BCS Vacuum Pump
- Leybold SP630F Vacuum Pump
- Leybold TURBOVAC 1100C Turbo Pump

- Seiko Seiki STP1303 Turbo Pump

- Varian SH-110 Scroll Pump

Wafer Cleaning
- DNS SS-W80B-AR Scrubber, 8"
- DNS SU-3100 Single Wafer Cleaner, 12"

- TEL / FSI Antares Aerosol Cleaner, 12"
- TEL / FSI Aries Wafer Cleaner, 8"

Wafer Coater / Developer
- DNS 80B Track Interface for Nikon Stepper
- DNS SK-W80A-BVP Coater / Developer

- SVG 90 S ASML Coater / Developer Track System, 2C2D, 6"

- TEL Mark V 1C / 2D Track, 4"
- TEL Mark Vz 1C / 2D Track, 6"
- TEL Act M Coater
- TEL Act M Developer

Wafer Grinder / Polisher
- DISCO DAG810 Backside Grinder, 8"
- DISCO DFS-8910 Surface Planer, 12"
- DISCO DGP-8760 + DFM-2700 Grinder/Polisher, 12"

- Peter Wolters AC1200 F 2-wheel Fine Grinding Machine
- Peter Wolters AC1200 L 2-wheel Lapping Machine
- Peter Wolters AC1200 P 2-wheel Polishing Machine

Wafer Inspection / Measurement
- KLA Tencor 2132 Wafer Inspection System, 8"
- KLA Tencor 5500 Surfscan Wafer Inspection, 8"
- KLA Tencor 6220 Surfscan Wafer Inspection, 8"
- KLA Tencor 6400 Surfscan Wafer Inspection, 8"
- KLA Tencor 6420 Surfscan Wafer Inspection, 8"
- KLA Tencor Candela CS20 Optical Surface Analyzer
- KLA Tencor SP1 Classic Wafer Inspection System, 6" to 8"

Wafer Mask Alignment
- Canon MPA 600 FA Mask Aligner, 6"

- EVG 420 Mask Aligner, 4"
- EVG 6200 Infinity Mask Aligner, 8"

- Karl Suss MJB3 Mask Aligner, 3"

Wafer Stepper
- Nikon NSR-1505G4D Stepper, 6"
- Nikon NSR-2005 i11C i-Line Wafer Stepper, 6", reticle 5"
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 6", reticle 6"
- Nikon NSR-2205 i11D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-2205 i12D i-Line Wafer Stepper, 6", reticle 6"
- Nikon NSR-2205 i12D i-Line Wafer Stepper, 8", reticle 6"
- Nikon NSR-S204B KrF Scanner, 8"
- Nikon NSR-S205 Scanner, 12"
- Nikon NSR-S207D Scanner, 12"
- Nikon NSR-S609B Scanner, 12"
- Nikon NSR-SF100 Polyimide Exposure System, 12"
- Nikon S609B Immersion Scanner, 12"